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Transient response characteristics and deflection analysis of microactuator
Abstract
This research have been done in order to know the effect of mechanic characteristics to the microactuator such as microcantilever beam deflection. From there, we also observed the effect of voltage and initial condition to the microcantilever displacement and the transient response characteristics. In this research, we used the analytical method and simulation method with Matlab Simulink and Matlab. We observed that the best output response which have fastest response, low overshoot and low steady state error is when d=3.30 and k=3. We also found that the initial condition will only affect the starting point of the response. The increment of voltage will increase the value of displacement and the increment of the voltage did not give any effect to the transient response characteristics.
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In this paper an analysis of influence of three type of damping on free vibration of elastic systems is presented. Linear viscous, nonlinear viscous and dry friction damping were considered. Special emphasis was on determining of critical damping value for all of three types of considered damping cases. Also, analysis of logarithmic decrement of amplitudes, evaluation and comparison logarithmic decrement for considered damping types is presented. For all types of damping, same features of system were used and then analysed. Since some of types of damping couldn’t be solved in closed form, numerical method was used. In this case, forth-order Runge-Kutta method is used for solving damping proportional to squared velocity of motion. Most important conclusion is that only system with linear viscous damping could have critical damping value.
We report an equivalent circuit model for MEMS (microelectromechanical systems) electrostatic actuator using open-source circuit simulator Qucs (quite universal circuit simulator). Electrostatic force, equation of motion, and Kirchhoff's laws are implemented by using the EDD (equation defined device) function of Qucs. Mathematic integral operation in the equation of motion is interpreted into electrical circuits by using an ideal electrical capacitor that read input signal as current and returns accumulation result in terms of voltage. Seamless multi-physics mixed signal simulation between micro mechanics and electronics has become possible on the single platform of the circuit simulator.
In this paper we present a bidirectional silicon micropump. It consists of an electrostatically actuated diaphragm and two passive check valves. It differs from other well-known diaphragm pumps, generally referred to as unidirectional pumps, in the layout of the valves. We have designed a flap valve with a first mechanical resonance frequency between 1 and 2 kHz (in the fluid environment). At low actuation frequencies (0.1–800 Hz), the pump works in the forward mode. At higher frequencies (2–6 kHz) the pump operates in the reverse direction. This is due to a phase shift between the response of the valves and the pressure difference that drives the fluid. Investigating different pump layouts, we achieve maximum pump rates of 250 and 850 μl min-1 in the forward direction as well as 400 and 200 μl min-1 in the reverse direction. The maximum back pressure is 31 000 Pa (3.1 m H2O) in the forward and 7000 Pa (0.7 m H2O) in the reverse direction.
Design of MEMS devices which apply electrostatic forces to
deformable structures is complicated by the fact that as the structure
deforms, the charges redistribute, thereby modifying the mechanical
loads. This paper reports three different levels of model used to
simulate such structures: a very simple lumped
parallel-plate-capacitor-plus-spring model, a one-dimensional numerical
model based on beam and/or plate theory with loads derived from an
incrementally parallel-plate capacitor, and a fully self-consistent
three-dimensional numerical simulation combining finite-element
structural modeling with multipole-accelerated boundary element
capacitance analysis. The relative merits of each model are described,
and several specific examples are examined. The lumped model has the
advantage of simplicity plus a full analytic description, which permits
assessment of stability of solutions. The one-dimensional numerical
model, in the specific cases examined, agrees with the full 3-D model,
and is computationally far less costly However, the simple structures
examined here have nearly parallel conductors which remain in the
small-deflection regime up to the pull-in voltage. For non-parallel
conductors, and for structures which involve large deflections, the full
3-D model will be required. Furthermore, the full 3-D model is extremely
valuable in identifying the limitations of the beam-theory simulation,
some of which could be critical to a design
Analysis of an Electrostatic Microactuator with help of Matlab/simulink: transient and frequency characteristics
- D O Francais
Biosens. Bioelectron
- J H Lee
- K H Yoon
- K S Hwang
- J Park
- S Ahn
- T Kim