Philipp Hoenicke

Philipp Hoenicke
Physikalisch-Technische Bundesanstalt | PTB · Department 7.2 Cryophysics and Spectrometry

Dipl.-Ing (FH), MSc., Dr. rer. nat.

About

113
Publications
28,408
Reads
How we measure 'reads'
A 'read' is counted each time someone views a publication summary (such as the title, abstract, and list of authors), clicks on a figure, or views or downloads the full-text. Learn more
979
Citations
Additional affiliations
November 2016 - present
Physikalisch-Technische Bundesanstalt
Position
  • PostDoc Position
July 2007 - present
Physikalisch-Technische Bundesanstalt
Position
  • Researcher

Publications

Publications (113)
Article
Full-text available
An experimental method for the verification of the individually different energy dependencies of L1−, L2−, and L3− subshell photoionization cross sections is described. The results obtained for Pd and Mo are well in line with theory regarding both energy dependency and absolute values, and confirm the theoretically calculated cross sections by Scof...
Article
With the advent of both modern X-ray fluorescence (XRF) methods and improved analytical reliability requirements the demand for suitable reference samples has increased. Especially in nanotechnology with the very low areal mass depositions, quantification becomes considerably more difficult. However, the availability of suited reference samples is...
Article
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their...
Article
Grazing-Incidence X-ray fluorescence (GIXRF) analysis, which is closely related to total-reflection XRF, is a very powerful technique for the in-depth analysis of many types of technologically relevant samples, e.g. nanoparticle depositions, shallow dopant profiles, thin layered samples or even well-ordered nanostructures. However, the GIXRF based...
Article
The spatial and compositional complexity of 3D structures employed in today's nanotechnologies has developed to a level at which the requirements for process development and control can no longer fully be met by existing metrology techniques. For instance, buried parts in stratified nanostructures, which are often crucial for device functionality,...
Preprint
Full-text available
The L subshell Coster Kronig (CK) transition factors of Gd have been experimentally determined by means of two different experimental approaches and compared to available literature data. On the one hand reference-free X-ray fluorescence (XRF) analysis using an energy-dispersive detector was applied. This method permitted in addition to determine t...
Preprint
We used reference-free grazing incidence X-ray fluorescence to measure the density of four thiol Raman-active molecules assembled on gold surfaces. This value is needed to reliably quantify the number of molecules contributing to the SERS signal in a plasmonic substrate in the effort to standardize the enhancement factor calculation and such molecu...
Preprint
Self-assembled monolayers of 7-mercapto 4-methylcoumarin (MMC) on a flat gold surface were studied by Molecular Dynamics (MD) simulations, reference-free grazing incidence X-ray fluorescence (GIXRF) and X-ray photoemission spectroscopy (XPS), to determine the maximum monolayer density and to investigate the nature of the molecule/surface interface....
Article
Knowledge on the temporal and size distribution of particulate matter (PM) in air as well as on its elemental composition is a key information for source appointment, for the investigation of their influence on environmental processes and for providing reliable data for climate models. While cascade impactors allow for time- and size-resolved colle...
Preprint
Full-text available
The knowledge of atomic fundamental parameters, such as the fluorescence yields with low uncertainties, is of decisive importance in elemental quantification involving X-ray fluorescence analysis techniques. However, especially for the low-Z elements, the available literature data are either of poor quality, of unknown or very large uncertainty, or...
Article
Full-text available
Each battery suffers from degradation effects which lead to capacity fading and life cycle reduction. With electrochemical methods, the battery capacity decrease can easily be monitored, but they are inappropriate to comprehend the underlying chemical and physical properties responsible for the capacity fading. In the present paper, we demonstrate...
Article
Full-text available
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next-generation integrated electronic circuits. Modern transistor architectures for, e.g., FinFETs are realized by lithographic fabrication of complex, well-ordered nanostructures. Recently, a novel character...
Preprint
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which is taking advantage of the X-ray standing wave field effect, nanostructures can be investigated with a high se...
Article
Full-text available
The refractive index of a y -cut SiO 2 crystal surface is reconstructed from orientation-dependent soft X-ray reflectometry measurements in the energy range from 45 to 620 eV. Owing to the anisotropy of the crystal structure in the (100) and (001) directions, a significant deviation of the measured reflectance at the Si L 2,3 and O K absorption edg...
Preprint
The optical constants of ruthenium in the spectral range 8 nm to 23.75 nm with their corresponding uncertainties are derived from the reflectance of a sputtered ruthenium thin film in the Extreme Ultraviolet (EUV) spectral range measured using monochromatized synchrotron radiation. This work emphasizes the correlation between structure modelling an...
Preprint
Full-text available
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs are realized by lithographic fabrication of complex, well ordered nanostructures. Recently, a novel characteriz...
Article
Full-text available
Suspensions of hemoglobin microparticles (HbMPs) are promising tools as oxygen therapeutics. For the approval of clinical studies extensive characterization of these HbMPs with a size of about 750 nm is required regarding physical properties, function, pharmaco-kinetics and toxicology. The standard absorbance measurements in blood gas analyzers req...
Preprint
Full-text available
Knowledge on the temporal and size distribution of particulate matter (PM) in air as well as on its elemental composition is a key information for source appointment, for the investigation of their influence on environmental processes and for providing valid data for climate models. A prerequisite is that size fractionated sampling times of few hou...
Article
Full-text available
The quantitative evolution of dissolved polysulfides at both electrode sides of lithium–sulfur batteries is determined with operando X-ray spectrometry.
Article
The enhancement factor (EF) is an essential parameter in the field of surface-enhanced Raman spectroscopy (SERS), indicating the magnification of the Raman signal of molecules interacting with the surface of plasmonic nanostructures. The calculation of EF requires a careful evaluation of both the signal intensities and the number of molecules in SE...
Article
Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibil...
Preprint
Full-text available
The refractive index of a y-cut SiO$_2$ crystal surface is reconstructed from polarization dependent soft X-ray reflectometry measurements in the energy range from 45 eV to 620 eV. Due to the anisotropy of the crystal structure in the (100) and (001) directions, we observe a significant deviation of the measured reflectance at the Si-L$_{2,3}$ and...
Article
Full-text available
We present experimental and theoretical X-ray emission spectroscopy (XES) data of the Fe K\(\beta\) line for Iron(II)sulfide (FeS) and Iron(II)disulfide (FeS$_2$). In comparison to X-ray absorption spectroscopy (XAS), XES offers different discrimination capabilities for chemical speciation, depending on the valence states of the compounds probed an...
Article
X-ray fluorescence (XRF) analysis is a widely applied technique for the quantitative analysis of thin films up to the µm scale because of its non-destructive nature and because it is easily automated. When low uncertainties of the analytical results in the few percent range are required, the non-linear secondary fluorescence effect in multi-element...
Preprint
Full-text available
We present Fe K$\beta$ X-ray emission (XES) and Fe K X-ray absorption spectra (XAS) of Iron(II)sulfide (FeS) and Iron(II)disulfide (FeS$_2$). While XES and XAS offer different discrimination capabilities for chemical speciation, depending on the valence states of the compounds probed, XES allows for using different excitation sources. The XES data...
Preprint
Full-text available
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their...
Preprint
Full-text available
Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibil...
Article
Full-text available
In this work, Pt-Ti core-shell nanoparticles (NP) of 2 nm to 3 nm in size and 30000 u ± 1500 u as specified single particle mass, deposited on flat silicon substrates by means of a mass-selected cluster beam source, were used for the investigation of the modification of the X-Ray Standing Wave (XSW) field intensity with increasing NP surface covera...
Preprint
Full-text available
In this work, Pt-Ti core-shell nanoparticles (NP) of 2 nm to 3 nm in size and 30000 u \pm 1500 u as specified single particle mass, deposited on flat silicon substrates by means of a mass-selected cluster beam source, were used for the investigation of the modification of the X-Ray Standing Wave (XSW) field intensity with increasing NP surface cove...
Preprint
Full-text available
X-ray fluorescence (XRF) analysis is a widely applied technique for the quantitative analysis of thin films up to the $\mu$m scale because of its non-destructive nature and because it is easily automated. When low uncertainties of the analytical results in the few percent range are required, the non-linear secondary fluorescence effect in multi-ele...
Preprint
Full-text available
Grazing-Incidence X-ray fluorescence (GIXRF) analysis, which is closely related to total-reflection XRF, is a very powerful technique for the in-depth analysis of many types of technologically relevant samples, e.g. nanoparticle depositions, shallow dopant profiles, thin layered samples or even well-ordered nanostructures. However, the GIXRF based...
Article
Full-text available
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF)-based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a new computational scheme for the simulation of the angular-dependent fluorescence intensities from such period...
Article
Industry-scalable fabrication methods of sulfur-based transition metal dichalcogenides are being developed, which puts strong requirements on the characterization of these mono- and few-layer materials in a cleanroom environment. In this paper, we show that the stoichiometry of ultrathin molydbenum disulfide layers can be determined by inline X-ray...
Article
The passivation of n-type InP (100) using sulfur in combination with a gadolinium aluminate (GAO) dielectric layer has been studied. Photoluminescence, minority-carrier lifetime and capacitance-voltage measurements indicate that a (NH4)2S vapor passivation step prior to atomic layer deposition of the oxide effectively lowers the interface state den...
Article
FeNi Hydroxides (FeNi-HD) have been considered as promising substitutes to noble metal electrocatalysts for oxygen evolution reaction (OER). In this work, we design and realize FeNi-HD nanotube arrays (FeNi-HDNAs) on Ni foam via an in-situ reaction and Kirkendall effect. The obtained catalysts possess higher specific surface area, more catalytic ac...
Article
Despite increasing attention for the recently found ferro- and antiferroelectric properties, the polymorphism in hafnia- and zirconia-based thin films is still not sufficiently understood. In the present work, we show that it is important to have a good quality X-ray absorption spectrum to go beyond an analysis of the only the first coordination sh...
Preprint
Full-text available
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a new computational scheme for the simulation of the angular dependent fluorescence intensities from such period...
Article
Nanolayer stacks are technologically very relevant for current and future applications in many fields of research. A nondestructive characterization of such systems is often performed using x-ray reflectometry (XRR). For complex stacks of multiple layers, low electron density contrast materials, or very thin layers without any pronounced angular mi...
Article
Full-text available
LiMn2O4 is a promising candidate for a cathode material in lithium ion batteries (LIBs) due to its ability to intercalate lithium ions reversibly through its three-dimensional manganese oxide network. One of the promising techniques for depositing LiMn2O4 thin film cathodes is atomic layer deposition (ALD). Due to its unparalleled film thickness co...
Preprint
Full-text available
In this work the complete L-emission spectrum of gadolinium with respect to line energies, natural line widths, and relative transition probabilities was investigated using monochromatized synchrotron radiation. The measurements were realized in the PTB laboratory at BESSY II by means of an in-house built von Hamos spectrometer based on up to two f...
Preprint
Nanolayer stacks are technologically very relevant for current and future applications in many fields of research. A non-destructive characterization of such systems is often performed using X-ray reflectometry (XRR). For complex stacks of multiple layers, low electron density contrast materials or very thin layers without any pronounced angular mi...
Article
A Compact Vibration Reduced Set-up for Scanning nm-XRF and STXM. - Volume 24 Supplement - Janin Lubeck, Christian Seim, Aurélie Dehlinger, Andreas Haidl, Philipp Hönicke, Yves Kayser, Rainer Unterumsberger, Claudia Fleischmann, Burkhard Beckhoff
Article
The knowledge of atomic fundamental parameters, such as the mass attenuation coefficients or fluorescence yields with low uncertainties, is of decisive importance in elemental quantification involving X‐ray fluorescence analysis techniques. For example, several databases giving the mass attenuation coefficients are accessible and frequently used wi...
Article
The fluorescence yield of the K- and L3-shell of gallium was determined using the radiometrically calibrated (reference-free) X-ray fluorescence instrumentation at the BESSY II synchrotron radiation facility. Simultaneous transmission and fluorescence signals from GaSe foils were obtained, resulting in K- and L3-shell fluorescence yield values (ωGa...
Article
Full-text available
Reasonably-priced devices for the detection of toxic species in the atmosphere are critical for reasons of health. Previous research work shows the promising detection capabilities of graphene. Thus, we demonstrate the gaseous response of our nanocrystalline graphene field-effect transistors that can be fabricated hundredfold on a two inch substrat...
Article
Full-text available
Fluorescence yields (FY) for the Ni K and L shells were determined by a theoretical and an experimental group within the framework of the International Initiative on X-ray Fundamental Parameters (FPs) collaboration. Coster-Kronig (CK) parameters were also measured for the L shell of Ni. Theoretical calculations of the same parameters were performed...
Article
The relative transition probabilities of the L3-fluorescence lines from different titanium oxides were determined using high-resolution X-ray emission spectrometry. A reliable deconvolution of the X-ray emission spectra, by means of both experimentally determined response functions and absorption correction, reduces the relative uncertainties of th...
Cover Page
Large‐scale sub‐20 nm regular pattern obtained by self‐assembly of di‐block copolymers. The combination of reference free grazing incidence X‐ray fluorescence (GIXRF) and GIXAS techniques enables a complete characterization of such a 3D system and provides a potential calibration sample for 3D analytical techniques. This is reported by Masoud Diala...
Article
The geometry of a Si$_3$N$_4$ lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the X-ray standing wave field, this approach fails for laterally structured surfaces. Maxwell solvers based on finit...
Article
The continuous and aggressive scaling in semiconductor technology results in the integration of increasingly complex 3D architectures and new materials. The realization of these downscaled 3D structures requires also further improvement in 3D characterization techniques. In this work, a potential route to improve the accuracy and reliability of the...
Article
The x-ray atomic properties of nickel (Ni) were investigated in a unique approach combining different experimental techniques to obtain new, useful and reliable values of atomic fundamental parameters for x-ray spectrometric purposes and for comparison with theoretical predictions. We determined the mass attenuation coefficients in an energy range...
Article
The redefinition of the kilogram will be based on Planck's constant, which can be calculated from Avogadro's constant, and hence by 'counting' the silicon atoms in a monocrystalline 28Si sphere weighing one kilogram. To reduce the influence of the surface layers on the determined value requires, amongst other issues, an accurate quantification of t...
Thesis
Eine genaue und zerstörungsfreie tiefenabhängige Charakterisierung nanoskaliger Schichtsysteme ist ein essentielles Thema in vielen Bereichen der aktuellen Forschung. Besonders die sogenannten Nanolaminat-Schichten, wobei es sich um Stapel aus mehreren ultra dünnen Schichten handelt, sind technologisch für aktuelle und zukünftige elektronische Baue...
Article
Full-text available
Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X-ray reflectance...