To improve the measurement precision of embedded time grating sensor, combined with the characteristics of the sensor, a special probe structure is designed from the aspects of probe arrangement and data processing. Firstly, the harmonic analysis is used to determine the main frequency components of the sensor error. Then, aiming at long and short period errors, the probe arrangement is adopted,
... [Show full abstract] which uses multiple probes with diametrically opposite arrangement and a certain angle spacing. The digital addition technology is applied for the probe measurement results to improve the measuring accuracy. Finally, experiment was conducted to verify the effectiveness of the proposed probe structure and data processing method. The experiment results show that using this method, the long and short period errors are reduced by 75% and 83.6%, respectively compared with that using single probe structure. The proposed method effectively improves the measuring precision of embedded time grating sensor.