Wrinkle-Based Measurement of Elastic Modulus of Nano-Scale Thin Pt Film Deposited on Polymeric Substrate: Verification and Uncertainty Analysis

ArticleinExperimental Mechanics 50(5):635-641 · June 2009with27 Reads
Impact Factor: 1.55 · DOI: 10.1007/s11340-009-9243-8


    Wrinkle-based measurement of elastic modulus for a nano-scale thin film was analyzed. As a demonstrative example, the wrinkles
    of Pt films on a Polydimethylsiloxane (PDMS) substrate under compressive loading were formed with a well-defined wavelength,
    corresponding to the difference of elastic moduli between the films and substrates. The elastic modulus of the Pt nano-scale
    thin film measured with the wrinkle-based measurement was found to be consistent with that independently measured with micro-tensile
    test. Uncertainty of the wrinkle-based measurement was analyzed to figure out the main uncertainty components for the evaluation
    of elastic modulus measurement, and guidelines for the reliable wrinkle-based measurement were suggested.

    KeywordsNano-scale thin film-Pt-Wrinkle-Elastic modulus-Tensile test