Peter Petrik

Peter Petrik
Hungarian Research Network · Photonics

MSc, PhD, DSc
Photonics of functional materials

About

272
Publications
56,418
Reads
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2,364
Citations
Introduction
Additional affiliations
March 2013 - March 2014
Delft University of Technology
Position
  • Visiting Scientist
Description
  • I worked on optical scatterometry (Fourier scatterometry, coherent Fourier scatterometry, Fourier ellipsometry)
January 2012 - December 2012
Fraunhofer Institute for Integrated Circuits IIS
Position
  • Visiting Scientist
May 2006 - October 2006
University of Toledo
Position
  • Visiting Scientist
Description
  • I worked on the development of high sensitivity optical characterization techniques (ellipsometry) for photovoltaic materials.
Education
September 1995 - May 2000
September 1989 - June 1994

Publications

Publications (272)
Article
Full-text available
We developed and applied a new calibration method to make more accurate measurements with our multi-color ellipsometric mapping tool made from cheap parts. Ellipsometry is an optical technique that measures the relative change in the polarization state of the measurement beam induced by reflection from or transmission through a sample. During conve...
Article
Full-text available
Gold gratings were measured by spectroscopic ellipsometry and modeled by the finite element method to investigate the capabilities of optical dimensional metrology for plasmonic diffractive structures. The gratings were prepared by electron beam lithography using parameters determined by finite element simulations for significant variations of the...
Article
Full-text available
We performed an electrochromic investigation to optimize the composition of reactive magnetron-sputtered mixed layers of zinc oxide and tin oxide (ZnO-SnO2). Deposition experiments were conducted as a combinatorial material synthesis approach. The binary system for the samples of SnO2-ZnO represented the full composition range. The coloration effic...
Preprint
Full-text available
We developed and applied a new calibration method to make the measurement more accurate with our multi-color ellipsometric mapping tool from cheap parts. Ellipsometry is an optical technique that measures the relative change in polarization state of the measurement beam induced by reflection from or transmission though a sample. During the conventi...
Preprint
Full-text available
Electrochromic measurements have been performed to optimize the composition of reactive magnetron-sputtered mixed layers of Zinc oxide and Tin oxide (ZnO-SnO2). A combinatorial material synthesis approach was applied throughout the deposition experiments, and the samples represented the full composition range of the binary SnO2-ZnO system. The Colo...
Article
Full-text available
Nanoscale oxides grown in c-silicon, implanted with low-energy (2 keV) H+ ions and fluences ranging from 1013 cm−2 to 1015 cm−2 by RF plasma immersion implantation (PII), have been investigated. The oxidation of the implanted Si layers proceeded in dry O2 at temperatures of 700 °C, 750 °C and 800 °C. The optical characterization of the formed Si/Si...
Article
Full-text available
The dielectric function and interband critical points of compressively strained ferroelectric K0.85Na0.15NbO3 thin film grown by metal-organic vapor phase epitaxy (MOVPE) are studied in broad spectral and temperature ranges by spectroscopic ellipsometry (SE). The temperature dependence of the measured pseudodielectric functions is strongly affected...
Article
Full-text available
Thin films of mixed MoO3 and WO3 were obtained using reactive magnetron sputtering onto ITO-covered glass, and the optimal composition was determined for the best electrochromic (EC) properties. A combinatorial material synthesis approach was applied throughout the deposition experiments, and the samples represented the full composition range of th...
Article
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Color etching is a useful corrosive process, widely applied in metallography to study the microstructure of metals. To prove the existence of the previously hypothesized steady-state etching rate, in-situ investigations were performed with spectroscopic ellipsometry during the color etching of ferritic materials. Kinetic information regarding the r...
Article
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Metalorganic vapor-phase epitaxy of β-Ga 2 O 3 /c-plane Al 2 O 3 heterostructures was monitored in-situ by spectral reflectance in different wavelengths. The reflectance spectrum was analysed as a function of the growth time and the incident wavelength to estimate the growth rate and the refractive index at the growth temperatures. The obtained val...
Preprint
Full-text available
Metalorganic vapor-phase epitaxy of β-Ga 2 O 3 /c-plane Al 2 O 3 heterostructures was monitored in-situ by spectral reflectance in different wavelengths. The reflectance spectrum was analysed as a function of the growth time and the incident wavelength to estimate the growth rate and 15 the refractive index at the growth temperatures. The obtained...
Article
Full-text available
The effect of laser irradiation in the energy range from 20 mW to 200 mW was investigated in 109 nm thick Fe51Rh49 film deposited on an MgO (100) substrate. The initial, A1 structure with fully paramagnetic magnetic ordering was achieved after irradiating the samples with 120 keV Ne+ ions with a fluence of 1 × 1016 ion/cm2, as it was confirmed by c...
Article
Full-text available
We determined the optimal composition of reactive magnetron-sputtered mixed layers of Titanium oxide and Tin oxide (TiO2-SnO2) for electrochromic purposes. We determined and mapped the composition and optical parameters using Spectroscopic Ellipsometry (SE). Ti and Sn targets were put separately from each other, and the Si-wafers on a glass substra...
Preprint
Full-text available
Ion implantation has been a key technology for the controlled surface modification of materials in microelectronics and generally, for tribology, biocompatibility, corrosion resistance and many more. To form shallow junctions in Ge is a challenging task. In this work the formation and accumulation of shallow damage profiles was studied by in-situ s...
Preprint
Full-text available
We determined the optimal composition of reactive magnetron sputtered TiO2-SnO2 mixed layers for electrochromic purposes. We determined and mapped the composition and optical parameters by Spectroscopic Ellipsometry (SE). The Ti‐ and Sn‐ targets have been placed separately, and the Si-wafers on glass substrate (30 cm× 30 cm) were moved under the tw...
Article
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The novel, single-sample concept combinatorial method, the so-called micro-combinatory technique, has been shown to be suitable for the high-throughput and complex characterization of multicomponent thin films over an entire composition range. This review focuses on recent results regarding the characteristics of different binary and ternary films...
Article
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Among the many available real-time characterization methods, ellipsometry stands out with the combination of high sensitivity and high speed as well as nondestructive, spectroscopic, and complex modeling capabilities. The thicknesses of thin films such as the complex dielectric function can be determined simultaneously with precisions down to sub-n...
Article
Ion implantation has been a key technology for the controlled surface modification of materials in microelectronics and generally, for tribology, biocompatibility, corrosion resistance and many more. To form shallow junctions in Ge is a challenging task. In this work the formation and accumulation of shallow damage profiles was studied by in-situ s...
Article
Full-text available
The behavior of single layer van der Waals (vdW) materials is profoundly influenced by the immediate atomic environment at their surface, a prime example being the myriad of emergent properties in artificial heterostructures. Equally significant are adsorbates deposited onto their surface from ambient. While vdW interfaces are well understood, our...
Article
Full-text available
Non-thermal and thermal carrier populations in plasmonic systems raised significant interest in contemporary fundamental and applied physics. Although the theoretical description predicts not only the energies but also the location of the generated carriers, the experimental justification of these theories is still lacking. Here, we demonstrate exp...
Article
Full-text available
In this work, the effects of femtosecond laser irradiation and doping with plasmonic gold nanorods on the degree of conversion (DC) of a urethane dimethacrylate (UDMA)–triethylene glycol dimethacrylate (TEGDMA) nanocomposite were investigated. The UDMA-TEGDMA photopolymer was prepared in a 3:1 weight ratio and doped with dodecanethiol- (DDT) capped...
Article
Full-text available
Undoped and Zn-doped ITO (ITO:Zn) multifunctional thin films were successfully synthesized using the sol–gel and dipping method on three different types of substrates (glass, SiO2/glass, and Si). The effect of Zn doping on the optoelectronic, microstructural, and gas-sensing properties of the films was investigated using X-ray diffraction (XRD), at...
Article
Plasmonic AgAl/Si3N4 sensor layer structure was deposited on a fused silica glass slide by dual DC magnetron sputtering. The composition of the AgxAl1−x layer was laterally graded in which x linearly changes from x=0 to x=1 over a distance of 20 mm. The Si3N4 layer serves both as a resonator and a protective layer providing homogeneous chemical pro...
Article
Full-text available
In the present work ZnO thin films doped with Mn and V in the same amount (2 at.%) were obtained by 5 successive depositions on Pt/Ti/SiO2/Si substrates using the sol–gel and spin coating method. Their structural, morphological, chemical, optical, and piezoelectric properties were investigated by X-Ray Diffraction (XRD), Scanning Electron Microscop...
Preprint
Full-text available
The behavior of single layer van der Waals (vdW) materials is profoundly influenced by the immediate atomic environment at their surface, a prime example being the myriad of emergent properties in artificial heterostructures. Equally significant are adsorbates deposited onto their surface from ambient. While vdW interfaces are well understood, our...
Preprint
Full-text available
The behavior of single layer van der Waals (vdW) materials is profoundly influenced by the immediate atomic environment at their surface, a prime example being the myriad of emergent properties in artificial heterostructures. Equally significant are adsorbates deposited onto their surface from ambient. While vdW interfaces are well understood, our...
Article
Full-text available
We have investigated high temperature phase transitions in NaNbO 3 thin films epitaxially grown under tensile lattice strain on (110) DyScO 3 substrates using metal-organic vapor phase epitaxy. At room temperature, a very regular stripe domain pattern consisting of the monoclinic a 1 a 2 ferroelectric phase was observed. Temperature-dependent studi...
Article
Full-text available
HfS2 has recently emerged as a promising 2D semiconductor, but the lack of a reliable method to produce continuous films on a large scale has hindered its spreading. The atomic layer deposition of the material with the precursor tetrakis-dimethylamino-hafnium with H2S is a relatively novel solution to this problem. This paper shows that it is a fac...
Article
Full-text available
Incorporated hydrogen and its bonding configuration have an effect on the electrical and structural properties of hydrogenated amorphous silicon (a-Si) thin films. On one hand hydrogenization is known to be very efficient in reducing the density of dangling bonds responsible for deep levels in the bandgap; the technological process that carries out...
Article
The structural and chemical homogeneity of the developed thin film upon color etching a low-carbon steel specimen with Beraha-I type color etchant was investigated by spectroscopic ellipsometry and electron backscatter diffraction examinations. The obtained layer thickness maps showed a good correlation with the crystallographic orientation of the...
Article
Full-text available
Thin films covering large surfaces are used in a very wide range of applications from displays through corrosion resistance, decoration, water proofing, smart windows, adhesion performance to solar panels and many more. Scaling up existing thin film measurement techniques requires a high speed and the redesign of the configurations. The aim of this...
Preprint
Full-text available
Quantum confinement of graphene carriers is an effective way to engineer its properties. It is commonly realized through physical edges that are associated with the deterioration of mobility and strong suppression of plasmon resonances. Here, we demonstrate a simple, large-area, edge-free nanostructuring technique, based on amplifying random nanosc...
Article
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Quantum confinement of the charge carriers of graphene is an effective way to engineer its properties. This is commonly realized through physical edges that are associated with the deterioration of mobility and strong suppression of plasmon resonances. Here, we demonstrate a simple, large-area, edge-free nanostructuring technique, based on amplifyi...
Article
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In this study we report on the growth of ZrO2 films upon the gradual thermal annealing of Zr in the temperature range of 500–700 K. The thickness of the oxide was monitored by in-situ spectroscopic ellipsometry with temporal and thickness resolutions of a few seconds and a few nanometers, respectively. A remarkable feature of the process was that t...
Article
Full-text available
Regular monitoring of arsenic concentrations in water sources is essential due to the severe health effects. Our goal was to develop a rapidly responding, sensitive and stable sensing layer for the detection of arsenic. We have designed flagellin-based arsenic binding proteins capable of forming stable filament structures with high surface binding...
Article
Full-text available
Layers and devices utilizing semiconductor nanocrystals have been the subjects of intensive research due to applications in opto- and microelectronic devices, solar cells, detectors, memories and in many more fields. We have shown previously that those nanocrystals in dielectric matrices undergo a substantial reformation during electron irradiation...
Article
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We designed a Bragg mirror structure with an SiO2 top layer to create a resonance in the ultraviolet wavelength range, near the absorption peak position of various proteins. We demonstrate that the wavelength of enhanced sensitivity can be adjusted by proper design of the 1D photonic structure. The possibility to design the wavelength of enhanced s...
Article
Full-text available
Due to its remarkable switching effect in electrical and optical properties, VO2 is a promising material for several applications. However, the stoichiometry control of multivalent vanadium oxides, especially with a rational deposition technique, is still challenging. Here, we propose and optimize a simple fabrication method for VO2 rich layers by...
Article
Full-text available
Gold nanoparticles (AuNPs) display surface plasmon resonance (SPR) as a result of their irradiation at a targeted light frequency. SPR also results in heat production that increases the temperature of the surrounding environment, affecting polymerization. The aim was to investigate the SPR effect of AuNPs on a dimethacrylate-based photopolymer syst...
Article
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In this work, amorphous hydrogen-free silicon nitride (a-SiNx) and amorphous hydrogenated silicon nitride (a-SiNx:H) films were deposited by radio frequency (RF) sputtering applying various amounts of hydrogen gas. Structural and optical properties were investigated as a function of hydrogen concentration. The refractive index of 1.96 was character...
Preprint
Full-text available
Ion implantation has been a key technology in microelectronics and generally, for the controlled surface modification of materials for tribology, biocompatibility, corrosion resistance and many more. In this work in-situ spectroscopic ellipsometry was used for accurately tracking and on-line evaluating the accumulation of voids and damage in crysta...
Article
Full-text available
Mid-infrared (IR) ellipsometry of thin films and molecule layers at solid–liquid interfaces has been a challenge because of the absorption of light in water. It has been usually overcome by using configurations utilizing illumination through the solid substrate. However, the access to the solid–liquid interface in a broad spectral range is also cha...
Article
Full-text available
Porous gold nanoparticles (PGNs) are very popular due to their high surface/volume ratio, moreover they have stronger plasmonic properties than their solid counterparts. These properties make the porous gold nanoparticles very useful for lots of applications, for instance chemical sensors, cancer therapy applications. For applications, however, it...
Article
Full-text available
The optical parameters of hydrogenated amorphous a-\(\hbox {Si}_{1-x}\,\hbox {Ge}_{{x}}\):H layers were measured with focused beam mapping ellipsometry for photon energies from 0.7 to 6.5 eV. The applied single-sample micro-combinatorial technique enables the preparation of a-\(\hbox {Si}_{1-x}\,\hbox {Ge}_{{x}}\):H with full range composition spre...
Article
Full-text available
Nuclear fuel claddings can balloon and rupture at high temperatures under internal gas pressure in case of design basis accidents like loss-of-coolant-accident (LOCA). The thermal phenomena surrounding the ballooning and cracking was investigated in a series of experiments performed using zirconium alloy cladding tubes at the Centre for Energy Rese...
Article
Full-text available
Protective SiC-rich nano layer was created by ion beam mixing of Si/C multilayers. The transformation of the Si and C layers into a homogeneous SiC layer was analyzed using complementary depth profiling by spectroscopic ellipsometry (SE) and Auger electron spectroscopy (AES). The distribution of elements and their chemical states was revealed by AE...
Article
This paper reports the comparative study of piezoelectric nanostructures deposited on metallic flexible substrate versus rigid substrates as a new architecture for energy harvesters. Rigid metallic substrates are multi-layered types of Pt/Ti/SiO2/Si or Au/Ti/SiO2/Si while Ti foil is a flexible metallic substrates. The active piezo-layer consisted o...
Article
Low-temperature evolution of optical and structural properties of Ge-rich-Al2O3 films with different Ge contents was investigated. As-deposited films and films annealed at TA≤550 °C were found to be amorphous whatever the Ge content. The formation of amorphous Ge clusters occurs at TA=550 °C, whereas their crystallization is prominent at TA=600 °C...
Article
Full-text available
CrAlN alloys can play an important role in the improvement of next generation piezoelectric MEMS devices. However, enhanced piezoelectric constants require high degree of uniaxial orientation in the polycrystalline thin film. In this work, CrxAl1−xN thin films with varying compositions were deposited at different substrate temperatures by reactive...
Article
Full-text available
Environmental monitoring of Ni is needed around the WHO threshold limit of 0.34 µM. This sensitivity target can usually only be met by time consuming and expensive laboratory measurements. There is a need for cheap field-applicable methods, even if it is only used for signaling the necessity of a more accurate laboratory investigation. In this work...