Raju PatelVit University Chennai · SENSE
Raju Patel
Doctor of Philosophy
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8
Publications
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Publications
Publications (8)
In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator. The structural and surface morphologies of the dep...
In this Letter, an active area optimisation technique to improve the performance parameters of the film bulk acoustic resonator (FBAR) is proposed. The active area of the back trench membrane‐based FBAR is optimised to remove the spurious modes, higher harmonic modes, and to confine the acoustic signal at its central part during the resonance. The...
