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Publications (5)
A compliant electrostatic gripper with bipolar voltage polarity for a pick-and-place manipulation is presented. The compliance, realized by the introduction of an array of micropillars which act as the electrode, extends the application of electrostatic-based gripper to manipulating fragile, rough-surfaced dielectric objects at macro scale. A proto...
The recent papers Saito et al 2013 Smart Mater. Struct. 22 015019 and Dhelika et al 2013 Smart Mater. Struct. 22 095010 described studies of an electrostatic chuck that mimics the structure of gecko-like toes. Earlier work published by the authors and other researchers is cited to further illustrate the origin and motivation of the research.
An electrostatic chuck (ESC) is a type of reversible dry adhesive which clamps objects by means of electrostatic force. Currently an ESC is used only for objects having flat surfaces because the attractive force is reduced for rough surfaces. An ESC that can handle objects with rough surfaces will expand its applications to MEMS (micro electro mech...
An electrostatic chuck (ESC) is a device used to clamp and transport flat-surfaced objects such as thin semiconductor wafers. Working by the principle of electrostatic force, its functionality is limited in handling objects with rough surfaces, as the attractive forces at work are significantly reduced. To improve this weak point, by employing 70 μ...
