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Nano- and micro-scale piezomotors
Abstract
The use of nano- and micro-scale piezomotors in precision electromechanical systems is considered. The deformation of the piezoconverter corresponding to its stress state is investigated.
... The energy conversion in the structural scheme of the nano drive is visibility and logical in the difference from the conversion from the Cady's and Mason's schemes [7][8][9]. The structural model and scheme of nano drive are constructed from it matrix equations and differential equation for the drive [8][9][10][11][12][13][14][15][16]. ...
... Nano drives are used for atomic force microscopy, nano manipulators, nanotechnology, biotechnology, astronomy, space research, metrology, laser resonator [16][17][18][19][20][21][22][23][24][25]. ...
... Let us consider the deformation of the nano drives for biomedical science and research. Two matrix equations [8,[11][12][13][14][15][16] for the nano piezo drive have the form ...
... [1][2][3][4][5][6][7][8][9][10][11][12][13][14] A piezo engine is applied for precise adjustment, compensation the deformations of composite telescope and scanning microscope. [15][16][17][18][19][20][21] For decisions the displacements and the forces of a piezo engine in the control systems for composite telescope is used the structural model of a piezo engine. The structural model clearly shows the conversion of electrical energy by a piezo engine into mechanical energy of the control element of a composite telescope with using the physical parameters of a engine and its load. ...
... The structural model clearly shows the conversion of electrical energy by a piezo engine into mechanical energy of the control element of a composite telescope with using the physical parameters of a engine and its load. [16][17][18][19][20][21][22][23][24][25][26][27][28] The structural model and the structural scheme of a piezo engine for composite telescope are determined in difference from Cady's and Mason's electrical equivalent circuits of a piezo transducer. 7-28 ...
... The matrix state equations [8,[11][12][13][14][15][16][17] of a piezo engine have the form ...
The structural model of a piezo engine for composite telescope is constructed. This structural model clearly shows the conversion of electrical energy by a piezo engine into mechanical energy of the control element of a composite telescope. The structural scheme of a piezo engine is determined. For the control systems with a piezo engine its deformations are obtained in the matrix form. This structural model, structural scheme and matrix equation of a piezo engine are applied in calculation the parameters of the control systems for composite telescope.
... The piezoactuator of nanometric movements operates based on the inverse piezoeffect, in which the motion is achieved due to deformation of the piezoelement when an external electric voltage is applied to it. Piezoactuators for drives of nano-and micrometric movements provide a movement range from several nanometers to tens of microns, a sensitivity of up to 10 nm/V, a loading capacity of up to 1000 N, the power at the output shaft of up to 100 W, and a ransmission band of up to 1000 Hz [22]. ...
... Generalized structural-parametric model and generalized parametric structural schematic diagram of the electromagnetoelastic actuator after algebraic transformations provides the transfer functions of the electromagnetoelastic actuator for nano-and micromanipulators [9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26]. ...
... Piezo drives are used for atomic force microscopy, nanomanipulators, nanotechnology, biotechnology, astronomy, space research, metrology, laser resonator [16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35]. ...
... Two matrix equations [8,[11][12][13][14][15][16][17][18][19] for the piezo drive have the form ...
The structural model of the drive for nanobiotechnology is obtained. The structural scheme of the drive is constructed. In nanobiotechnology for the control systems with the drive its deformations are determined.
... For the structural schema of an engine its energy transformation is clearly [4][5][6][7][8][9][10][11][12][13][14][15][16]. The piezo engine is used for precise movements in adaptive optics and microscopy [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26]. ...
... For the longitudinal PZT engine its relative displacement [8][9][10][11][12][13][14][15][16][17][18] For the longitudinal PZT engine its displacements ...
... In structural schema of electro elastic engine its energy transformation is clearly [7][8][9][10][11][12]. The piezo engine is applied for precise adjustment for nanochemistry in adaptive optics and scanning microscopy [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20]. ...
... For an engine its equations in matrixes [8, For piezo engine Figure 1 its relative displacement for 3 axis [8,[11][12][13][14][15][16][17][18][19][20] has the form where d 33 is piezo coefficient, E 3 is strength electric field on 3 axis, s E 33 is elastic compliance, T 3 is strength mechanical field on 3 axis. The steady-state movement of the transverse piezo engine with fixed one face and at elastic-inertial load has the form For the transverse piezo engine at elastic-inertial load the expression has the form where C l , C E 11 are the stiffness of load and engine, T t , ξ t , ω t are the time constant, the attenuation coefficient and the conjugate frequency of the engine. ...
The structural model of an engine for nanochemistry is obtained. The structural scheme of an engine is constructed. For the control systems in nanochemistry with an elecro elastic engine its characteristics are determined.
... The electro magneto elastic actuator with the piezoelectric, piezomagnetic, electrostriction, magnetostriction effects is used for nanomedical research in the scanning tunneling microscopy [1][2][3][4][5][6][7][8][9]. For control system of the deformation of the electro magneto elastic actuator its structural diagram, transfer function, characteristics are calculated [9][10][11][12][13][14][15][16][17][18]. The structural diagram and matrix transfer function the electro magneto elastic actuator is applied to describe the dynamic and static characteristics of the electro magneto elastic actuator for nanomedical research with regard to its physical parameters and external load [14][15][16][17][18][19][20][21][22][23][24][25][26][27][28]. ...
... For control system of the deformation of the electro magneto elastic actuator its structural diagram, transfer function, characteristics are calculated [9][10][11][12][13][14][15][16][17][18]. The structural diagram and matrix transfer function the electro magneto elastic actuator is applied to describe the dynamic and static characteristics of the electro magneto elastic actuator for nanomedical research with regard to its physical parameters and external load [14][15][16][17][18][19][20][21][22][23][24][25][26][27][28]. ...
... The piezoactuator for Nano science and Nano biomedicine research is used in the scanning tunneling microscope, the scanning force microscope, the atomic force microscope, in the gene manipulator [16][17][18][19][20][21][22][23][24][25][26][27][28][29][30]. ...
... We have the description of the hysteresis nonlinearity of the actuator in the form [16] Citation: Afonin SM. Absolute stability of control system with electro magneto elastic actuator for Nano science and Nano biomedicine research (2019) Nanomaterial Chem Technol 1: The set ...
Interfacial interactions between matrix and reinforcement of composites influences greatly in final properties of the material. Carbon Fibers are characterized for to have low interactions with resins when forming a composite material. In the present study, 0.3 wt% of GO/rGO were incorporated in three systems of epoxy resin/carbon fiber as reinforcing fillers, trying to profit the chemical affinity between aromatics structures of GO/rGO and polar interactions with epoxy resin. GO/rGO were characterized by XPS, TGA was performed on carbon fiber, epoxy resins and composites obtained and SEM was utilized to observe composite samples in detail once mechanical tests were conducted. Composites experienced noticeable enhancements by employing Bisphenol Epoxy (BP) cured with methyl cyclohexane-1,2-dicarboxylic anhydride (MCHDA) as matrix and carbon fiber of 300 g/cm 2 as reinforcement; Youngs modulus, rupture stress and elongation to failure increased almost twofold compared to non-modified composites by adding GO in the system and even superior boosts can be appreciated with rGO, which additionally improves the flexural stress from 14.6 to 30.1 GPa.
... The structural model on Figure 1 is calculated For a nano drive the mechanical and adjustment characteristics [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26] are evaluated ...
... The structural model on Figure 1 is calculated For a nano drive the mechanical and adjustment characteristics [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26] are evaluated ...
... The reverse and direct coefficients are calculated For a nano drive the mechanical and adjustment characteristics [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26] are evaluated ...
The structural model of a nano drive is determined for biomedical research. The structural scheme of the piezo drive is obtained. The matrix equation is constructed for a nano drive.
... The nano piezoactuator works on the basis of the inverse piezoeffect due to its nano deformation at the electric field strength is applied. [16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34] On the characteristic of the nano piezoactuator deformation from the electric field strength, the initial curve is observed, on which the vertices of the main hysteresis loops lie. The main hysteresis loops have a symmetric change in the electric field strength relative to zero, and partial loops have an asymmetric change in the strength relative to zero. ...
For the nano piezoactuator with hysteresis in control system its set of equilibrium positions is the segment of line. By applying Yakubovich criterion for system with the nano piezoactuator the condition absolute stability of system is evaluated.
... [10][11][12][13][14][15][16] A piezoactuator is used for the nanodisplacement in adaptive optics and telescopes. [17][18][19][20][21][22][23][24][25][26] ...
The structural scheme of a piezoactuator is obtained for astrophysics. The matrix equation is constructed for a piezoactuator. The characteristics of a piezoactuator are received for astrophysics.
... In structural schema of an engine its energy transformation is clearly [4][5][6][7][8][9][10][11][12][13][14]. The piezo engine is applied for precise adjustment in scanning microscopy and adaptive optics [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28]. ...
In nanosciences research the structural model of an electro elastic engine is constructed. Its structural scheme of is received. For an engine its matrix equation of the deformations are obtained in the decisions of the precision control systems. The parameters of an engine are determined.
... has the form of the equation of the reverse effectThe equation of the force on the face of a precision engine has the form[10][11][12][13][14][15][16][17][18][19] ...
The transfer function and the transfer coefficient of a precision electromagnetoelastic engine for nanobiomedical research are obtained. The structural diagram of an electromagnetoelastic engine has a difference in the visibility of energy conversion from Cady and Mason electrical equivalent circuits of a piezo vibrator. The structural diagram of an electromagnetoelastic engine is founded. The structural diagram of the piezo engine for nanobiomedical research is written. The transfer functions of the piezo engine or are obtained.
... For a sectional electroelastic engine, the equation of the electroelasticity [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29] has the form of the inverse piezoelectric effect ...
This work determines the coded control of a sectional electroelastic engine at the elastic–inertial load for nanomechatronics systems. The expressions of the mechanical and adjustment characteristics of a sectional electroelastic engine are obtained using the equations of the electroelasticity and the mechanical load. A sectional electroelastic engine is applied for coded control of nanodisplacement as a digital-to-analog converter. The transfer function and the transient characteristics of a sectional electroelastic engine at elastic–inertial load are received for nanomechatronics systems.
... The control systems with electro magneto elastic actuator on piezoelectric, electrostrictive and magnetostrictive effects solves problems of the precise matching in the nano biomedicine, the compensation of the temperature and gravitational deformations of the equipment, the wave front correction in the adaptive laser system [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. The piezo actuator for nano biomedicine is used in the scanning tunneling microscope, the scanning force microscope, the atomic force microscope, in the gene manipulator [15][16][17][18][19][20][21][22][23][24][25][26][27][28][29]. The problems of using criteria absolute stability of the control system with electro magneto elastic actuator for nano biomedicine are discussed. ...
... We drew model of the actuator from decision the equation of electromechanics and the second order differential equation [12][13][14][15]. In result we have the mathematical model and the scheme of the actuator for nano biomedical research on Figure 1 with the piezoelectric or magneto strictive effect in the form ...
... The method of the mathematical physics with Laplace transform we have to build the structural diagram of the electro magneto elastic actuator for nanotechnology and material science. The structural diagram of the electro magneto elastic actuator nano displacement for material science is difference from Cady and Mason electrical equivalent circuits [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18]. ...
... The electro elastic actuator for the nanotechnology and the biotechnology is used in the scanning tunneling microscopes, the scanning force microscopes, the atomic force microscopes [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] . ...
... The piezoactuator for the nanomechanics is provided the displacement from nanometers to tens of micrometers, a force to 1000N. The piezoactuator is used for research in the nanomedicine and the nanobiotechnology for the scanning tunneling microscopes, scanning force microscopes and atomic force microscopes [14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32]. ...
... The piezoactuator uses the inverse piezoeffect and serves for the actuation of mechanisms or the management and converts the electrical signals into the displacement and the force [1][2][3][4][5][6][7][8]. The piezoactuator is applied for the drives of the scanning tunneling microscopes, scanning force microscopes and atomic force microscopes [14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32]. ...
... The elastic compliances and the mechanical and adjusting characteristics of a piezoactuator were explored in Reference [17][18][19] in order to calculate its transfer functions and create the structural-parametric model. The structural-parametric model of a multilayer and compound piezoactuator was determined in References [17][18][19][20][21][22] with output displacement. In this paper, we solve the problem of building the generalized structural parametric model and the generalized parametric structural schematic diagram of an electromagnetoelastic actuator for the equation of electromagnetoelasticity in the general form. ...
The generalized parametric structural schematic diagram, the generalized structural-parametric model, and the generalized matrix transfer function of an electromagnetoelastic actuator with output parameters displacements are determined by solving the wave equation with the Laplace transform, using the equation of the electromagnetolasticity in the general form, the boundary conditions on the loaded working surfaces of the actuator, and the strains along the coordinate axes. The parametric structural schematic diagram and the transfer functions of the electromagnetoelastic actuator are obtained for the calculation of the control systems for the nanomechanics. The structural-parametric model of the piezoactuator for the transverse, longitudinal, and shift piezoelectric effects are constructed. The dynamic and static characteristics of the piezoactuator with output parameter displacement are obtained.
Background/Aim: With the availability of biosimilars, hospital formulary drug selection among biologics extends beyond clinical and safety considerations when comes to hospital resource management, to factors like human resource allocation and financial sustainability. However, research assessing the time and cost of labor, supplies, and waste disposal of biologics from the standpoint of hospitals remains limited. This study focuses on short-acting granulocyte-colony stimulating factor originators (Granocyte® and Neupogen®) and biosimilar (Nivestim®), comparing them based on mean total handling times per dose and total annual expenses. Materials and Methods: Ten nurses from a Taiwanese cancer center were recruited; they each prepared three doses of each drug. Results: Findings showed that the mean total handling times per dose of Granocyte® and Neupogen® were significantly higher than that of Nivestim®. Handling Nivestim® required the lowest total annual expense. Conclusion: Nivestim® is an advantageous alternative to Granocyte® and Neupogen®, benefiting hospital resource management.
The structural schemes of electroelastic engine micro and nano displacement are determined for applied bionics and biomechanics. The structural scheme of electroelastic engine is constructed by method mathematical physics. The displacement matrix of electroelastic engine micro and nano displacement is determined.
In the work is calculated of the piezoactuator for astrophysics. The structural scheme of the piezoactuator is determined for astrophysics. The matrix equation is constructed for the piezoactuator. The mechanical characteristic is determined. The parameters of the piezoactuator are obtained in nano control systems for astrophysics.
Decision wave equation, structural - parametric model and block diagram of electro magneto elastic actuators are obtained, its transfer functions are bult. Effects of geometric and physical parameters of electro magneto elastic actuators and external load on its dynamic characteristics are determined. For calculation of communications systems with piezoactuators the block diagram and the transfer functions of piezoactuators are obtained.
Structural-parametric models, parametric structural schematic diagrams and transfer functions of electromagnetoelastic actuators are determined. A generalized parametric structural schematic diagram of the electromagnetoelastic actuator is constructed. Effects of geometric and physical parameters of actuators and external load on its dynamic characteristics are determined. For calculations the mechatronic systems with piezoactuators for nano- and microdisplacement the parametric structural schematic diagrams and the transfer functions of piezoactuators are obtained.
Structural-parametric models, parametric structural schematic diagrams and transfer functions of electromagnetoelastic actuators are determined. A generalized parametric structural schematic diagram of the electromagnetoelastic actuator is constructed. Effects of geometric and physical parameters of actuators and external load on its dynamic characteristics are determined. For calculations the mechatronic systems with piezoactuators for nano-and microdisplacement the parametric structural schematic diagrams and the transfer functions of piezoactuators are obtained.
The structural model of the nano piezoengine is determined for applied biomechanics and biosciences. The structural scheme of the nano piezoengine is obtained. For calculation nano systems the structural model and scheme of the nano piezoengine are used, which reflect the conversion of electrical energy into mechanical energy of the control object. The matrix equation is constructed for the nano piezoengine in applied biomechanics and biosciences.
An electroelastic actuator on the piezoelectric or electrostriction effect is applied in nanotechnology, nanobiology, biomechanics and adaptive optics for the precision matching in nanomechatronics systems. For the analysis and calculation of nanomechatronics systems is used the harmonious linearization of the hysteresis characteristic for an electroelastic actuator. The piezo actuator works on the basis of the inverse piezoelectric effect due to its deformation when the electric field strength is applied. To increase the range of movement of the piezo actuator to tens of micrometers, the multilayer piezo actuator is applied. The piezo actuator is used in nanomechatronics systems for nanodisplacement in adaptive optics, nanotechnology, scanning microscopy, nanobiomechanics, multicomponent telescopes. The coefficients of harmonious linearization for the basic loop characteristic are determined by the method of the theory of nonlinear automatic systems. On the characteristic of the piezo actuator deformation from the electric field strength, the initial curve is observed, on which the vertices of the basic hysteresis loops lie. The basic hysteresis loops have a symmetric change in the electric field strength relative to zero, and partial loops have an asymmetric change in the strength relative to zero. The expressions for the hysteresis basic and local loops of piezo actuator are received. The coefficients of harmonious linearization for the basic loop characteristic of the piezo actuator for nanomechatronics systems are obtained. The basic and local loops for hysteresis characteristics of the piezo actuator are proposed. The expression is determined for the generalized frequency transfer function of the nonlinear link with the hysteresis characteristic of the basic hysteresis loop for the piezo actuator.KeywordsHarmonious linearizationHysteresisBasic and partial loopsDeformationElectroelastic actuatorPiezo actuatorNanomechatronics system
The mathematical models of a piezoengine are determined for nanomedicine and applied bionics. The structural scheme of a piezoengine is constructed. The matrix equation is obtained for a piezoengine.
The electromagnetoelastic actuator on the piezoelectric, piezomagnetic, electrostriction and magnetostriction effects is used in nanoresearch, nanotechnology, nanobiology and adaptive optics. The piezo-actuator is applied in nanotechnology and nanomechanics. The Yakubovich absolute stability criterion of the control system with the condition on the derivative for the hysteresis nonlinearity of the electromagnetoelastic actuator is used. This criterion with the condition on the derivative is development of the Popov absolute stability criterion. The stationary set of the control system for the electromagnetoelastic actuator with the hysteresis deformation is the segment of the straight line. This segment has the points of the intersection of the hysteresis partial loops and the straight line. The absolute stability conditions on the derivative for the control systems with the piezo-actuator at the longitudinal, transverse and shift piezo-effect are received. The condition of the absolute stability on the derivative for the control system for the deformation of the electromagnetoelastic actuator under random impacts in nanoresearch is obtained. For the Lyapunov stable control system this Yakubovich absolute stability criterion has the simplest representation of the result of the investigation of the absolute stability.
We obtained the condition absolute stability on the derivative for the control system of electromagnetoelastic actuator for communication equipment. We applied the frequency methods for Lyapunov stable control system to calculate the condition absolute stability control system of electromagnetoelastic actuator. We used Yakubovich criterion absolute stability system with the condition on the derivative. The aim of this work is to determine the condition of the absolute stability on the derivative for the control system of electromagnetoelastic actuator. We received the stationary set of the control system of the hysteresis deformation of the electromagnetoelastic actuator. The stationary set is the segment of the straight line.
The stationary set of the control system of the hysteresis deformation of the electro magneto elastic actuator is the segment of the straight line. The aim of this work is to determine the condition of the absolute stability on the derivative for control system of the deformation of the electro magneto elastic actuator in automatic nanomanipulators for Nano science and Nano biomedicine research. The frequency methods for Lyapunov stable control system are used to calculate the condition the absolute stability of the control system with electro magneto elastic actuator. In result we obtained the condition of the absolute stability on the derivative for the control system with the electro magneto elastic actuator in automatic nanomanipulators for Nano science and Nano biomedicine research.
In this work, the parametric structural schematic diagrams of a multilayer electromagnetoelastic actuator and a multilayer piezoactuator for nanomechanics were determined in contrast to the electrical equivalent circuits of a piezotransmitter and piezoreceiver, the vibration piezomotor. The decision matrix equation of the equivalent quadripole of the multilayer electromagnetoelastic actuator was used. The structural-parametric model, the parametric structural schematic diagram, and the matrix transfer function of the multilayer electromagnetoelastic actuator for nanomechanics were obtained.
A generalized structural–parametric model of an electromagnetoelastic actuator is derived by solving the wave equation. Its transfer function is determined. The influence of geometric and physical parameters and the external load on its static and dynamic characteristics in the control system is established.
The parametric block diagram of the electromagnetoelastic actuator nanodisplacement or the piezoactuator is determined in contrast the electrical equivalent circuit types Cady or Mason for the calculation of the piezoelectric transmitter and receiver, the vibration piezomotor with the mechanical parameters in form the velosity and the pressure. The method of mathematical physics is used. The parametric block diagram of electromagnetoelastic actuator is obtained with the mechanical parameters the displacement and the force. The transfer functions of the electroelastic actuator are determined. The the generalized parametric block diagram, the generalized matrix equation for the electromagnetoelastic actuator nanodisplacement are obtained. The deformations of the electroelastic actuator for the nanotechnology are described by the matrix equation. Block diagram and structural-parametric model of electromagnetoelastic actuator nanodisplacement for nanodisplacement of the communications systems are obtained, its transfer functions are bult. Effects of geometric and physical parameters of electromagnetoelastic actuators and external load on its dynamic characteristics are determined. For calculations the communications systems with the piezoactuator for nanodisplacement the parametric block diagram and the transfer functions of the piezoactuator are obtained.
In the present chapter, the influence of the rigidity of piezoactuator and the load rigidity on the mechanical and control characteristics of the multilayered piezoactuator for the longitudinal, transverse and shear piezoeffect in the case of the parallel and coded control are considered. The effects of the parameters of the multilayered sectional piezoactuator and the load on its static and dynamic characteristics are determined. For calculation of the control systems for the nano- and microdisplacement, the transfer functions of the multilayered piezoactuator with parallel and coded control are obtained.
Structural-parametric models and parametric structural schematic diagrams of electromagnetoelastic actuators are obtained. The transfer functions of the actuators are determined from structural parametric models. For calculations robotics and mechatronics systems with piezoactuators the parametric structural schematic diagrams and the transfer functions of piezoactuators are obtained.
A structural–parametric model of a piezo motor is formulated by solving the wave equation. The influence of geometric and physical parameters and external loads on its static and dynamic characteristics in the control system is studied. Transfer functions are derived for piezo motors used in nanodrives. The parametric structure of the piezo motor is determined and transformed.
Optimal control of a multilayer piezo submicromanipulator with a longitudinal piezo effect is considered. Control functions are presented. The equation of the switching line in the control of the multilayer piezo actuator is derived.
The dynamic characteristics of piezoelectric nano- and micromotors with parallel and code control in longitudinal and transverse piezoelectric effects are determined. Corresponding transfer functions are obtained.
The scanning tunneling microscope is proposed as a method to measure forces as small as 10-18 N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 ÅA and a vertical resolution less than 1 Å.
The solution of matrix equations in electroelasticity problems permits the formulation of a generalized structural-parametric model of a multilayer electroacoustic motor and determination of the influence of the motor’s geometric and physical parameters and external load on its dynamic characteristics. Transfer functions are derived for nano- and micro-scale multilayer electroacoustic motors.
The static and dynamic characteristics of a nano-scale piezomotor for use in nanotechnology and microelectronics have been
calculated. The influence of the motor’s physical and geometric parameters on the static and dynamic characteristics has been
established.
We use finite-element simulations of a micromachined gas-flow sensor as an example to demonstrate and critically compare various design- and analysis-of-experiments methods for the generation of simple, surrogate functional approximations. Such approximations can be used to greatly reduce computational expense in MEMS design and optimization. The following design methods are included in our study: factorial, alphabetic (A, D, G, I, and S-optimal), maximin, latin hypercube, central composite, and a method using a new program from the University of Michigan named IMSETTM. Analyses include both a parametric method (ordinary least squares or OLS) and a non-parametric method (best linear unbiased predictor or BLUP).© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
The electromechanical deformation and energy transformation by nano- and micro-scale piezomotors in longitudinal and transverse
piezo effects are considered. Analytical formulas are obtained for the conversion coefficient and efficiency of the piezomotors.
A generalized structural and parametric model of a multilayer electromagnetic converter is constructed, and the influence
of the geometric and dynamic parameters of the converter and the external load on the static and dynamic characteristics is
obtained. The transfer functions of the multilayer electromagnetoelastic converter for electromechanical nano- and microdrives
are determined.
–8 2012 AFONIN placement, precision, speed, load capacity, and strucc ture for such applications
- Russian Engineering
RUSSIAN ENGINEERING RESEARCH Vol. 32 No. 7–8 2012 AFONIN placement, precision, speed, load capacity, and strucc ture for such applications. REFERENCES
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