A new generation of electrostatic micromotors is investigated using cooperation of arrayed
direct-drive actuators. Electrostatic scratch-drive actuators (SDAs), which combine active
frictional contact mechanisms with electrostatic actuation are particularly analyzed. A
prototype of a cylindrical micromotor, whose external diameter and length are, respectively,
1 mm and 2 mm, has been realized
... [Show full abstract] through the insertion of a flexible active polysilicon sheet at
the rotor/motor-frame interface. The sheet, which acts as a stator, is fabricated by the surface
micromachining process and then released automatically from the silicon wafer. One thousand
four hundred thirty actuators are integrated on a 6 mm2 polysilicon sheet surface, leading to
high-driving-torque characteristics.