Electric field breakdown at micrometre separations in air and vacuum

ArticleinMicrosystem Technologies 6(1):6-10 · January 1999with21 Reads
Impact Factor: 0.88 · DOI: 10.1007/s005420050166


    At large separations, the behaviour of electrodes has been widely studied and is reasonably well understood. However, some
    fundamental problems have not been properly addressed such as maximum safe operating voltages and critical dimensions required
    at small separations between different types of materials. A systematic study of electrical breakdown at sub-millimetre separations
    using materials commonly used in the fabrication of microdevices has been undertaken. Specimens for examination at electrode
    separations from 500 nm to 25 μm have been made with different electrode configurations, such as flat to flat, flat to point
    and point to point. All the tests were made in air and at differing pressures.