Processing and properties of ytterbium-erbium silicate thin film gain media

Conference Paper · October 2009with2 Reads
DOI: 10.1109/GROUP4.2009.5338289 · Source: IEEE Xplore
Conference: Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on

    Abstract

    The structural and photoluminescence properties of ytterbium-erbium silicate thin films have been investigated. The films were fabricated by RF-magnetron co-sputtering of Er<sub>2</sub>O<sub>3</sub>, Yb<sub>2</sub>O<sub>3</sub> and SiO<sub>2</sub> on c-Si and subsequent annealing in N<sub>2</sub> or O<sub>2</sub> atmosphere.