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Reviewing angle-resolved methods for improved surface particle detection
Abstract
If the semiconductor industry is to achieve contamination-free manufacturing, analytical instrumentation must continue to evolve. The basic research reported in this article suggests that multiple scattered-light detectors should be included in the next generation of surface particle detection equipment. Wafer scanners using such angle-resolved detection methods could provide information about particle composition and morphology while eliminating the sizing ambiguity associated with integrating optics.
... measured at many scattering angles, 0 * for each detector and a graph plotted that shows the angular distribution o f scatter Analysis o f this graph can give an indication o f surface texture parameters[57] ARS and TIS have been used to detect surface defects on silicon wafers m the semiconductor industry[77][78][79][80] and for inspecting computer disks[81] In conjunctionwith high-speed laser scanning, they provide a quick non-contact form o f inspection for contamination and other defects at an early stage o f semiconductor manufacture, thus improving fabrication yield TIS is generally used for bare silicon wafers and ARS for patterned wafers Defects in these applications consist o f contamination, scratches, pits and polishing defects Hard disk substrates require a certain amount o f roughness as controlled textunng promotes adhesion o f the magnetic layer that stores data In these applications light scattered due to the surface roughness o f the sample is considered background noise Work in this area has focused on reducing the minimum size for defect detection 3 3 3 On-line and Fibre-Optic Methods o f Surface Roughness Measurement Much work has been done in the field o f measuring surface roughness through measurement o f light scattenng Most o f this applies to measuring the roughness o f highly smooth surfaces such as optical parts using ARS and TIS, and has been m the field o f bulk optics The bulk optic configurations o f ARS and TIS are mainly unsuitable for on-line use using fibre-optics ...
This project deals with the design and development of an optoelectronic sensor system and its possible use in online applications There are two different configurations of this sensor a sensor for surface roughness and another for defect detection. In each configuration the mechanical and optical design are almost identical-optical fibres convey light to and from a surface. Light source driving circuits and photodetection circuits were developed for each sensor. Data acquisition and analysis algorithms were developed for each sensor.
Each of the PVD processes discussed has its advantages and disadvantages. Each requires different process monitoring and controlling techniques. Generally, the most simple technique and configuration that will give the desired film properties and most economical product throughput should be used. There are no "handbook values" for the properties of deposited thin films and the properties depend on the details of the deposition process. In order to have a reproducible process and product it is important to have good process controls.
Semiconductor Material and Device Characterizationis the only book on the market devoted to the characterization techniques used by the modern semiconductor industry to measure diverse semiconductor materials and devices. It covers the full range of electrical and optical characterization methods while thoroughly treating the more specialized chemical and physical techniques. In the third edition, Professor Schroder has rewritten parts of each chapter and added two new chapters (Charge Based Measurements and Failure Analysis and Reliability), redrawn and updated most figures, and included new problems and approximately 100 new references. * New end of chapter problems * Outdated figures have been redone and replaced with current data * Up-to-date bibliography with over 1400 references * Professor Schroder is recognized as the authority in the field of semiconductor characterization
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