Contactless magnetically levitated silicon wafer transport system

Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusong-dong, Yusong-gu, Taejon 305-701, Korea
Mechatronics (Impact Factor: 1.73). 08/1996; 6(5). DOI: 10.1016/0957-4158(95)00083-6


A new magnetically levitated wafer transport system is developed for the semiconductor fabrication process to get rid of the particle and oil contaminations that normally exist in conventional transport systems. The transport system consists of levitation, stabilization tracks, and a propelling system. Stabilities needed for levitation in the transport system are achieved by an antagonistic property produced in the tracks and using a simple feedback control. The continuous propelling force is obtained by sending specific current patterns to the propulsion coils. The dynamic model of the transport system is presented and analyzed.

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    • "P.R. Southworth [9] and D. Belnap [10] both developed electromagnetic levitation transport systems for contactless transmission of semiconductor materials. K. H. Park [11] [12] developed a new type of electromagnetic levitation silicon wafer transmission system to solve the pollution problems in traditional contact transport. However, electromagnetic levitation is only applicable to the conductor or semiconductor materials with high conductivity. "
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    ABSTRACT: Re-configurability and scalability are important properties of smart non-contact conveyors. The paper studies smart conveyors. It concentrates on levitation methods; it makes a comprehensive survey on levitation technologies that are currently most active. A conclusion is made that air levitation is well suited to smart conveyors. Furthermore, an overview of the movement mechanisms on air levitation platforms is presented; the various advantages of these technologies are reviewed here and associated scalability properties are detailed. This provides a reference for selecting a reliable movement mechanism for future smart conveyors.
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    • "To perform planar displacements a variety of actuation methods have been developed including electrostatic actuators [4], electromagnetic actuators [5] and air jets [6]. These methods enable to manipulate the objects with no direct contact which avoids damages of fragile components such as electronic cards [7]. "
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    ABSTRACT: One of the greatest challenge in microrobotics is the development of miniaturized smart surfaces for a high speed conveying and positioning of micro-objects. This paper proposes a new approach where objects are situated at the air/liquid interface and are manipulated through magnetic fields. It demonstrates that a good repeatability and a high speed can be obtained. A physical modeling is presented to analyze the dynamic behavior of the micro-object. Experiments are performed to determine the physical parameters of the model and to attest the good repeatability of the motion for an object of size 100x90x25µm 3 . A good agreement between the physical model and the experimental measurement is demonstrated. Since the velocity of the micro-object can be 10 times higher at the air/liquid interface than in the liquid this approach represents a promising solution to design smart surfaces for a high throughput conveying of micro-objects.
    No preview · Conference Paper · Sep 2014
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    • "In the electromagnetic levitation, the levitation force comes from a magnetic field generated by permanent, electro -or superconducting magnets. The electromagnetic levitation was employed for studying crystallization processes and silicon wafer transport systems (see Davis, 1997; Park et al. 1996; Motokawa et al. 1998; Kang et al. 2003 and papers cited therein). However, the use of such levitation scheme is limited to materials with high electrical conductivity. "
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    ABSTRACT: We investigate analytically and numerically trapping of submicron aerosol particles in a three-dimensional quadrupole acoustic chamber having hyperbolical configuration. The particle trajectories are described by the Langevin equation accounting for particle random Brownian motion. The particle trapping efficiency is investigated for a range of acoustic field parameters and particle properties. It is shown that submicron diffusive particles can be trapped in a small region near the chamber center. The effect of Brownian motion is to broaden the trapping region. The dimensions of the trapping region can be reduced by increasing the acoustic strength parameter.
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