Piotr Kunicki

Wrocław University of Science and Technology | WUT · Department of Metrology Micro-and Nanostructures

Focused electron beam-induced deposition (FEBID) is a novel technique for the development of multimaterial nanostructures. More importantly, it is applicable to the fabrication of free-standing nanostructures. Experimenting at the nanoscale requires instruments with sufficient resolution and sensitivity to measure various properties of nanostructur...

Platinum-carbon (PtC) composite nanowires were fabricated using focused electron beam induced deposition (FEBID) and postprocessed, and their performance as a nanoscale resistive thermal device (RTD) was evaluated. Nanowires were free-standing and deposited on a dedicated substrate to eliminate the influence of the substrate itself and of the halo...

High-resolution scanning probe microscopy (SPM) is a fundamental and efficient technology for surface characterization of modern materials at the subnanometre scale. The bottleneck of SPM is the probe and scanning tip. Materials with stable electrical, thermal, and mechanical properties for high-aspect-ratio (AR) tips are continuously being develop...

In this paper, the fabrication process and electromechanical properties of novel atomic force microscopy probes utilising single-crystal boron-doped diamond are presented. The developed probes integrate scanning tips made of chemical vapour deposition-grown, freestanding diamond foil. The fabrication procedure was performed using nanomanipulation t...

In this paper, a novel fabrication technology of atomic force microscopy (AFM) probes integrating cantilever tips with an NV-rich diamond particle is presented. Nanomanipulation techniques combined with the focused electron beam-induced deposition (FEBID) procedure were applied to position the NV-rich diamond particle on an AFM cantilever tip. Ultr...

Atomic force microscopy (AFM) belongs to the high resolution and high sensitivity surface imaging technologies. In this method force interactions between the tip and the surface are observed to characterize sample properties. In the so-called contact AFM (C AFM) mode the tip is brought into continuous contact with the sample. Significant progress i...

Van der Waals mono- and heterostructures have received great attention in recent years due to their new physics and electronic properties. Several novel device structures have been developed based on their properties, including tunnelling transistors, light emitting diodes and barristors. However, the construction of such structures usually involve...

In this paper we present a metrological method for determination of mass density of focused ion beam induced deposition (FIBID) materials using quartz tuning fork (QTF) mass change sensors. Dimension and density determination of FIBID deposited nanostructures is necessary to develop and reliable and repeatable microfabribrication technology of the...

This paper presents a comprehensive modeling and experimental verification of active piezoresistive atomic force microscopy (AFM) cantilevers, which are the technology enabling high-resolution and high-speed surface measurements. The mechanical structure of the cantilevers integrating Wheatstone piezoresistive was modified with the use of focused i...

Here we present an approach to measure the surface potential distribution of specimens using scanning tunnelling potentiometry with high potential gradients and relatively low sample bias. A special design of test structures containing pre-patterned electrodes was employed. Material of interest is transferred onto test structures, so that additiona...

Purpose: The surface roughness of the dental restorations is significant to the denture plaque adhesion. Methods: In this work, we present the complex analysis of the electropolished CoCrW alloy remanium® star (Dentaurum, Germany) samples with laserengraved fiducial marks performed using complementary set of micro- and nanoscopic techniques: opt...

Over 10 days of exposure in 0.05 M NaCl solution, Ni coating with mean crystallite size of 6 nm deposited in ChCl:EG deep eutectic solvent corrodes with diffusion constraints. Native oxide layer (4.7 nm thick) is a mixture of NiO and NiOOH. During exposure, NiO forms on the top of the layer of corrosion products, whose thickness exceeds 15 nm after...

Radiation pressure – RP phenomenon has drawn much interest since the beginning of the 20th century. There are many technologies linked with it and worth mentioning: cavity optomechanics with optical cooling and small forces amplification, single atom trapping, cantilevers spring constant calibration or high-power laser measurement. Nevertheless, th...

In this paper we present design and application of novel piezoresistive scanning thermal microscopy (SThM) probes. The proposed probe integrates a piezoresistive deflection sensor and thermally active, resistive nanosize tip. Manufacturing technology includes standard silicon MEMS/CMOS processing and sophisticated postprocessing using Focus Ion Bea...

In the present paper, we describe a high sensitivity intensity fibre-optic displacement sensor with tens of picometre resolution combined with a sub-picometre resolution interferometric calibration system. Both integrated components form the so-called “2 in one ferrule” system 2iOF. The design and construction of the presented device depend on inte...

Laser-induced periodic surface structures (LIPSS) are highly periodic wavy surface features which are frequently smaller than incident light wavelength that bring possibility of nanostructuring of many materials. In this paper the possibility of using them to homogeneously structure the surface of artificial heart valve made of PyC was examined. By...

From various types of scintillating materials lutetium-yttrium oxyorthosilicate (LYSO) has the highest luminosity and the greatest potential of application in high-energy radiation detectors. Due to the small critical angle of total internal reflection the enhancement of the extraction of light outside a scintillator is a challenge. We study numeri...

A thick film (about 100 µm) of In2O3/Sn (75%/25% weight ratio) composite was sprayed onto a copper plate (5 mm thick) using Cold Spraying technique. In this way a hybrid-type target was prepared for a deposition of ITO thin films using High Power Impulse Magnetron Sputtering (HiPIMS) technique.

In this paper we present a method of fabrication and characterization of strain sensors fabricated with a focused electron beam induced deposition (FEBID) technology from Pt precursor. The FEBID structures were used as deflections sensors and applied to read-out resonance frequency of micromechanical bridges. In our experiments we have investigated...

In this paper the authors compare methods used for piezoresistive microcantilevers actuation for the atomic force microscopy (AFM) imaging in the dynamic shear force mode. The piezoresistive detection is an attractive technique comparing the optical beam detection of deflection. The principal advantage is that no external alignment of optical sourc...

The formation of dielectric composites on a target surface (target poisoning) reduces the deposition rate of a reactive magnetron deposition process in comparison to the deposition rate of metals. One way of minimizing this reduction is shifting the magnetron operating point from the dielectric to the transient mode. The goal of this paper is to sh...

The low deposition rate of compounds (especially dielectrics) is a significant disadvantage of the reactive magnetron sputtering technology. Formation of dielectric composites on the target surface (target poisoning) reduces the deposition rate, since the sputtering yield of most of composites is much lower than that of metals. In this paper we pre...

The carbon-related thin films are promising for applications in electronics, mechanics and bio-industry. In particular, the diamond-like carbon (DLC) films gained a great attention because of their transparency, hardness and chemical inertness. The high-power impulse magnetron sputtering (HiPIMS) technology, with its high density plasma and high io...

We report on the design, properties, and applications of a high-resolution and wide-bandwidth light intensity fiber optic displacement sensor for microelectromechanical system (MEMS) metrology. There are two types of structures that the system is dedicated to: vibrating with both high and low frequencies. In order to ensure high-frequency and high-...

“Photonic Crystals (PhC)” have been used in a variety of fields as a structure for improving the light extraction efficiency from materials with high index of refraction. In previous work we already showed the light extraction improvement of several PhC covered LYSO crystals in computer simulations and practical measurements. In this work, new samp...

In this work we present combined Kelvin probe force microscopy and Raman spectroscopy studies of supported and suspended structures formed out of chemical vapor deposition (CVD) grown graphene. Work function of both suspended and supported graphene was -4.81 ± 0.06eV and -4.92 ± 0.06eV respectively. By G and 2D modes correlation we showed, that CVD...

Soft lithography and UV-NIL are important technologies for micro- and nano- structures replication [1]. It is possible to adapt surface structures preparation for many applications regarding e.g. opto-fluidic on-chip microscopy, wetting or reflection properties [2]. Light microscopy has been one of the most common tools in biological research, beca...

In this paper, we present a new method for bending and stress measurements using an electromagnetically actuated cantilever. The proposed method is based on compensation of the cantilever's bending resulting from induced stress, which can be translated into the difference in surface stress, a measure of intermolecular interactions on the cantilever...

Micro- and Electro-Mechanical Systems (MEMS) form a group of transducers used for very precise mass sensing (in the range of femtograms) and force detection (in the range of piconewtons) changes. These can be read by the resonant frequency shift or amplitude of mechanical vibration changes. Monitoring of optical path is one of the ways in which thi...

In this work, we present the method of bending and stress measurements with electromagnetically actuated cantilever in sensors application. Proposed method compensate the bending of the cantilever induced under stress. Bending can be translated into surface stress difference which is a measure of intermolecular interactions. In proposed method Lore...

In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-band preamplifier are presented.

Increased interest in micro-and nano-electromechanical systems (MEMS and NEMS) entail the development of reliable measurement techniques for the basic parameters of the designed and manufactured devices. The proposed methodology should provide high resolution, wide frequency range and the possibility to investigate both mechanical and electrical pa...