Application of spectrum imaging to the study of high-k dielectric stacks

School of Chemistry, University of Glasgow, Glasgow, Scotland, United Kingdom
Design and Nature 01/2004; 6.
Source: OAI


The replacement Of SiO2 as the gate oxide in CMOS by materials with higher permittivity such as HfO2/HfSiO has encountered problems from physical and chemical changes that occur during processing of the gate stack. Spectrum imaging, used in conjunction with the analysis of electron energy loss near edge structure, is shown to be a powerful tool to investigate such changes.

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