Srinivas Merugu

• Agency for Science, Technology and Research (A*STAR)

This work presents an experimental comparative analysis of acoustic performance for series and parallel connected piezoelectric micromachined ultrasonic transducers (PMUTs) designed and fabricated in physical vapor deposition (PVD) lead zirconate titanate (PZT) and 20% scandium (Sc)-doped aluminum nitride (AlN). The aim of this research is to provi...

This article presents an in-depth exploration of the acoustofluidic capabilities of guided flexural waves (GFWs) generated by a membrane acoustic waveguide actuator (MAWA). By harnessing the potential of GFWs, cavity-agnostic advanced particle manipulation functions are achieved, unlocking new avenues for microfluidic systems and lab-on-a-chip deve...

This article presents an in-depth exploration of the acoustofluidic capabilities of guided flexural waves (GFWs) generated by a membrane acoustic waveguide actuator (MAWA). By harnessing the potential of GFWs, cavity-agnostic advanced particle manipulation functions are achieved, unlocking new avenues for microfluidic systems and lab-on-a-chip deve...

This work demonstrates the imaging capabilities of a silicon-on-nothing (SON) ScAlN piezoelectric micromachined ultrasonic transducer (pMUT) array by a method of transmit beamforming followed by suitable signal postprocessing for 3-D image reconstruction. A 2.7-MHz pMUT array with 15% scandium-doped aluminum nitride (ScAlN) as the piezo thin film w...

Precision manipulation techniques in microfluidics often rely on ultrasonic actuators to generate displacement and pressure fields in a liquid. However, strategies to enhance and confine the acoustofluidic forces often work against miniaturization and reproducibility in fabrication. This study presents microfabricated piezoelectric thin film membra...

This chapter presents a method of integrating a specific class of integrated aluminum nitride (AlN) micro electro‐mechanical systems (MEMS) resonators and filters with complementary metal oxide semiconductor (CMOS) circuits using flip‐chip bonding. Heterogeneous integration of AlN MEMS resonators with CMOS electronics comes with various challenges,...

In this letter, a group of laterally coupled alternating thickness (LCAT) mode resonators based on 12% scandium-doped aluminum nitride (Sc <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.12</sub> Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.88</s...

This paper reports an acoustic microelectromechanical system (MEMS) resonator structure that features dual-resonant response at 180 and 500 MHz. The MEMS structure uses aluminum nitride as acoustic layer and electrodes with dual design that provide dual-resonance behavior. Each resonant mode operates at the first symmetrical Lamb-wave mode (S0). Du...

In this work we demonstrate high values of electromechanical coupling coefficient (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) exceeding 4.9% in 1-μm thick Aluminum Nitride (AlN) two-d...

This letter reports an aluminium nitride (AlN)based micromechanical resonator with high-effective coupling coefficient (k <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> ) and low insertion...

This letter reports a spurious mode free GHz aluminum nitride (AlN) lamb wave resonator (LWR) towards high figure of merit (FOM). One dimensional gourd-shape phononic crystal (PnC) tether with large phononic bandgaps is employed to reduce the acoustic energy dissipation into the substrate. The periodic PnC tethers are based on a 1 μm-thick AlN laye...

This paper presents three MEMS platforms that exhibit multiple thermal sensitivities and multi-frequency capabilities. Multiple sensors with a variety of operating frequencies and thermal sensitivities can co-exist in the same device wafer. Aluminum nitride is the active layer of the three platforms. The impact of stack and substrate modifications...

Thin-film encapsulation (TFE) is one of the promising wafer-level packaging techniques for microelectromechanical systems (MEMS) devices. One of the drawbacks of TFE is that it is difficult to encapsulate large MEMS devices due to the downward deformation of the cap layer during the release of the TFE. This paper presents a robust bilayer cap made...

This paper reports a method for fast-release and safe-sealing of thin film encapsulation (TFE) for packaging of piezoelectric MEMS devices fabricated on cavity-SOI wafers. For fast releasing of the TFE, MEMS device trenches and the cavity below them were utilized and this combination acted as etch channels. Etchant can attack the sacrificial layer...

Porous Si (PSi) used for microfabrication of a novel neural electrode was prepared on Si wafers by an anodization process. Surface morphology and porous structure of the PSi were characterized using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). 3D interconnected and nano sized pores were homogeneously formed across...

This paper reports an air-gap effect on fast release of the thin film encapsulation for packaging of MicroElectroMechanical System (MEMS) devices. The air-gap structure which is defined between the cap and sacrificial layer solves the main issue of longer release time in thin film encapsulation (TFE). Sacrificial layer could be removed very fast du...

This paper reports various etch-hole schemes based on the location and quantities of etch holes to improve robustness of the Thin Film Encapsulation (TFE). In order to achieve robust TFE, different etch hole mapping is performed on the cap layer and robustness of TFE was evaluated by measuring the height of the TFE using optical profiler measuremen...

This letter presents pop-up-shaped (having a spherical top shape) thin film encapsulation (TFE) using two-step sealing method. The first sealing step seals the etch holes in the cap layer, whereas the second step provides the shape. A pop-up shape with 2.4- (mu ) m upward deformation is demonstrated using a negative pressure difference between the...

We present the fabrication of highly P-doped single crystal silicon electrodes on a silicon probe through complementary metal-oxide-semiconductor (CMOS)-compatible processes. The electrode with diameter of 50 μm and a separation of 200 μm is designed for recording/stimulating purposes. Electrochemical impedance spectroscopy indicates that the inter...

We have developed a polyimide based neural interface electrode to record nerve signals from the sciatic nerve of a rat. The neural interface electrode has a split-ring shape, with four protruding gold electrodes for recording, and two reference gold electrodes around the split-ring. The split-ring electrode can be opened up to encircle the sciatic...

A stable neural interface between neural electrodes and surrounding tissues is a critical point to achieve long-term signal recording stability, and flexible polymer-based neural microelectrodes are attracting growing interests due to their mechanical properties compatible to surrounding tissues and potential to minimize post-implantation injury. A...

We present a new plasma etch process optimized for etching piezoelectric aluminum nitride (AlN) film deposited on thin molybdenum (Mo) metal electrode. Such film stack finds application in the integration of AlN-based RF microelectromechanical systems devices. The process is based on Cl2/BCl3/Ar gas chemistry with added buffer gas in inductively co...

A split thin-flow separations device can include a fluid channel having an inlet zone, an outlet zone, and a transport region between the inlet zone and outlet zone. The inlet zone includes a sample inlet and a carrier fluid inlet which are fluidly separated by an inlet splitter to minimize mixing of fluids from respective inlets in the inlet zone....

Water and sediment samples were collected along river transects at three artisanal gold mining areas in southern Ecuador: Nambija, Portovelo-Zaruma, and Ponce Enriquez. Samples were analyzed for a suite of major and trace elements, including filtered/unfiltered water samples and stream flow measurements to determine dissolved/particulate loads. Res...

Characterization of polymerized liposomes (PolyPIPosomes) was carried out using a combination of normal dc electrical field-flow fractionation and cyclical electrical field-flow fractionation (CyElFFF) as an analytical technique. The constant nature of the carrier fluid and channel configuration for this technique eliminates many variables associat...

Encapsulation of biomedical implants with complex three dimensional geometries is one of the greatest challenges achieving long-term functionality and stability. This report presents an encapsulation scheme that combines Al2O3 by atomic layer deposition with parylene C for implantable electronic systems. The Al2O3-parylene C bi-layer was used to en...

A diffusion Split-Flow Thin Cell (SPLITT) system was used to partially remove small peptides such as β2 microglobulin (β2M) and parathyroid hormone (PTH) in a continuous manner from an input flow stream while preserving most (over 97%) of the larger protein in the sample, such as albumin. To help determine the operating conditions for this work, a...

The electric field that drives separation and retention in electrical field flow fractionation (ElFFF) and cyclical electrical field-flow fractionation (CyElFFF) is a complex function of many parameters such as carrier ionic strength and pH, voltage, channel dimensions, flowrate, and electrode material. Currently there is no accurate or in situ met...

We have designed, fabricated, and tested an advanced neural interface based on the Utah Electrode Array (UEA) integrated with a custom ASIC that is currently able to acquire 200 channels of neural recordings. The Active Arrays are designed to acquire more neural data with the goal of controlling advanced prosthetic devices with as many as 17 degree...

This study explores the potential antimicrobial mechanisms of commercial silver nanoparticles (Ag NPs) in the environmental bacterium, Pseudomonas chlororaphis O6. The 10nm size NPs aggregated in water, as demonstrated by atomic force microscopy. Solubility of the NPs at 10mg/L was 0.28 mg/L (pH 6) and 2.3mg/L (pH 7); release from 10mg/L bulk Ag wa...

Cyclical electrical field flow fractionation (CyElFFF) is a variation on electrical field flow fractionation (ElFFF) where cyclical electrical fields are used instead of steady DC fields to increase the effective field experienced by particles in the flow channel. Even though the effective field increases more than 20-fold compared to normal ElFFF,...

Previously reported theories for cyclical electrical field flow fractionation (CyElFFF) are severely limited in that they do not account for diffusion, steric, or electric double layer effects. Experiments have shown that these theories overpredict the retention of particles in CyElFFF. In this work, we present a model for prediction of steric, dif...

A microscale cyclical electrical field flow fractionation (CyElFFF) channel is characterized with regard to the effect of various operating parameters and comparison made to recent theoretical developments. Challenges associated with various operating conditions are reported along with some of the optimized operating parameters. The effect of reten...

Recent work with cyclical electrical field-flow fractionation systems has shown promise for the technique as a separation and analysis tool, but little is understood about how the carrier composition in the system affects its capabilities. The electrical properties of microscale CyElFFF systems change when the carrier ionic conditions are altered,...

Cyclical electrical field flow fractionation (Cy/ElFFF) is demonstrated in a standard electrical field flow fractionation (ElFFF) channel for the first time. Motivation for the use of alternating current (AC) fields in a traditionally direct current (DC) technique are discussed. The function of the system over a wide range of operating conditions i...