The scattering of energetic ions by elemental target atoms has proved to be a useful tool in studying materials (e.g., thin films, surfaces, bulk solids). The parameters accessible to measurement by an elastic interaction can be divided into two groups: physicals parameters attached to the ion trajectory and the collision process, for example, cross sections, stopping powers, ranges and path
... [Show full abstract] lengths, resonances, etc.; the inventory of the target sample, for instance, target thickness, roughness of target surface, elemental constituents, depth profiles, elemental impurities, etc.