Project

EMRP IND58 6DoF : Metrology for movement and positioning in six degrees of freedom

Goal: Current trends in precision engineering demand ever higher accuracies for industrial high-end production and measurement equipment. This requires control of positioning systems over measurement ranges from nanometres to millimetres in all 6 degrees of freedom (DoF). The application of high precision motion systems ranges from nanometrology (AFM, SEM) to industrial production technologies (machine tools, CMM, photo lithography) to large scale applications like telescopes. Improved precision engineering tools using thermal insensitive design principles is beneficial not only for tool manufacturers but also for European key-industries, especially smaller companies, in terms of more efficient production processes and reliable, better products, an important condition to ensure a competitive advantage of European industries on the world market. This will also help to reduce the number of defective parts, leading to savings in raw materials, and reductions of machine time per part.

Methods: MATLAB Simulation, Measurement Uncertainty, Monte Carlo Methods, AFM, Modelling

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Sébastien Ducourtieux
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Modeling of a metrological AFM interferometric position measurement system to determine its measurement uncertainty
Sébastien Ducourtieux
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Current trends in precision engineering demand ever higher accuracies for industrial high-end production and measurement equipment. This requires control of positioning systems over measurement ranges from nanometres to millimetres in all 6 degrees of freedom (DoF). The application of high precision motion systems ranges from nanometrology (AFM, SEM) to industrial production technologies (machine tools, CMM, photo lithography) to large scale applications like telescopes. Improved precision engineering tools using thermal insensitive design principles is beneficial not only for tool manufacturers but also for European key-industries, especially smaller companies, in terms of more efficient production processes and reliable, better products, an important condition to ensure a competitive advantage of European industries on the world market. This will also help to reduce the number of defective parts, leading to savings in raw materials, and reductions of machine time per part.