Solid-State Electrodes for Multichannel Multiplexed Intracortical Neuronal Recording

Department of Electrical Engineering and Computer Science, University of Michigan
IEEE Transactions on Biomedical Engineering (Impact Factor: 2.35). 03/1986; 33(2):230 - 241. DOI: 10.1109/TBME.1986.325895
Source: IEEE Xplore


Thin-film arrays of extracellular recording electrodes have been developed for use in studies of information processing in neural structures and eventual use in closed-loop control of neural prostheses. These probes consist of a silicon substrate which supports an array of thin-film conductors. The conductors are insulated above and below with deposited dielectrics. The electrode sites are defined by openings in the upper dielectric layer and are inlaid with gold to form low-impedance recording surfaces. The probes are typically 15 pim in thickness with shank widths as narrow as 20 ¿m. The probe fabrication process is compatible with the inclusion of signal processing circuitry directly on the probe substrate. A 12 channel on-chip signal processor design with per-channel gain of 100, bandwidth of 100 Hz-6 kHz, multiplexed output, and recording-site impedance check capability is described. The probes have adequate strength to penetrate the gerbil pia-arachnoid layer and have recorded single neuron activity of over 500 ¿V peak-to-peak from tip, side, and mid-carrier sites. Signal-to-noise ratios as high as 10:1 have been achieved. An equivalent circuit model for the conducting leads, the recording site, and the electrode-electrolyte interface is described. Development of biocompatible insulation and encapsulation materials for long-term implantation of active probes is underway.

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    • "Similar to existing microwire devices, early silicon-based devices consisted of a penetrating tine with an exposed conducting tip capable of electrically interacting with nearby cells [36] [37]. By the 1980's, further work by Wise and colleagues at the University of Michigan led to the development of what is commonly referred to as the 'Michigan (MI)-style microelectrode' [38]. Applying newly developed microfabrication processes such as diffusion-based etch stops, silicon microelectrodes were fabricated with multiple recording sites placed along a single or multiple planar shanks [39]. "
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    ABSTRACT: To ensure long-term consistent neural recordings, next-generation intracortical microelectrodes are being developed with an increased emphasis on reducing the neuro-inflammatory response. The increased emphasis stems from the improved understanding of the multifaceted role that inflammation may play in disrupting both biologic and abiologic components of the overall neural interface circuit. To combat neuro-inflammation and improve recording quality, the field is actively progressing from traditional inorganic materials towards approaches that either minimizes the microelectrode footprint or that incorporate compliant materials, bioactive molecules, conducting polymers or nanomaterials. However, the immune-privileged cortical tissue introduces an added complexity compared to other biomedical applications that remains to be fully understood. This review provides a comprehensive reflection on the current understanding of the key failure modes that may impact intracortical microelectrode performance. In addition, a detailed overview of the current status of various materials-based approaches that have gained interest for neural interfacing applications is presented, and key challenges that remain to be overcome are discussed. Finally, we present our vision on the future directions of materials-based treatments to improve intracortical microelectrodes for neural interfacing.
    Full-text · Article · Feb 2015 · Journal of Neural Engineering
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    • "Similarly in-plane microneedles have been used for activity recording and cellular chemostimuli of brain tissue (BeMent et al. 1986; Chen et al. 1997). Solid, out-of-plane, microneedles have been used to penetrate the stratum corneum layer in human skin (outermost layer of the epidermis is the stratum corneum, a 10–20 lm layer) for Electroencephalogram (EEG) measurements for anesthesia monitoring (Griss et al. 2001, 2002). "
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    ABSTRACT: In this paper, we present design, fabrication and coupled multifield analysis of hollow out-of-plane silicon microneedles with piezoelectrically actuated microfluidic device for transdermal drug delivery (TDD) system for treatment of cardiovascular or hemodynamic disorders such as hypertension. The mask layout design and fabrication process of silicon microneedles and reservoir involving deep reactive ion etching (DRIE) is first presented. This is followed by actual fabrication of silicon hollow microneedles by a series of combined isotropic and anisotropic etching processes using inductively coupled plasma (ICP) etching technology. Then coupled multifield analysis of a MEMS based piezoelectrically actuated device with integrated silicon microneedles is presented. The coupledfield analysis of hollow silicon microneedle array integrated with piezoelectric micropump has involved structural and fluid field couplings in a sequential structural-fluid analysis on a three-dimensional model of the microfluidic device. The effect of voltage and frequency on silicon membrane deflection and flow rate through the microneedle is investigated in the coupled field analysis using multiple code coupling method. The results of the present study provide valuable benchmark and prediction data to fabricate optimized designs of the silicon hollow microneedle based microfluidic devices for transdermal drug delivery applications.
    Full-text · Article · Sep 2010 · Cardiovascular Engineering
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    • "Finally, the dielectrics isolate the internal conductors from the external conducting media and thus allow safe delivery of the signal along the probe. The first version of this probe was developed by Najafi et al. (1985) and soon after reported as a tool for neuroscience (BeMent et al., 1986; Drake et al., 1988). Demonstration for use as a stimulation device in the auditory system was reported later (Anderson et al., 1989). "
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    ABSTRACT: Microelectrode arrays offer the auditory systems physiologists many opportunities through a number of electrode technologies. In particular, silicon substrate electrode arrays offer a large design space including choice of layout plan, range of surface areas for active sites, a choice of site materials and high spatial resolution. Further, most designs can double as recording and stimulation electrodes in the same preparation. Scala tympani auditory prosthesis research has been aided by mapping electrodes in the cortex and the inferior colliculus to assess the CNS responses to peripheral stimulation. More recently silicon stimulation electrodes placed in the auditory nerve, cochlear nucleus and the inferior colliculus have advanced the exploration of alternative stimulation sites for auditory prostheses. Multiplication of results from experimental effort by simultaneously stimulating several locations, or by acquiring several streams of data synchronized to the same stimulation event, is a commonly sought after advantage. Examples of inherently multichannel functions which are not possible with single electrode sites include (1) current steering resulting in more focused stimulation, (2) improved signal-to-noise ratio (SNR) for recording when noise and/or neural signals appear on more than one site and (3) current source density (CSD) measurements. Still more powerful are methods that exploit closely-spaced recording and stimulation sites to improve detailed interrogation of the surrounding neural domain. Here, we discuss thin-film recording/stimulation arrays on silicon substrates. These electrode arrays have been shown to be valuable because of their precision coupled with reproducibility in an ever expanding design space. The shape of the electrode substrate can be customized to accommodate use in cortical, deep and peripheral neural structures while flexible cables, fluid delivery and novel coatings have been added to broaden their application. The use of iridium oxide as the neural interface site material has increased the efficiency of charge transfer for stimulation and lowered impedance for recording electrodes.
    Preview · Article · Feb 2008 · Hearing Research
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