Menglun Zhang

Menglun Zhang
Tianjin University | tju · Department of Precision Instrument Engineering

Ph.D

About

71
Publications
10,997
Reads
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410
Citations
Citations since 2016
62 Research Items
400 Citations
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2016201720182019202020212022020406080100
Introduction
My research work focuses on piezoelectric thin-film (MEMS) devices and their applications as sensors, actuators and electronics. I believe that good work requires restriction (work like a bookkeeper), imagination (think like a poet), passion (cheer like a football fan) and devotion (focus for decades). I also enjoy being a mentor teaching students, instead of being a pedant teaching courses.
Additional affiliations
June 2015 - present
Tianjin University
Position
  • Professor (Assistant)

Publications

Publications (71)
Article
Full-text available
Eye blinking is closely related to human physiology and psychology. It is an effective method of communication among people and can be used in human–machine interactions. Existing blink monitoring methods include video-oculography, electro-oculograms and infrared oculography. However, these methods suffer from uncomfortable use, safety risks, limit...
Article
This letter presents a piezoelectric tuning fork resonator vibrating in in-plane flexural mode with a high quality factor (Q) and low motional impedance. A novel double-sided actuating design is implemented based on unimorph structure with a 2.5- $\mu \text{m}$ -thick AlN film as passive layer. The design significantly improves the Q and motional...
Article
Full-text available
Wireless power transfer is one of the enabling technologies for powering implantable biomedical devices. Biocompatibility and CMOS compatibility of wireless power transfer devices are highly desired due to safety and footprint concerns. Toward implantable applications, this paper presents an ultrasound-induced wireless power supply based on AlN pie...
Article
One of the key requirements of MEMS speakers is to increase sound pressure level (SPL) while keeping the size as small as possible. In this paper we present a MEMS speaker based on piezoelectric bimorph cantilevers, providing higher SPL than conventional unimorph cantilever based speakers. The active diaphragm size is 1.4 mm×1.4 mm and the bimorph...
Article
Sensitivity is a key parameter for microspeakers, especially in low-power applications such as consumer electronics, medical devices and Internet of Things. However, the sensitivities of most reported piezoelectric MEMS speakers are inferior to those of commercially available electrodynamic speakers. Design of high-sensitivity piezoelectric MEMS sp...
Article
Cardiac auscultation is an orthodox method to prevent and diagnose cardiovascular diseases. Traditional stethoscopes cannot offer a highly reliable diagnosis, and electronic stethoscopes suffer from low signal-to-noise ratio (SNR) and high cost. This paper reports an electronic stethoscope based on piezoelectric bimorph MEMS transducers for cardiac...
Article
This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer (PMUT) for detection and imaging of surface stains. A 508 kHz PMUT array is designed, fabricated, and characterized in terms of its electrical and acoustic properties, and it is used in a pulse echo validation test. Imaging of stains on metal blocks is successfully...
Article
The development of Internet of Things (IoT) requires demanding accurate and low-power indoor localization. In this article, a high-precision 3-D ultrasonic indoor localization system with ultralow power is proposed. A new piezoelectric micromachined ultrasonic transducer (PMUT) chip with a slotted membrane is designed and fabricated as a receiver,...
Article
The heartbeat is one of the main human physiological activities and is closely related to psychological and physiological states. Since limited solutions exist for convenient heart rate measurements at the fingertip, such as photoplethysmography, this paper provides an alternative solution enabled by a piezoelectric micromachined ultrasonic transdu...
Article
As $a$ common and natural activity of human beings, eye movement has been regarded as an indicator of human physiological and psychological health; eye movement tracking has been applied to $a$ wide range of domains, such as disease diagnostics, drug therapy testing and human-computer interaction. Conventionally, eye movement is captured by thr...
Article
Developing miniature smart electrochemical sweat sensors to perform continuous and noninvasive health diagnosis at molecule level is in the spotlight. Sensor's biofoulings hinder the targets' approaching, decreasing the detection sensitivity over time and further limiting the accurate analysis. Effective cleaning to remove biofoulings on electroche...
Article
This paper investigates the mechanism of a new acoustic micro-ejector using a Lamb wave transducer array, which can stably generate picoliter (pL) droplet jetting without nozzles. With eight transducers arranged as an octagon array, droplets are ejected based on the mechanism of combined acoustic pressure waves and acoustic streaming. The acoustic...
Article
Full-text available
Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity. An optimized ultrathin multilayer stack was implemented to realize the proposed device. It is experim...
Article
This article proposes a novel structured aluminum nitrate (AlN) thin film based piezoelectric micromachined ultrasonic transducer (PMUT) with superior ultrasonic performances that can directly be applied for pulse-echo imaging. The bottom electrode of the PMUT is thickened and serves both as the electrical layer and supporting layer. Large numbers...
Article
This paper reports a multi-spectral infrared chemical sensor based on a virtual array of bulk acoustic wave resonators with different frequencies. The plasmonic metasurfaces with different patterns on the top surface of resonators provide high IR absorption without degradation of resonating performance. The metasurfaces enhance the frequency respon...
Article
Performance of electroanalytical lab-on-a-chip devices is often limited by the mass transfer of electroactive species towards the electrode surface, due to the difficulty in applying external convection. This article describes the powerful signal enhancement attained with a 2.54 GHz miniature acoustic resonator integrated with an electrochemical de...
Article
Full-text available
In this work, a monolithic oscillator chip is heterogeneously integrated by a film bulk acoustic resonator (FBAR) and a complementary metal-oxide-semiconductor (CMOS) chip using FlexMEMS technology. In the 3D-stacked integrated chip, the thin-film FBAR sits directly over the CMOS chip, between which a 4 μm-thick SU-8 layer provides a robust adhesio...
Article
This paper presents a 429 MHz flexible Lamb wave resonator based on lithium niobate thin films with a high figure of merit (FoM) of 205, which is about 10 times higher than the FoM of the flexible resonator presented in our previous work. The measured corresponding quality factor (Q) and electromechanical coupling coefficient (Kt²) are 1268 and 16....
Article
Full-text available
The health effects of suspended particulate matter (PM) in the air are well documented; however, there is a lack of convenient tools to recognize and quantify PM onsite. Here, we design and fabricate a portable PM analysis system to realize onsite aerosol particle analysis. The system contains a micromachined virtual impactor (VI), a thermophoretic...
Article
This paper describes the detection and discrimination of volatile organic compounds (VOCs) using an e-nose system based on a multiparameter virtual sensor array (VSA), which consists of a single-chip temperature-compensated film bulk acoustic wave resonator (TC-FBAR) coated with 20-bilayer self-assembled PSS / PDDA thin films. The high-frequency an...
Article
Due to their easy, fast, and noninvasive natures, acoustic wave methods have been widely used in the physical property measurements of liquids, such as shear waves for viscosity and ultrasound for density. We investigate the physical interaction between approximately GHz longitudinal acoustic waves and simple Newtonian fluids in micro- and nanoscal...
Article
Full-text available
Rapid and reliable micromixing requires continuous improvement to renovate more powerful microfluidics chip for chemosynthesis, biological assay, and drug purification. In this work, we realized rapid in-situ mixing in droplets on a closed electro-microfluidic chip. Electrowetting and 2.5 GHz acoustic wave streaming were coupled into a monolithic c...
Article
As bendable, conformal electronic components, flexible gigahertz resonators are in demand as important building blocks (e.g., oscillators, filters, and signal processors) in future flexible radio‐frequency electronics for efficient wireless communication. Here, a 2.7 GHz piezoelectric thin‐film resonator (i.e., film bulk acoustic wave resonator) is...
Article
For point-of-care applications, integrating sensors into a microfluidic chip is a nontrivial task, since conventional detection modules are bulky and microfluidic chips are small in size, and their fabrication processes are not compatible. In this work, a solid-state microfluidic chip with on-chip acoustic sensors using standard thin-film technolog...
Article
Full-text available
In designing bioassay systems for low-abundance biomolecule detection, most research focuses on improving transduction mechanisms while ignoring the intrinsically fundamental limitations in solution: mass transfer and binding affinity. We demonstrate enhanced biomolecular surface binding using an acoustic nano-electromechanical system (NEMS) resona...
Article
We report the nonlinear acoustic streaming effect and the fast manipulation of microparticles by microelectromechanical Lamb-wave resonators in a microliter droplet. The device, consisting of four Lamb-wave resonators on a silicon die, generates cylindrical traveling waves in a liquid and efficiently drives nine horizontal vortices within a 1−μl dr...
Article
Full-text available
In article number 1703644, Menglun Zhang, Wei Pang, and co‐workers redefine miniaturized radio‐frequency filters by transforming them into the flexible electronics realm. They propose a new technology, FlexMEMS, to fabricate the flexible electronic chip, which shows comparable electrical performance with commercial “rigid” chips besides its high me...
Article
This paper introduces an on-chip acoustic graphene transistor based on lithium niobate thin film. The graphene transistor is embedded in a microelectromechanical systems (MEMS) acoustic wave device, and surface acoustic waves generated by the resonator induce a macroscopic current in the graphene due to the acousto-electric (AE) effect. The acousti...
Article
Full-text available
This paper presents a flexible radiofrequency filter with a central frequency of 2.4 GHz based on film bulk acoustic wave resonators (FBARs). The flexible filter consists of five air‐gap type FBARs, each comprised of an aluminum nitride piezoelectric thin film sandwiched between two thin‐film electrodes. By transfer printing the inorganic film stru...
Conference Paper
Full-text available
This paper presents a flexible film bulk acoustic resonator (FBAR) with superior mechanical flexibility and electrical performance. The quality factor and effective coupling coefficient of the flexible FBAR are 1108 and 5.0%, respectively. The resonator can be bent to a minimal radius of 0.5 mm with little electrical performance degradation. Additi...
Article
Full-text available
This paper reports an on-chip acoustic sensor comprising a piston-mode film bulk acoustic resonator and a monolithically integrated nanochannel. The resonator with the channel exhibits a resonance frequency (f) of 2.5 GHz and a quality (Q) factor of 436 in deionized water. The f × Q product is as high as 1.1 × 10¹², which is the highest among all t...
Article
In this work, we presented a thin-film piezoelectric acoustic gas sensor with enhanced sensitivity by a surface modification strategy of oxygen plasma treated graphene oxide (GO) functionalization. By exposing to ammonia vapor (NH3) of various concentrations at controlled temperature and humidity, the characteristics of the GO-coated acoustic senso...
Conference Paper
Full-text available
In this paper, we fabricated a hybrid on-chip acoustic and field-effect device to investigate the acoustic carrier transportation in graphene. The device fabrication exploited aluminum nitride (AlN)-based surface micromachining process on a silicon wafer, facilitating an integration of a surface acoustic wave (SAW) delay line and a graphene field-e...
Article
Full-text available
In this paper, a 2.6 GHz air-gap type thin film piezoelectric MEMS resonator was fabricated on a flexible polyethylene terephthalate film. A fabrication process combining transfer printing and hot-embossing was adopted to form a free-standing structure. The flexible radio frequency MEMS resonator possesses a quality factor of 946 and an effective c...
Article
Full-text available
This paper reports an uncooled infrared (IR) detector based on a micromachined piezoelectric resonator operating in resonant and resistive dual-modes. The two sensing modes achieved IR responsivities of 2.5 Hz/nW and 900 μdB/nW, respectively. Compared with the single mode operation, the dual-mode measurement improves the limit of detection by two o...
Article
Full-text available
We report on Lamb wave resonators (LWRs) on a flexible substrate made of polyethylene terephthalate (PET) by transferring method. LWRs with three different topologies were fabricated on the same silicon wafer and then were transferred simultaneously to a flexible substrate with air cavities using a polydimethylsiloxane (PDMS) stamp. The resonators...
Article
We fabricated a hybrid on-chip acousto-electric (AE) and field-effect device to investigate the modulation of acoustic carrier transportation by gate voltage. The device fabrication exploited a surface micromachining aluminum nitride process on a silicon wafer, facilitating an integration of a surface acoustic wave(SAW) delay line and a graphene fi...
Chapter
This chapter reports on the state of the art of piezoelectric micro-/nano-mechanical devices in frequency control and sensing applications. Recent studies on bulk acoustic wave (BAW) devices are introduced, including investigation of high-coupling materials and filter and oscillator designs. A novel class of frequency devices based on Lamb waves is...
Article
We developed a wireless and passive piezoelectric resonant sensor for contimuous volatile organic compound detection. An equivalent circuit is proposed to model the sensing system, and Lamb wave resonators are adopted to demonstrate the wireless interrogation achieved by near-field inductive coupling. The wireless sensing system is employed to moni...
Article
Due to its ability to manipulate droplets flexibly, electrowetting-on-dielectric (EWOD) based digital microfluidics have been widely researched. This paper focuses on the design principles of improved open EWOD based digital microfluidics actuators. EWOD devices of different electrode formation were fabricated and tested. Based on the analysis and...
Conference Paper
Full-text available
This paper demonstrates a micro-total-analysis-system (Micro TAS) integrating eletrowetting-on dielectric (EWOD) droplet actuator with solidly mounted resonator (SMR) biosensor array, where biosensors in high spatial density are functionalized with different bioreceptors automatically. The platform is dedicated to high-throughput detection of biolo...
Conference Paper
Full-text available
This work reports our studies on the kinetic issues of local adsorption via experimental investigations and theoretical analysis on hydrophobic surface masked piezoelectric microelectromechanical film bulk acoustic resonator (FBAR) mass sensor. Enhanced limit of detection (LOD) of the hydrophobic masked sensor has been demonstrated with Hg 2+ and I...
Article
Full-text available
A quantitative description of the dynamics of droplet motion has been a long-standing concern in electrowetting research. Although many static and dynamic models focusing on droplet motion induced by electrowetting-on-dielectric (EWOD) already exist, some dynamic features do not fit these models well, especially the dynamic saturation phenomenon. I...