Conference Paper

Transient response characteristics and deflection analysis of microactuator

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This research have been done in order to know the effect of mechanic characteristics to the microactuator such as microcantilever beam deflection. From there, we also observed the effect of voltage and initial condition to the microcantilever displacement and the transient response characteristics. In this research, we used the analytical method and simulation method with Matlab Simulink and Matlab. We observed that the best output response which have fastest response, low overshoot and low steady state error is when d=3.30 and k=3. We also found that the initial condition will only affect the starting point of the response. The increment of voltage will increase the value of displacement and the increment of the voltage did not give any effect to the transient response characteristics.

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