Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers

Conference PaperinConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS · November 2006with3 Reads
DOI: 10.1109/LEOS.2006.279114 · Source: IEEE Xplore
Conference: Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE

In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm