Processing and properties of ytterbium-erbium silicate thin film gain media
The structural and photoluminescence properties of ytterbium-erbium silicate thin films have been investigated. The films were fabricated by RF-magnetron co-sputtering of Er<sub>2</sub>O<sub>3</sub>, Yb<sub>2</sub>O<sub>3</sub> and SiO<sub>2</sub> on c-Si and subsequent annealing in N<sub>2</sub> or O<sub>2</sub> atmosphere.
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