Electron stimulated desorption from bare and nonevaporable getter coated stainless steels

ArticleinJournal of Vacuum Science & Technology A Vacuum Surfaces and Films 28(5):1215 - 1225 · October 2010with15 Reads
Impact Factor: 2.32 · DOI: 10.1116/1.3478672 · Source: IEEE Xplore

    Abstract

    An installation for investigation of the electron stimulated desorption (ESD) from both pumping and nonpumping tubular samples was designed and built. This installation allows studying ESD and sample sticking probability as a function of electron dose up to about 10<sup>23</sup> e<sup>-</sup>/ m <sup>2</sup> , electron energy in the range 10 eV–6.5 keV, and sampling temperature in the range 0–80 ° C . Two samples were investigated: bare and Ti–Zr–V coated stainless steels. The ESD yields were measured as a function of electron accumulated dose, electron energy, and different NEG coating activation temperatures. The effect of electron stimulated pumping of CO saturated NEG coating was demonstrated for the first time and is in a good agreement with the effect of photon stimulated NEG activation measured earlier.