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Publications (51)
In this paper, we have modeled and analyzed affinities and kinetics of volatile organic compounds (VOCs) adsorption (and desorption) on various surface chemical groups using multiple self-assembled monolayers (SAMs) functionalized film bulk acoustic resonator (FBAR) array. The high-frequency and micro-scale resonator provides improved sensitivity i...
This paper describes the detection of volatile organic compounds (VOCs) using an e-nose type integrated microfabricated sensor array, in which each resonator is coated with different supramolecular monolayers: p-tert-butyl calix[8]arene (Calix[8]arene), 2,3,7,8,12,13,17,18-octaethyl-21H,23H-porphine (Porphyrin), beta-cyclodextrin (β-CD) and cucurbi...
Silicon nanowire field-effect transistors (Si-NW FETs) have been demonstrated as a versatile class of potentiometric nanobiosensors for real time, label-free, and highly sensitive detection of a wide range of biomolecules. In this review, we summarize the principles of such devices and recent developments in device fabrication, fluid integration, s...
In this work, a new method to tune the resonant frequency of micro-fabricated resonator using molecular layer-by-layer (LbL) self-assembly approach is demonstrated. By simply controlling the polymer concentration and the number of layers deposited, precisely tuning the frequency of micro-fabricated resonators is realized. Due to its selective depos...
In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has a significant effect on the response of the Si-NR...
Hydrogen is known for its efficient combustion, abundant natural availability, and environmentally friendly characteristics. It is recognized as a promising energy source for the future and is already utilized in various industries, including petrochemicals, electronics, food processing, aerospace, and new energy vehicles. However, challenges arise...
Supramolecules are considered as promising materials for volatile organic compounds (VOCs) sensing applications. The proper understanding of the sorption process taking place in host-guest interactions is critical in improving the pattern recognition of supramolecules-based sensing arrays. Here, we report a novel approach to investigate the dynamic...
Virus infections remain one of the principal causes of morbidity and mortality worldwide. The current gold standard approach for diagnosing pathogens requires access to reverse transcription-polymerase chain reaction (RT-PCR) technology. However, separation and enrichment of the targets from complex and diluted samples remains a major challenge. In...
Small-sized, high-sensitivity, and low-cost sensors are required for gas-sensing applications because of their critical role in environmental monitoring, clinic diagnosis, process control, and anti-terrorism. Given the rapid developments in micro-fabrication and microelectromechanical system (MEMS) technologies, film bulk acoustic resonator (FBAR)...
Micro gas chromatography (μGC) using microfabricated silicon columns has been developed in response to the requirement for portable on-site gas analysis. Although different stationary phases have been developed, repeatable and reliable surface coatings in these rather small microcolumns remains a challenge. Herein, a new stationary phase coating st...
Viral particles bind to receptors through multivalent protein interactions. Such high avidity interactions on sensor surfaces are less studied. In this work, three polyelectrolytes that can form biosensing surfaces with different interfacial characteristics in probe density and spatial arrangement were designed. Quartz crystal microbalance, interfe...
Nanochannel-based resistive pulse sensing (nano-RPS) system is widely used for the high-sensitive measurement and characterization of nanoscale biological particles and biomolecules due to its high surface to volume ratio. However, the geometric dimensions and surface properties of nanochannel are usually fixed, which limit the detections within pa...
Carbon nanotube (CNT)-based chemiresistors are promising gas detectors for gas chromatography (GC) due to their intrinsic nanoscale porosity and excellent electrical conductivity. However, fabrication reproducibility, long desorption time, limited sensitivity, and low dynamic range limit their usage in real applications. This paper reports a novel...
Self-contained microfluidic platforms with on-chip integration of flow control units, microreactors, (bio)sensors, etc. are ideal systems for point-of-care (POC) testing. However, current approaches such as micropumps and microvalves, increase the cost and the control system, and it is rather difficult to integrate into a single chip. Herein, we de...
Gas separation and detection technology is closely related to people’s daily production and life. With the emergence of various detection equipment, it has made remarkable progress in recent decades. Gas sensing materials play an important role in the process of gas separation and detection. Compared with traditional gas sensing materials, metal-or...
With the rapid spread and multigeneration variation of coronavirus, rapid drug development has become imperative. A major obstacle to addressing this issue is adequately constructing the cell membrane at the molecular level, which enables in vitro observation of the cell response to virus and drug molecules quantitatively, shortening the drug exper...
The presence of chemical warfare agents (CWAs) in the environment is a serious threat to human safety, but there are many problems with the currently available detection methods for CWAs. For example, gas chromatography–mass spectrometry cannot be used for in-field detection owing to the rather large size of the equipment required, while commercial...
HIGHLIGHTS
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A proposed microsystem system potentially provides accurate and calibration-free measurements based on a combination of front-end particulate matter (PM) separation and back-end PM detection.
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Silicon dioxide particles are used to verify the performance of the system’s virtual impactor, and an accurate cutoff diameter of 2 μm in low a...
We have developed a new three-dimensional (3D) surface for use in biosensors that is based on modified novel thorns-like polyelectrolytes (3D-PETx), which comprises of poly-l-lysine (PLL) appended with multitude oligo (ethylene glycol) (OEG) and biotin moieties. It tethered to the sensor surface by PLL, while the OEG-biotin chains are forced to str...
Microwave sensors based on microstrip antennas are promising as wearable devices because of their flexibility and wireless communication compatibility. However, their sensitivity is limited due to the reduced sensor size and the potential of biochemical monitoring need to be explored. In this work, we present a new concept to enhance the microwave...
Gravimetric resonators based on Micro/Nanoelectromechanical System (M/NEMS) are potential candidates in developing smaller, less expensive, and higher performance gas sensors. Metal organic frameworks (MOFs), with high surface areas, recently come into focus as advanced nano-porous sensitive materials in micro gravimetric gas sensors. The surface o...
Small-sized, low-cost, and high-sensitivity sensors are required for pressure-sensing applications because of their critical role in consumer electronics, automotive applications, and industrial environments. Thus, micro/nanoscale pressure sensors based on micro/nanofabrication and micro/nanoelectromechanical system technologies have emerged as a p...
Film bulk acoustic wave resonators have demonstrated great potential in the detection of volatile organic compounds owing to their high sensitivity, miniature size, low power consumption, capacity for integration, and other beneficial characteristics. However, it is necessary to functionalize the surfaces of these resonators to enhance the adsorpti...
The health effects of suspended particulate matter (PM) in the air are well documented; however, there is a lack of convenient tools to recognize and quantify PM onsite. Here, we design and fabricate a portable PM analysis system to realize onsite aerosol particle analysis. The system contains a micromachined virtual impactor (VI), a thermophoretic...
This paper describes the detection and discrimination of volatile organic compounds (VOCs) using an e-nose system based on a multiparameter virtual sensor array (VSA), which consists of a single-chip temperature-compensated film bulk acoustic wave resonator (TC-FBAR) coated with 20-bilayer self-assembled PSS / PDDA thin films. The high-frequency an...
This work presents a flexible volatile compounds (VOCs) gas sensor based on thin-film bulk acoustic resonator. The inorganic composite membranes of the resonator are transferred from a silicon substrate to an ultra-thin polyimide (PI) substrate using transfer printing technique. The quality factor of the resonator reaches 1 920, and the frequency s...
This paper reports a novel miniaturized detector for gas chromatography based on film bulk acoustic resonator (FBAR) sensor array. Polymer coated FBAR demonstrated detection limit of parts per million (ppm) concentrations for several volatile organic vapors. Orthogonal selectivity between n-pentane and acetone is achieved by integrating different p...
On-chip integrating several functional components for developing integrated lab-on-a-chip microsystem remains as a challenge. In this work, by employing multiple microelectromechanical resonators both as actuators and sensors, on-chip heating, mixing and chemical reaction monitoring are successfully demonstrated. Mechanism studies using COMSOL simu...
This paper describes the detection of volatile organic compounds (VOCs) using an e-nose system based on a virtual sensor array (VSA). The VSA was realized by seven different resonant modes of a single piezotransduced silicon bulk acoustic wave resonator (PSBAR) which can greatly reduce the complexity of a conventional e-nose system. The PSBAR was d...
This paper demonstrates a novel micro-size (120 µm × 200 µm) piezoelectric gas sensor based on a piezotransduced single-crystal silicon bulk acoustic resonator (PSBAR). The PSBARs operate at 102 MHz and possess high Q values (about 2000), ensuring the stability of the measurement. A corresponding gas sensor array is fabricated by integrating three...
We developed a wireless and passive piezoelectric resonant sensor for contimuous volatile organic compound detection. An equivalent circuit is proposed to model the sensing system, and Lamb wave resonators are adopted to demonstrate the wireless interrogation achieved by near-field inductive coupling. The wireless sensing system is employed to moni...
The thin film bulk acoustic resonator (FBAR) array based on MEMS can realize high throughput detection in sensing a variety of volatile gases. In this paper, by virtue of modifying the surface of film bulk acoustic resonators with different functional groups to form sensor array, the volatile gas can interact differently with different chemical fun...