The CantiClever: A dedicated probe for magnetic force microscopy

MESA Res. Inst., Twente Univ., Enschede
IEEE Transactions on Magnetics (Impact Factor: 1.39). 10/2002; 38(5):2441 - 2443. DOI: 10.1109/TMAG.2002.803585
Source: IEEE Xplore


We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using. the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.

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    • "Starting with the cantilever design, the cantilever stiffness controls the resonance frequency and the sensitivity of the tip. Typical spring constants range from 0.1 to 0.5 N/m [4], [13]. A lower spring constant will increase the sensitivity of the capacitive sensor and hence increase the detected signal which, consequently, will increase the signal-to-noise Fig. 3. Major performance and design parameter interactions and tradeoffs. "
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    Full-text · Article · Dec 2003 · IEEE Transactions on Magnetics
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    • "Finally, in the CantiClever production process the tip will certainly become rounded off and resemble the ellipsoidal shape discussed in this paper. We now understand that this is a desirable effect and could explain why we observe resolutions better than 30 nm with 50-nm CantiClever tips [4]. "
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    Full-text · Article · Oct 2003 · IEEE Transactions on Magnetics
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