Sébastien Ducourtieux

Sébastien Ducourtieux
SOLEIL synchrotron · Alignment Metrology Group

PhD

About

87
Publications
18,349
Reads
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771
Citations
Additional affiliations
September 2021 - February 2022
SOLEIL synchrotron
Position
  • Head of Alignment & Metrology group
September 2001 - August 2021
Laboratoire National de Métrologie et d'Essais
Position
  • Research Engineer
September 1998 - July 2001
École Supérieure de Physique et de Chimie Industrielles
Position
  • PhD Student

Publications

Publications (87)
Poster
Full-text available
In 2018, LNE’s metrological atomic force microscope (mAFM) performed its very first calibrations on standards developed at LNE (P600H60) in collaboration with C2N (Centre for Nanoscience and Nanotechnology). It provides a French traceability route to the SI meter for dimensional measurement at nanometer scale for calibration of standards commonly u...
Presentation
Full-text available
The presentation will focus on the recent commissioning of the first French metrological atomic force microscope (mAFM), the keystone of a new traceability chain implemented by the French national metrology institute (LNE) for dimensional measurements performed at the nanometre scale.
Conference Paper
The LNE has developed its own metrological atomic force microscope (mAFM) which is now the French reference instrument for the measurement of AFM and SEM standards. This instrument uses four double path differential interferometers to measure the XYZ position of the tip relative to the sample. The measurement uncertainties of the mAFM were evaluate...
Conference Paper
Full-text available
The LNE has developed its own metrological atomic force microscope (mAFM) which is now the French reference instrument for the measurement of AFM and SEM standards. This instrument uses four double path differential interferometers to measure the XYZ position of the tip relative to the sample. The measurement uncertainties of the mAFM were evaluate...
Article
Full-text available
Scanning Electron Microscopy (SEM) is considered as a reference technique for the determination of nanoparticle (NP) dimensional properties. Nevertheless, the image analysis is a critical step of SEM measuring process and the initial segmentation phase consisting in determining the contour of each nano-object to be measured must be correctly carrie...
Article
Full-text available
At this time, there is no instrument capable of measuring a nano-object along the three spatial dimensions with a controlled uncertainty. The combination of several instruments is thus necessary to metrologically characterize the dimensional properties of a nano-object. This paper proposes a new approach of hybrid metrology taking advantage of the...
Poster
Full-text available
Le poster se focalisera sur la récente mise en service du premier AFM métrologique (mAFM) français. Cet instrument de référence développé par le LNE matérialise une nouvelle voie de traçabilité pour les mesures dimensionnelles réalisées à l’échelle nanométrique. Il délivre des mesures directement traçables au mètre SI (Système international d’unité...
Article
Scanning Electron Microscopy (SEM) technique is widely used for characterizing nanoparticle (NP) size but very few papers deal with NP dimensional metrology. This article reports on the methodology to evaluate the uncertainty budget associated with the measurement of the mean diameter of standard silica NP population by SEM. In this context, the ef...
Presentation
Full-text available
Position and displacement sensors are one of the key elements when designing a positioning system or a scanning device. In many applications, the performances of the instrument are dependent on the position sensor performances and on the way it is integrated into the machine. Many position sensors are available on the market, with many technologies...
Poster
Full-text available
We propose a novel approach of hybrid metrology combining AFM (Atomic Force Microscopy) and SEM (Scanning Electron Microscopy) measurements for measuring the characteristic dimensions of nanoparticles (NP) in 3D with controlled uncertainties. This method takes advantage of the complementary nature of both techniques: SEM gives no quantitative infor...
Poster
Full-text available
Graphene attracts LNE’s interest for more than 10 years as it is today the most promising material to establish a practical traceability for electrical resistance to the quantum Hall effect [1]. Beyond, graphene can have many innovative applications the development of which needs accurate control of the material properties. To support the expected...
Poster
Full-text available
To provide traceable dimensional measurements at the nanometer scale, SPM users need to periodically calibrate their instruments. This calibration task is achieved thanks to reference standards like 1D or 2D gratings and/or step heights whose dimensional characteristics have been calibrated by a National Metrology Institute (or ISO/IEC accredited l...
Article
In order to evaluate the uncertainty budget of the LNE's mAFM, a reference instrument dedicated to the calibration of nanoscale dimensional standards, a numerical model has been developed to evaluate the measurement uncertainty of the metrology loop involved in the XYZ positioning of the tip relative to the sample. The objective of this model is to...
Chapter
The development of the nanometrology, science of the measurement at the nanoscale, aims to tackle the issues related to the reliability, the trueness, and the comparability of measurements on nanomaterials. The structure of the traceability chain for dimensional measurements at the nanoscale causes to divide all the relevant techniques for sizing n...
Article
Full-text available
In the present study, the alkali-activation process potential of the industrial by-product called waste fired clay bricks (Grog) as well as the effects of the addition of another industrial by-product known as granulated blast-furnace slag (S) on the properties of the final products has been studied. Granulated blast-furnace slag has been employed...
Poster
Full-text available
The French “Club nanoMétrologie”, created in 2011 by LNE and C’Nano (a program initiated by the CNRS, the CEA and the French Ministry of Research), organized by the end of 2013 the very first comparison at the national scale on AFM and SEM measurements of dimensional characteristics of 2D gratings (pitch and height). The aim of this comparison was...
Poster
Full-text available
Nanosciences and Nanotechnologies industrial activities raise new questions in terms of production processes and potential risks associated to the use of nanomaterials. The reliability of measurement data appears as a core issue and stresses the importance of developing metrological traceability to common references (most of the time the Internatio...
Poster
Full-text available
Scanning probe microscopes (SPMs) are very well suited for characterization at the nanometer scale. To ensure the measurement consistency and the accuracy of the results, those SPMs need to be periodically calibrated. It’s done thanks to standards whose dimensional characteristics are measured by a metrological atomic force microscope (mAFM). LNE d...
Presentation
Full-text available
Modeling of a metrological AFM interferometric position measurement system to determine its measurement uncertainty
Article
This article reports on the evaluation of an uncertainty budget associated with the measurement of the mean diameter of a nanoparticle (NP) population by Atomic Force Microscopy. The measurement principle consists in measuring the height of a spherical-like NP population to determine the mean diameter and the size distribution. This method assumes...
Article
This work investigates the aerosols emitted during combustion of aircraft and naval structural composite materials (epoxy resin/carbon fibers and vinyl ester/glass fibers and carbon nanotubes). Combustion tests were performed at lab-scale using a modified cone calorimeter. The aerosols emitted have been characterized using various metrological devi...
Article
In the frame of developing a thermally passive atomic force microscope head, a new kind of 2D displacement sensor based on a four quadrant optic fibre bundle has been implemented. The aim is to replace the quad cell photodiode used in the optical beam deflection method to detect cantilever deflection. The use of the bundle as a position sensor has...
Article
This article is the first step in the development of a hybrid metrology combining AFM and SEM techniques for measuring the dimensions of a nanoparticle population in 3D space (X,Y,Z). This method exploits the strengths of each technique on the same set of nanoparticles. AFM is used for measuring the nanoparticle height and the measurements along X...
Article
This article reports on the development of a new kind of 2D displacement sensor based on an optic fiber bundle whose fiber arrangement has been customized to provide an input sensitive surface with four quadrants. The fibers of each quadrant are regrouped to form four output arms. The aim is to reach behavior similar to that of a quad cell photodio...
Article
Full-text available
We report on the observation of strong backscattering of charge carriers in the quantum Hall regime of polycrystalline graphene grown by chemical vapor deposition, which alters the accuracy of the Hall resistance quantization. The temperature and magnetic field dependence of the longitudinal conductivity exhibits unexpectedly smooth power law behav...
Conference Paper
Full-text available
We report on a study of the quantum Hall effect in large area Hall bars made of polycrystalline graphene grown by chemical vapor deposition and then transferred on SiO2/Si substrate. The longitudinal conductivity σxx measured near Landau Level filling factors ±2, ±6 evidences a strong backscattering of carriers even at T=0.3 K and B=19 T. It result...
Conference Paper
The commercial products containing nanomaterials are already a part of our everyday life and new products enter the market regularly. But the nanometrology, i.e., science of the measurement at the nanometer scale, is still in its early stages. However, all actors concerned by nanoscience and nanotechnologies in the industrial sector or academic wor...
Article
Full-text available
Both optical and tactile probes are often used in dimensional metrology applications, especially for roughness, form, thickness and surface profile measurements. To perform such kinds of measurements with a nanometre-level of accuracy (~30 nm), Laboratoire National de Métrologie et d'Essais (LNE) has developed a new high-precision machine. The arch...
Article
Full-text available
The accurate determination of the properties of micro- and nano-structures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. In most cases, especially at the nanometer range, knowledge of the dimensional properties of structures is the fundamental base, to which further physica...
Article
Full-text available
Créé en 2011 conjointement par le LNE et NanoSciences France-C’Nano, le club nanoMétrologie rassemble les industriels, le secteur académique et les agences gouvernementales afin de partager des problématiques métrologiques dans tous les domaines que recouvrent les nanosciences et les nanotechnologies. Plus de 280 adhérents provenant de près de 140...
Article
Carbon nanotube-based poly(methyl methacrylate) and polyamide-6 nanocomposites have been investigated using various techniques within the framework of the NANOFEU project. Scanning transmission electron microscopy was used to characterize morphologies of composites, while fire properties were studied using cone calorimeter and pyrolysis combustion...
Article
Full-text available
Depuis plusieurs années, les nanoparticules manufacturées sont destinées à des usages industriels. Afin d’évaluer l’exposition professionnelle aux nanoparticules en suspension dans l’air, il est important de disposer de méthodes de mesure fiables et normalisées à leur caractérisation. Il est donc nécessaire de réaliser en amont des études de pré-no...
Article
This article describes the context of the development and the implementation of a metrological atomic force microscope. This is a reference instrument traceable to the International System of Units and dedicated to the practice of dimensional nanometrology. Its specific design allows a control of the measurement uncertainty. It is mainly used for t...
Conference Paper
Full-text available
A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used for performing traceable measurement and calibration of transfer standards dedicated to scanning probe and scanning electron microscopes. In order to improve the mAFM performance and reduce the measurement uncertainty, a new mAFM head is being develope...
Article
Full-text available
Results of an interlaboratory comparison on size characterization of SiO2 airborne nanoparticles using on-line and off-line measurement techniques are discussed. This study was performed in the framework of Technical Working Area (TWA) 34 - "Properties of Nanoparticle Populations" of the Versailles Project on Advanced Materials and Standards (VAMAS...
Conference Paper
Full-text available
Créé en 2011 conjointement par le LNE et NanoSciences France (réseau C’Nano), le club nanoMétrologie a pour objectif de rassembler industriels, secteur académique et agences gouvernementales au sein d’un véritable réseau afin de partager des problématiques métrologiques dans tous les domaines que recouvrent les nanosciences et les nanotechnologies....
Conference Paper
Full-text available
Using combined AFM ( Atomic Force Microscope) and a SEM (Scanning Electron Microscope) makes it possible to accurately measure a nano-object in 3 dimensions. This paper deals with the traceable measurements of the size and the size distribution of a SiO2 spherical shaped nanoparticle population performed by both microscopy techniques. The complemen...
Article
Full-text available
Day after day, new applications using manufactured nanoparticles appear in industry. To evaluate the occupational risk associated to nanoparticles, it is important to have reliable, accurate and standardized measurement methods. It is therefore necessary to work on pre-normalization projects to develop reference methods to characterize the number a...
Conference Paper
Full-text available
A metrological atomic force microscope (mAFM) has been developed at LNE [1, 2]. It can be used for traceable Atomic Force Microscope (AFM) measurement and calibration of transfer standards dedicated to scanning probe microscopy. It is based on an immobile AFM head working in a zero detection mode. All the displacements (i.e. the three translations)...
Article
The fire behavior and the characterization of solid and gaseous fire effluents of polymers [polymethyl methacrylate (PMMA) and polyamide-6 (PA-6)] filled with nanoparticles (silica, alumina, and carbon nanotubes) used to improve their flame retardancy were investigated. To determine the impact of these composites on the emission of airborne particl...
Article
Full-text available
LNE is developing a MEtrological ChARacterization of Nanomaterials (CARMEN) platform to offer a complete supply of main parameter measurements characterizing a nano-object (size, shape, polydispersity, agglomeration/aggregation state, surface charges, specific charges. . . ). Other physical properties such local electrical measurements will be able...
Conference Paper
Full-text available
Nanotechnology is today expected to have a tremendous impact on our societies. Because of a strong correlation between physical properties and dimensions of nano-objects, it represents an unprecedented engineering opportunity to specially design the properties of materials for their particular application. To bring nanotechnologies through a succe...
Article
A metrological atomic force microscope (mAFM) has been developed at LNE. It will be dedicated to traceable dimensional measurements and calibrations of transfer standards with a maximum size of 25 mm × 25 mm × 7 mm. The displacement range is 60 µm for the X and Y axes and 15 µm for the Z axis. The instrument uses four laser differential interferome...
Article
Full-text available
Day after day, new applications using nanoparticles appear in industry, increasing the probability to find these particles in the workplace as well as in ambient air. As epidemiological studies have shown an association between increased particulate air pollution and adverse health effects in susceptible members of the population, it is particularl...
Poster
Full-text available
Nanoparticles are encountered in ambient air as well as in the workplace. As epidemiological studies have shown an association between increased particulate air pollution and adverse health effects in susceptible members of the population, it is particularly important that there are accurate methods for measuring the amount and size distribution of...
Article
The technological advances in nanomaterials have allowed the development of new applications in industry, increasing the probability of finding these particles in the workplace as well as in ambient air. It is thus important to characterize aerosols emissions from different sources, for example, during the combustion of composites charged with nano...
Patent
Full-text available
The invention relates to a precision positioning device comprising a base, moveable stage and four double parallelograms connecting the stage to the base. Each double parallelogram comprises six deformable vertices forming six pivots so that the stage can move in translation in a reference plane. Thanks to the four double parallelograms, the moveab...
Poster
The aim of this presentation is to propose a fast algebraic on-line identification method to estimate the tip oscillation parameters (amplitude, phase, frequency) in tapping mode. We assume that the signal issued from the photodiode is a noisy sinusoidal signal y(t)=x(t)+ε(t) where x(t)=Asin(ωt+Φ). In certain conditions, the proposed method require...
Conference Paper
Carbon nanotubes based poly(methyl methacrylate) and polyamide-6 nanocomposites have been investigated using various techniques within the framework of the Nanofeu project. STEM was used to characterize morphologies of composites, while fire properties were studied using cone calorimeter (CC), fire propagation apparatus (FPA) and pyrolysis combusti...
Article
We report on the fabrication of graphene based devices using the micromechanical exfoliation of natural graphite and their electrical characterization including metallic contact resistance measurements, mobility and density charge carriers measurements. The first and major application aimed is the quantrum Hall effect (QHE) metrology. The samples f...
Article
SPM users need to calibrate their instrument periodically in order to provide some traceable measurements and to improve their measurements capabilities. This calibration task is achieved thanks to standards - 1D or 2D gratings - whose dimensional characteristics have been characterized by a National Metrology Institute. Within this context, LNE is...
Article
Full-text available
SPM users need to calibrate their instrument periodically in order to provide some traceable measurements and to improve their measurements capabilities. This calibration task is achieved thanks to standards - 1D or 2D gratings - whose dimensional characteristics have been characterized by a National Metrology Institute. Within this context, LNE is...
Conference Paper
The LNE is one of the participants in the NANOFEU project with INERIS, EMA, ISMANS and PlasticsEurope France. This program deals with the impact on fire effluents of new additives that has emerged as an alternative to traditional flame retardant treatments. New additives technology tends to provide better performance. Nonetheless, these new materia...
Article
The LNE has developed an ultra high precision coordinate measuring machine [1,2] dedicated to the 3D tracable measurements of artifacts with nanometer uncertainties using different kinds of Z sensors. The instrument has been designed to offer a measurement capacity of 300 mm × 300 mm in the XY plane and 50 μm along Z direction. Its performances hav...
Conference Paper
Full-text available
The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [LAH07] traceable to the national length standard to measure three-dimensional objects with nanometric uncertainties (figure 1). The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to...