Paolo Conci

Paolo Conci
MicroFabSolutions

MS in materials engineering

About

15
Publications
3,002
Reads
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96
Citations
Additional affiliations
July 2008 - July 2014
Fondazione Bruno Kessler
Position
  • Researcher

Publications

Publications (15)
Article
Full-text available
Pixel technology is commonly used in the tracking systems of High Energy Physics detectors with physical areas that have largely increased in the last decades. To ease the production of several square meters of sensitive area, the possibility of using the industrial Wafer Level Packaging to reassemble good single sensor tiles from multiple wafers i...
Article
Full-text available
An analysis of the mechanical properties of plasma enhanced chemical vapor (PECVD) silicon nitrides is presented, using micro fabricated silicon nitride membranes under point load deflection. The membranes are made of PECVD silicon-rich nitride and low stress nitride films. The mechanical performance of the bended membranes is examined both with an...
Conference Paper
Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University...
Conference Paper
Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University...
Conference Paper
The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innov...
Conference Paper
Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University...
Conference Paper
The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innov...
Article
This work reports the development of a micro thermoelectric generator based on planar technology using electrochemical deposited process with constantan and copper thermocouples on a micromachined silicon substrate. This configuration was selected because it can be manufactured into large area, flexible substrates, and the selected materials can be...
Article
Full-text available
This work reports the development and the characterization of a microthermoelectric generator (μTEG) based on planar technology using electrochemically deposited constantan and copper thermocouples on a micro machined silicon substrate with a SiO2/Si3N4/SiO2 thermally insulating membrane to create a thermal gradient. The μTEG has been designed and...
Article
The support and cooling structures add important contributions to the thickness, in radiation length, of vertex detectors. In order to minimize the material budget of pixel sensors, we developed a new approach to integrate the cooling into the silicon devices. The microchannels are formed in silicon using isotropic SF6 plasma etching in a DRIE (dee...
Conference Paper
This study describes the design, simulation, and micro fabrication of a micro thermoelectric generator (μTEG) based on planar technology using constantan (CuNi) and copper (Cu) thermocouples deposited electrochemically (ECD) on silicon substrate. The present thin film technology can be manufactured into large area and also on flexible substrate wit...
Conference Paper
Full-text available
Abstract–The paper presents preliminary results on Au-Au and Ag-Ag thermocompression bonding at low temperature. For both materials, sample structures have been prepared and different bonding conditions experimented. Results are compared in order to evaluate Au and Ag bond strength and to establish the optimum parameters. Shear tests were performed...
Article
The development of a prototype microsystem for measuring the pH, i.e. H<sup>+</sup> ion concentration of an aqueous electrolytic solution is described which has a resolution higher than 1/20 of pH. The microsystem is composed of an ion sensitive field effect transistor (ISFET) sensor coupled with a CMOS read-out channel capable of providing a low-i...
Article
Temperature effects on ion-sensitive field-effect transistor (ISFETs) are investigated both from theoretical and experimental point of view. An ISFET model has been implemented into a modified version of SPICE and the effects of temperature on the device behaviour over a user-defined range of pH and temperature have been simulated. The simulated an...

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Project (1)
Project
Reduce the learning curve of the microfabrication technologies. Improve the knowledge reuse in the microfabrication process