This report presents the investigation results of spectral composition of ion bemas generated by magneto-insulated ion diode of “MAC-M” accelerator. Energetical and mass characteristics of the accelerated ion beam were determined by Thomson spectrometer with CR-39 plate detector. Accelerated ion energy was from 40 up to 240 keV. Mass composition contained hydrohen, nitrohen and carbon ions. The individual track analysis shows the track form, depth and diameter dependence on ion mass and energy.