Philippe Lutz

Philippe Lutz
Institut FEMTO-ST | FEMTO ST · Department of Automatic Control and Micro-Mechatronic Systems (AS2M)

PhD, HDR

About

205
Publications
27,274
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2,425
Citations
Additional affiliations
January 2002 - present
Institut FEMTO-ST
Position
  • Professor (Full)

Publications

Publications (205)
Conference Paper
Actuation of micro-robots in relation to the field of programmable matter has been the aim of most researches working on the topic. Most studies have concentrated on the ability of these robot modules to latch with one another and to be able to move around each other to form the desired configuration. These mostly have been based on Modular Self re...
Article
Full-text available
Origami structures have a wide range of applications in robotics and have been intensively investigated by researchers in recent years. However, enabling sub-millimeter structures is an open question especially because of the lack of small enough joints. In this paper, compliant joints made of Silica by Focused Ion Beam (FIB) folding are proposed t...
Article
Full-text available
Metamaterials have attracted wide scientific interest to break fundamental bounds on materials properties. Recently, the field has been extending to coupled physical phenomena where one physics acts as the driving force for another. Stimuli-responsive or 4D metamaterials have been demonstrated for thermo-elasticity, magneto-optics or piezo-electric...
Article
Full-text available
Force sensing has always been an important necessity in making decisions for manipulation. It becomes more appealing in the micro-scale context, especially where the surface forces become predominant. In addition, the deformations happening at the very local level are often coupled, and therefore providing multi-axis force sensing capabilities to m...
Article
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This paper presents a novel multi-axis Force sensor with a range-to-resolution ratio of 55000, which makes the sensing device highly useful for wide range of applications. The presented device relies on a sensing strategy where a 2D encoded micro-pattern is encrypted to the mobile part of the compliant platform. This encoded pattern allows multi-ax...
Article
Current digital microrobots are mainly composed of bistable modules and flexible structures. Unlike conventional microrobots, they are based on mechanical stability instead of complex control strategies in order to reach precise and repeatable discrete positioning. By design, their number of stable positions depends on the number of bistable module...
Article
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This article proposes an original approach for robotic calibration that is based on measurements along a single direction (1-D). Among all applications, the field of microrobotics and nanorobotics has been chosen as case study because of the strong needs for high positioning accuracy (10-100 nm typically) while measuring with sufficient resolution...
Article
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Recently, micro-assembly of individual photonic elements has been highly attracting to provide new optical functionalities and products with high performances. This approach requires position control in free space and contact detection in constrained space. In both cases, getting accurate measurements remains a key lock. For this sake, the FP (Fabr...
Article
Full-text available
Nowadays, the concept of programmable matter paves the way for promising applications such as reshaping an object to test different configurations, modeling or rapid prototyping. Based on elementary modules, such matter can be arranged and disassembled easily according to the needs of the designers. Several solutions have been proposed to implement...
Article
This paper addresses the control of manipulation force in a piezoelectric tube actuator (piezotube) subjected to temperature variation and input constrains. To handle this problem a robust output‐feedback design is proposed using an interval state‐space model, which permits consideration of the parameter uncertainties caused by temperature variatio...
Article
Laser scanning based on Micro-Electro-Mechanical Systems (MEMS) scanners has become very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical Coherence Tomography (OCT). These scanners are required to be fast to achieve real-time image reconstruction while working at low actuation voltage to comply with medical stand...
Article
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Hybrid integration of individual photonic elements appears particularly promising. It indeed provides high performances, proposes new optical functionalities and products and exploits new propagation modes of light beams. This approach requires an accurate multi Degree-Of-Freedom (DOF) positioning of the individual photonic elements. Hence, the ina...
Conference Paper
The characterization of a MOEMS endoscopic OCT probe is presented. Its capacity to perform Lissajous scanning and OCT imaging confirms that the probe is able to produce 3D OCT images in real-time.
Article
Full-text available
The industrial sector often employs piezoelectric materials as actuators for a variety of uses, some of which requires a precise positioning while being limited by space and cost factors that impede the insertion of external position and force sensors. Piezoelectric Actuators are characterized by strong nonlinearities (hysteresis and creep), badly...
Conference Paper
The paper investigates the electrical characterization of CNTs in-situ SEM. the originality of the proposed approach lies in its high versatility that is possible because it is based on nanoprobes moved by nanopositioning robots. Based on this configuration, several influent parameters are investigated without CNT (used as reference measurement). T...
Article
Micro-assembly using glue is an industrial need, but at the microscale, the gluing process appears highly challenging. Especially when the thickness of the glue film is large relative to the size of components to be assembled. Moreover, the down-scaling of passive techniques used at the macroscale (such as using reference surfaces) are widespread,...
Article
Full-text available
Charge-based Self-Sensing Actuation (SSA) is a cost and space-saving method for accurate piezoelectric based-actuator positioning. However, the performance of its implementation resides in the choice of its geometry and the properties of the constituent materials. This paper intends to analyze the charge-based SSA's performances dependence on the a...
Article
Full-text available
The use of mechanical bistable structures in the design of microrobots and mesorobots has many advantages especially for flexible robotic structures. However, depending on the used fabrication technology, the adequacy of theoretical and experimental mechanical behaviors can vary widely. In this paper, we present the manufacturing results of bistabl...
Article
The preshaped curved beam is used as bistable mechanism in MEMS, its behavior is characterized by the snapping forces and stresses that evolve during deflection between the two sides of buckling. Based on analytical models, the influence of variating the material and dimension parameters on the behavior of the curved beam is analyzed. The limit of...
Chapter
The grasp and release of objects have been widely studied in robotics. At the microscale, this problem becomes more difficult due to the microscale specificities which are notably manifested by the high dynamics of microsystems, their small inertia, their fragility, the predominance of surface forces and the high complexity of integrating adapted s...
Article
Full-text available
This paper introduces a new Self-Sensing Actuation approach for simultaneous estimation of external loads and Piezoelectric Actuator (PEA) displacement at a frequency where the PEA’s impedance change presents good sensitivity to both electrical and mechanical excitations. Experiments are conducted for static operations to support these claims and t...
Conference Paper
This paper presents the design and development of a robotic tweezer for nanomanipulation purpose that can meet together high positioning accuracy and manipulation abilities. Indeed, the gripper combines an innovative actuation principle based on smart materials (thick piezoelectric films) and integrated optical fibers (using Fabry-Perot interferome...
Article
In the rapid evolution of gastrointestinal endomicroscopy, optical coherence tomography (OCT) has found many diverse applications. Until recently, the micro-opto-electro-mechanical systems (MOEMS) technology has been playing a key role in shaping the miniaturization of these components. We report here, to the best of our knowledge, a novel endoscop...
Conference Paper
Full-text available
On account of the micro-scale building components manipulation and high precision demands , the interest is oriented toward automated robotic micro-manipulation and micro-assembly to provide low-cost high performances, notably for integrated optical devices. The paper proposes a novel strategy for high precision fully automated robotic alignment. T...
Article
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Controlling multidegrees of freedom (DOF) micropositioning systems always represents a great challenge because of the high sensitivity to the environment at this scale and the cross-coupling effects present between the different axes. A robust Luenberger observer-based state feedback design using interval analysis and the regional pole assignment t...
Article
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The problem of robust and optimal output feedback design for interval state-space systems is addressed in this paper. Indeed, an algorithm based on set inversion via interval analysis (SIVIA) combined with interval eigenvalues computation and eigenvalues clustering techniques is proposed to seek for a set of robust gains. This recursive SIVIAbased...
Article
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This paper reports a compliant monolithic multistable actuator which is able to switch its moving part between several stable positions linearly in one dimensional direction. The number of stable positions can be increased by extending the range of displacement of the moving part. The transition in each step of displacement is made between two adja...
Article
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This paper presents a displacement self-sensing method for piezoelectric actuators that takes into account the effect of the deformation of these latter on their electrical impedance. A self-updating digital electrical impedance equivalent to that of the piezoelement is suggested in order to overcome the mismatch problem met when considering a stat...
Conference Paper
We report on a LiNbO3 microresonator integrated in a low-loss free-suspended waveguide. The photonic elements are made by optical-grade dicing, and are assembled dynamically. This method opens the way to new 3D photonic architectures.
Article
This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1mm in diameter. This inner mirror plate is connected to a rigid frame via a pair of torsion bars in two diame...
Article
Full-text available
This paper proposes a self-sensing measurement technique to perform the precise estimation of the displacements along two axes in a two-degrees of freedom (2-DOF) piezoelectric actuator. For that, a new electrical circuit scheme which permits charge amplification is first proposed to match the different electrodes combination of the 2-DOF actuator....
Article
Full-text available
A mechanical stop mechanism is developed in order to compensate MEMS fabrication tolerances in discrete positioning. The mechanical stop mechanism is designed to be implemented on SOI wafers using a common DRIE etching process. The various fabrication tolerances obtained due to the etching process are presented and discussed in the paper. The princ...
Poster
Full-text available
A 2-axis Electrothermal MEMS Micro-Scanner With Torsion beam for Mirau Interferometer for cancer Early Diagnosis for the Workshop SMYLE in EPFL, Neuchatel, Switzerland, September 2016
Article
At the microscale, small inertia and high dynamics of microparts increase the complexity of grasping, releasing and positioning tasks. The difficulty increases especially because the position, the dimensions and the stiffness of the micropart are unknown. In this paper, the use of a microgripper with integrated sensorized end-effectors with high dy...
Article
This paper sets forth to study and demonstrate the usability of an emerging piezoelectric material, called Lead Magnesium Niobate–Lead Titanate (PMN–PT), as a potential actuator for dexterous micro-manipulation. For this purpose, a generic structure called a duobimorph cantilever is studied. The proposed design takes advantage of a specific transve...
Conference Paper
Full-text available
Today, the rapid advance of additive manufacturing, namely 3D printing, gives options and capabilities to simplify the fabrication of three-dimensional complex structures. In fact, such technology brings a real rupture comparing to conventional technologies in terms of design and manufacturing. Taking those advantages, this paper presents the desig...
Conference Paper
In this paper we introduce a 2-axis MEMS microscanner with large scanning range of frame (32°) and mirror (22°) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate.
Article
In this paper, we develop original analytical electro-thermal and thermo-mechanical models for the U-shaped electro-thermal actuator. The dynamics of the temperature distribution and displacement are obtained as a direct relationship between the system's dimensions, material properties and electrical input. The electro-thermal model provides an exa...
Article
Full-text available
High positioning accuracy is a crucial need to perform successfully complex tasks such as micromanipulation and microassembly. This especially enables to provide high performances or to propose new functionalities/products, notably for integrated optical devices. The objective of the letter is to align two optical structures in multi-DOF way with v...
Article
Full-text available
Microrobotics is an ongoing study all over the world for which design is often inspired from macroscale robots. We have proposed the design of a new kind of microfabricated microrobot based on the use of binary actuators in order to generate a highly accurate and repeatable tool for positioning tasks at microscale without any sensor (with openloop...
Conference Paper
Full-text available
This paper aims to develop a position tracking controller for a micro-gripper's tip. The controller should be robust, able to compensate external disturbances and perform precise reference tracking under parameter variation and incertitudes. It becomes clear when considering the gripper's response on two different environments: air and vacuum. In t...
Article
Full-text available
In this paper, we investigate the effect of high modes of buckling on the mechanical behavior of a pre-shaped curved beam. In a first stage, the presented modeling develops further the snapping forces solution and bistability conditions in order to include high modes of buckling. In a second stage, we develop the analytical solution of the stresses...
Article
Full-text available
Microassembly is an innovative alternative to the microfabrication process of MOEMS, which is quite complex. It usually implies the use of microrobots controlled by an operator. The reliability of this approach has been already confirmed for micro-optical technologies. However, the characterization of assemblies has shown that the operator is the m...
Conference Paper
Full-text available
The dynamic behavior of a U-shaped electrothermal actuator is investigated in this paper based on experimental findings and FEM simulations. Few previous works are found in the literature that have addressed the dynamic response of U-shaped actuators. A lack of data on the transient displacement of the actuator in the heating and cooling cycles is...
Conference Paper
This paper presents how a Lead Magnesium Niobate – Lead Titanate (PMN-PT) based actuator, poled and cut along the [001] crystalline direction, can be used as an integrated actuator in a Micro Opto Electro Mechanical System (MOEMS). This cut was chosen as it has been proved to present piezoelectric coefficients that surpass 4500pm/V. This makes PMN-...
Conference Paper
Full-text available
This paper presents how a Lead Magnesium Niobate – Lead Titanate (PMN-PT) based actuator, poled and cut along the [001] crystalline direction, can be used as an integrated actuator in a Micro Opto Electro Mechanical System (MOEMS). This cut was chosen as it has been proved to present piezoelectric coefficients that surpass 4500pm/V. This makes PMN-...