Misa Hayashida

National Research Council Canada | NRC · Nanotechnology Research Center

We explore the properties of elastic and inelastic scattering in a thick organic specimen, together with the mechanisms that provide contrast in a transmission electron microscope (TEM) and scanning-transmission electron microscope (STEM). Experimental data recorded from amorphous carbon are used to predict the bright-field image intensity, mass-th...

CAD drawings for V-groove and A-type column frame.

Electronic version of Fig 13 and 14 for NanoMi: An Open Source Electron Microscope Hardware and Software Platform. 10.1016/j.micron.2022.103362,

We outline a public license (open source) electron microscopy platform, referred to as NanoMi. NanoMi offers a modular, flexible electron microscope platform that can be utilized for a variety of applications, such as microscopy education and development of proof-of-principle experiments, and can be used to complement an existing experimental appar...

Bright-field transmission electron microscope (BFTEM) images exhibit spurious image intensity in the vacuum near the sample edge. The spurious intensity gradually decreases with increasing distance from the sample edge. By taking into account angular and energy loss distribution of the scattered electrons and lens aberrations, we can explain the or...

The higher order structure of the metaphase chromosome has been an enigma for over a century and several different models have been presented based on results obtained by a variety of techniques. Some disagreements in the results between methods have possibly arisen from artifacts caused during sample preparation such as staining and dehydration. T...

Energy-filtering transmission electron microscopy (TEM) and bright-field TEM can be used to extract local sample thickness $t$ and to generate two-dimensional sample thickness maps. Electron tomography can be used to accurately verify the local $t$ . The relations of log-ratio of zero-loss filtered energy-filtering TEM beam intensity ( $I_{{\rm ZLP...

Our understanding of the inner structure of metaphase chromosomes remains inconclusive despite intensive studies using multiple imaging techniques. Transmission electron microscopy has been extensively used to visualize chromosome ultrastructure. This review summarizes recent results obtained using two transmission electron microscopy-based techniq...

It is well known that two DNA molecules are wrapped around histone octamers and folded together to form a single chromosome. However, the nucleosome fiber folding within a chromosome remains an enigma and the higher-order structure of chromosomes also is not understood. In this study, we employed electron diffraction (ED) which provides a non-invas...

Electron tomography (ET) has been used for quantitative measurement of shape and size of objects in three dimensions (3D) for many years. However, systematic investigation of repeatability and reproducibility of ET has not been evaluated in detail. To assess the reproducibility and repeatability of a protocol for measuring size and three-dimensiona...

In this paper, we review the current state of phase plate imaging in a transmission electron microscope (TEM). We focus especially on the hole-free phase plate (HFPP) design, also referred to as the Volta phase plate (VPP). We discuss the implementation, operating principles and applications of phase plate imaging. We provide an imaging theory that...

We are developing a modular (scanning) transmission electron microscope (S)TEM, referred to as NanoMi.

Higher-order Structure of Human Chromosomes Observed by Electron Tomography and Electron Diffraction - Misa Hayashida, Rinyaporn Phengchat, Darren Homeniuk, Marek Malac, Ken Harada, Tetsuya Akashi, Nobuko Ohmido, Kiichi Fukui

NanoMi: An Open Source (Scanning) Transmission Electron Microscope. - Marek Malac, Martin Cloutier, Mark Salomons, Sean Chen, Suliat Yakubu, Marcus Leeson, Jason Pitters, Doug Vick, Drew Price, Darren Homeniuk, Misa Hayashida, Ray Egerton

Substrate expansion/shrinkage makes it difficult to measure accurately the thermal expansion coefficient (TEC) of thin films. Furthermore, even very thin contamination layers can affect TEC measurements. We excluded the effects of contamination, quantified the effect of substrate, and succeeded in measuring the TEC of suspended single-layer graphen...

We present progress toward the quantitative interpretation of phase contrast images obtained using a hole-free phase plate (HFPP) in a transmission electron microscope (TEM). We consider a sinusoidal phase grating test object composed of ~5 nm deep groves in a ~13 nm thick amorphous silicon membrane. The periodic grating splits the beam current int...

The chromosome scaffold is considered to be a key structure of the mitotic chromosome. It plays a vital role in chromosome condensation, shaping the X-shaped structure of the mitotic chromosome, and also provides flexibility for chromosome movement during cell division. However, it remains to be elucidated how the chromosome scaffold organizes the...

While electron tomography can be used to visualize objects at nanoscale, it is difficult to perform reproducible quantitative measurements. Here we measure the shape and size of nanoparticles (NPs) in three dimensions (3D) using electron tomography. We evaluated the accuracy of maximum Feret diameter (Feretmax), minimum Feret diameter (Feretmini) a...

In-Situ Mass Thickness Calibrations Using MWCNTs - Volume 25 Supplement - M. Malac, D. Homeniuk, M. Hayashida, T. Fujii, T. Yaguchi, R.F. Egerton

We report, for the first time, the three dimensional reconstruction (3D) of a transistor from a microprocessor chip and roughness of molecular electronic junction obtained by electron tomography with Hole Free Phase Plate (HFPP) imaging. The HFPP appears to enhance contrast between inorganic materials and also increase the visibility of interfaces...

Toward Quantitative Bright Field TEM Imaging of Ultra Thin Samples - Volume 24 Supplement - Takashi Fujii, Marek Malac, Emi Kano, Misa Hayashida, Toshie Yaguchi, Ray Egerton

Automation of Image Processing for Nano-beam Diffraction Measurements - Volume 24 Supplement - Darren Homeniuk, Francisco Paraguay Delgado, Marek Malac, Misa Hayashida

Hole Free Phase Plate Electron Tomography in Material Sciences - Volume 24 Supplement - Misa Hayashida, Amin Morteza Najarian, Richard McCreery, Marek Malac

Hole-Free Phase Plate Imaging of a Phase Grating - Volume 24 Supplement - Marek Malac, Misa Hayashida, Ken Harada, Keiko Shimada, Kodai Niitsu, Teddy Rowan, Marco Beleggia

Continuous Wavelet Transforms for Measuring Roughness of Nanoscale Interfaces - Volume 24 Supplement - Darren Homeniuk, Marek Malac, Misa Hayashida

Interface roughness is a critical parameter determining the performance of semiconductor devices. We show that a continuous wavelet transform is useful to describe not only the magnitude of the interface roughness, but also the spatial frequencies that describe the interface. We propose a simple presentation of the results that makes it convenient...

We report application of hole-free phase plate (HFPP) to imaging of magnetic skyrmion lattices. Using HFPP imaging, we observed skyrmions in FeGe, and succeeded in obtaining phase contrast images that reflect the sample magnetization distribution. According to the Aharonov-Bohm effect, the electron phase is shifted by the magnetic flux due to sampl...

We measured the linear thermal expansion coefficients of amorphous 5-30 nm thick SiN and 17 nm thick Formvar/Carbon (F/C) films using electron diffraction in a transmission electron microscope. Positive thermal expansion coefficient (TEC) was observed in SiN but negative coefficients in the F/C films. In case of amorphous carbon (aC) films, we coul...

We developed a sample preparation method for 3D electron tomography using a focus-ion-beam-fabricated carbon square-shaped rod to observe the deformation of polystyrene nanoparticles on carbon. The method enables the observation of the interface between the particles and carbon substrate. Polystyrene nanoparticles are increasingly more deformed as...

Hole-Free Phase Plate Energy Filtering Imaging of Graphene: Toward Quantitative Hole-Free Phase Plate Imaging in a TEM - Volume 23 Issue S1 - Marek Malac, Emi Kano, Misa Hayashida, Masahiro Kawasaki, Sohei Motoki, Ray Egerton, Isamu Ishikawa, Yoshio Okura, Marco Beleggia

Temperature Measurement in a TEM using Electron Diffraction of Amorphous Films - Volume 23 Issue S1 - Misa Hayashida, Kai Cui, Marek Malac

Detailed simulations are necessary to correctly interpret the charge polarity of electron beam irradiated thin film patch. Relying on systematic simulations we provide guidelines and movies to interpret experimentally the polarity of the charged area, to be understood as the sign of the electrostatic potential developed under the beam with referenc...

We present a review of the recent progress in electron tomography applicable to materials science samples. We focus on practical high accuracy tomographic measurements and their applications. We follow the steps leading to a reconstructed 3D volume and discuss the effect of the individual steps on the suitability of the resulting 3D volume for quan...

div class="title">Tomographic measurement of buried interface roughness - Volume 21 Issue S3 - Misa Hayashida, Shinichi Ogawa, Marek Malac

div class="title">Three Dimensional Accurate Morphology Measurements of Polystyrene Standard Particles on Silicon Substrate by Electron Tomography - Volume 21 Issue S3 - Misa Hayashida, Kazuhiro Kumagai, Marek Malac

div class="title">High-accuracy electron tomography of semiconductor devices - Volume 21 Issue S3 - Misa Hayashida, Lina Gunawan, Marek Malac, Chris Pawlowicz, Martin Couillard

The authors demonstrate that electron tomography allows accurate measurement of roughness of buried interfaces in multilayer samples. The method does not require the interface to be exposed at the surface of the sample, or does it require a laterally extended sample. Therefore, it enables quantitative site specific analysis of individual elements w...

Electron tomography is a method whereby a three-dimensional reconstruction of a nanoscale object is obtained from a series of projected images measured in a transmission electron microscope. We developed an electron-diffraction method to measure the tilt and azimuth angles, with Kikuchi lines used to align a series of diffraction patterns obtained...

of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

We deposited tungsten-based pillars on ~300 nm-thick amorphous carbon and single-crystalline silicon substrates by a helium ion microscope (HIM) using tungsten hexacarbonyl (W(CO)6) as a gaseous precursor. We then investigated beam-induced damage to the substrates correlated with both pillar growth rate and material type of substrates. Faster pilla...

The authors use a helium ion microscope (HIM) equipped with a tungsten hexacarbonyl gas injection system (GIS) to form tungsten-based pillars on carbon and silicon substrates by helium ion beam-induced deposition. Tungsten-based pillars with a width of ∼40 nm and height of ∼2 μm (aspect ratio of ∼50) are successfully fabricated using the HIM-GIS me...

Tungsten nanodots formed in a helium-ion microscope (HIM) provide a practical means of aligning markers of electron tomography tilt series with a high degree of precision. The nanodots were formed using a HIM equipped with a W(CO)6 gas injection system, enabling the precise placement of the nanodots at desired locations of a sample. Template matchi...

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

We formed nano-dots using a helium ion microscope (HIM) equipped with a gas injection system. Because of position controllability, the nano-dot markers could be placed efficiently on a specimen using the HIM. The sizes of the dots were controlled by changing the beam radiation time. We tried for the first time to form dots on a rod-shaped specimen...

This paper describes the calibration method of the tilt and azimuth angles of specimen using a digital protractor and a laser autocollimator for alignment of electron tomography. It also suggests an easy method to check whether the specimen is tilted by 180.0°, and whether the azimuth angle is 0.0°; the method involves the use of two images of a ro...

of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

In this study, we present a new method for placing markers for alignment of tomographic tilt-series of rod-shaped specimen before 3D reconstructions. By this method, markers (gold nanoparticles) were placed only on the carbon layer (referred to as the "marker area") deposited for protecting the specimen surface against ion beam irradiation; this pl...

This paper describes a method for automatic acquisition of a high-resolution transmission electron microscope (TEM) tilt series over the full angular range from -90° to +90° for TEM tomography. The goniometer controller of a conventional TEM was modified to allow external computer control over specimen position along the three translational and one...

An automatic coarse-alignment method for a tilt series of rod-shaped specimen collected with a full angular range (from alpha=-90 degrees to +90 degrees, alpha is the tilt angle of the specimen) is presented; this method is based on a cross-correlation method and uses the outline of the specimen shape. Both the rotational angle of the tilt axis and...

Transmission electron microscope (TEM) is one of the most useful tools for atomic-level characterization; however, it is not user-friendly because the condition of the electron beam in TEM changes every time it is started, that is, the reproducibility of the condition is insufficient. One of the reasons for the insufficient reproducibility is the m...

A computer-assisted minimal-dose system has been developed for the high-resolution observation of radiation-sensitive samples using a transmission electron microscope (TEM). This system consists of a CCD camera, a beam blanker and a control computer (PC) that also controls the TEM. A sample is illuminated by an electron beam only when the CCD camer...

We have newly installed an electric field electron beam blanker in a transmission electron microscopy, which chops an electron beam very quickly without the effect of hysteresis. The electric field, which is generated by the electron beam blanker, deflects the electron beam, and the electron beam is intercepted by an aperture. The response time of...

The decay of the electron diffraction intensity of a copper–phthalocyanine crystalline film was quantitatively measured at room temperature by transmission electron microscopy (TEM) as a function of current density and beam diameter. The measurements revealed that the critical dose increases with decreasing current density, decreasing beam diameter...