Project

OXiNEMS (FET-Open H2020)

Goal: OXiNEMS will exploit the singular properties of transition metal oxides (TMOs) towards the creation of new types of enhanced nano-electro-mechanical systems (NEMS) technology based on integrated multifunctional crystalline heterostructures.
As proof-of-concept of this innovative vision, OXiNEMS targets the development of nano-mechanical sensors for measuring tiny magnetic fields, in particular those generated by the human brain as studied by magneto-encephalography (MEG) and those coming from ultra-low/very-low field magnetic resonance imaging (MRI).
The success of OXiNEMS will revolutionize the NEMS and MEMS field by introducing a new class of multifunctional sensors/actuators and will also open new directions in the field of human brain imaging by paving the way to the possibility of combining MEG with MRI and Transcranial Magnetic Stimulation on the same system.
See: www.oxinems.eu

Date: 1 May 2019 - 30 April 2023

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Project log

Nicola Manca
added an update
Enjoy our new video pitch on a new idea of integrated MEMS magnetometer prepared in the occasion of the final phase of the Intellectual Property Award (IPA) 2021 competition, held at Expo2020 in Dubai, https://youtu.be/kIhsxbE_re8
 
Nicola Manca
added a research item
The release process for the fabrication of freestanding oxide microstructures relies on appropriate, controllable, and repeatable wet etching procedures. SrTiO3 (STO) is among the most employed substrates for oxide thin films growth and can be decomposed in HF:water solution. Such a process is strongly anisotropic and is affected by local defects and substrate cut-planes. We analyze the etching behavior of SrTiO3 substrates having (100), (110), and (111) cut-planes during immersion in a 5% HF:water solution. The etching process over the three substrates is compared in terms of pitting, anisotropy, macroscopic etch rate, and underetching effects around HF-resistant (La,Sr)MnO3 thin film micropatterns. The release of targeted structures, such as the reported (La,Sr)MnO3 freestanding microbridges, depends on the substrate crystallographic symmetry and on the in-plane orientation of the structures themselves along the planar directions. By comparing the etching evolution at two different length scales, we distinguish two regimes for the propagation of the etching front: an intrinsic one, owing to a specific lattice direction, and a macroscopic one, resulting from the mixing of different etching fronts. We report the morphologies of the etched SrTiO3 surfaces and the geometries of the underetched regions as well as of the microbridge clamping zones. The reported analysis will enable the design of complex MEMS devices by allowing to model the evolution of the etching process required for the release of arbitrary structures made of oxide thin films deposited on top of STO.
Federico Maspero
added a research item
The impact of magnetic domains in magnetic flux concentrators is studied using the simulation software MuMax3. First, the simulation parameters are validated using experimental results from magnetic force microscopy; second the simulation output is benchmarked with the one obtained using Comsol Multiphysics. Finally, the impact of magnetic domain is assessed, showing how micromagnetic effects can become relevant, if not dominant, when scaling the gap between the MFC and the sensor.
Nicola Manca
added a project goal
OXiNEMS will exploit the singular properties of transition metal oxides (TMOs) towards the creation of new types of enhanced nano-electro-mechanical systems (NEMS) technology based on integrated multifunctional crystalline heterostructures.
As proof-of-concept of this innovative vision, OXiNEMS targets the development of nano-mechanical sensors for measuring tiny magnetic fields, in particular those generated by the human brain as studied by magneto-encephalography (MEG) and those coming from ultra-low/very-low field magnetic resonance imaging (MRI).
The success of OXiNEMS will revolutionize the NEMS and MEMS field by introducing a new class of multifunctional sensors/actuators and will also open new directions in the field of human brain imaging by paving the way to the possibility of combining MEG with MRI and Transcranial Magnetic Stimulation on the same system.