Maxim Yu. Maximov

Maxim Yu. Maximov
Peter the Great St.Petersburg Polytechnic University | SPBSTU · Department of Material Science and Technology

PhD
Guest Editor of Special Issue "Atomic Layer Deposition of Oxide Thin Films"

About

75
Publications
10,117
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411
Citations
Citations since 2016
69 Research Items
411 Citations
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2016201720182019202020212022020406080100
2016201720182019202020212022020406080100
2016201720182019202020212022020406080100

Publications

Publications (75)
Article
Full-text available
In this work, we proposed a method for creating an Ag/Si composite structure consisting of an array of vertical silicon nanowires (SiNWs) decorated with silver nanoparticles (AgNPs). A two-stage metal-assisted chemical etching of Si was used to obtain the SiNW array, and atomic layer deposition was used to fabricate the AgNPs. A uniform distributio...
Article
Full-text available
This work investigated the possibility of increasing the cycle life and rate capability of silicon anodes, made of macroporous membranes, by adding fluoroethylene carbonate (FEC) to the complex commercial electrolyte. It was found that FEC leads to a decrease in the degradation rate; for a sample without FEC addition, the discharge capacity at the...
Article
Full-text available
Nowadays, lithium-ion batteries (LIBs) are one of the most convenient, reliable, and promising power sources for portable electronics, power tools, hybrid and electric vehicles. The characteristics of the positive electrode (cathode active material, CAM) significantly contribute to the battery’s functional properties. Applying various functional co...
Article
Full-text available
The paper presents a study of a large-area field emitter based on a composite of vertically aligned carbon nanotubes covered with a continuous and conformal layer of nickel oxide by the atomic layer deposition method. The arrays of carbon nanotubes were grown by direct current plasma-enhanced chemical vapor deposition on a pure Si substrate using a...
Article
The formation of hybrid structures for creating sensitive sensors is a difficult task. In this study, we developed a facile technique of semiconductor technology to fabricate hybrid structures based on SiO2/embedded Ag/Si and embedded Ag/Si for a surface-enhanced Raman scattering. Herein, our hybrid structures were created in one technological cycl...
Article
Full-text available
Thin-film Li-ion batteries produced by precise thickness control atomic layer deposition (ALD) method are promising, safe, and high-energy density sources for miniature devices. The paper presents a detailed analysis of the multilayer thin film cathode for microbatteries. Structures were obtained by combining several technological parameters to inc...
Article
Transition Metal Oxides/Carbon Cloth Hybrids were synthesized by electrochemical method using non-stationary electrolysis. The morphology and surface structure of the developed hybrids were studied using scanning electron microscopy and transmission electron microscopy. According to X-ray spectral microanalysis, the main elements of hybrid oxide co...
Article
Full-text available
Here, we study an effect of FEC addition to TC-E918 electrolyte on the electrochemical performance of Si/C negative electrodes. The anodes were fabricated from nanosilicon powder coated with a carbon shell by means of a standard slurry technique. The low-temperature reduction of fluorocarbon on the surface of Si nanoparticles was used to form the s...
Article
Full-text available
Compositional and structural engineering of high-performance catalysts is vital for electrochemical catalysis, but challenges remain in their facile synthesis and efficient controls. Herein, a novel vaporization-nitridation synthesis strategy with simple operation is developed to prepare hierarchically porous cobalt nitride hybrid nanosheets grown...
Article
Full-text available
The combination of titania nanofilms and silver nanoparticles (NPs) is a very promising material, with antibacterial and osseointegration-induced properties for titanium implant coatings. In this work, we successfully prepared TiO2 nanolayer/Ag NP structures on titanium disks using atomic layer deposition (ALD). The samples were studied by scanning...
Article
Исследован процесс формирования тонких пленок системы Ni–Mn–O методом молекулярного наслаи- вания при эквивалентном напуске металлоорганических реагентов. В качестве исходных реагентов использовались бис(циклопентадиенил)никеля (NiCp2) и трис(2,2,6,6-тетраметил-3,5-гептандионато)- марганца(III) [Mn(thd)3], для формирования кислородсодержащих структ...
Article
Full-text available
Titanium oxide nanocoatings were synthesized on the surface of monocrystalline silicon and ultra-fine-grained titanium by atomic layer deposition (ALD) using titanium tetrachloride (TiCl4) and titanium tetraisopropoxide (TTIP). The morphology of the samples was studied by scanning electron microscopy (SEM) and transmission electron microscopy (TEM)...
Article
Full-text available
Titanium oxide is commonly considered as an effective catalyst for photo-electrochemical water splitting due to its low cost, high activity, and perfect stability. However, a wide bandgap of TiO2 prevents the utilization of visible and near-infrared photons in the photo-electrochemical process. Photosensitization of TiO2 with plasmon active nanostr...
Article
Li-rich oxides are materials shows a high specific discharge capacity which is achieved through a special charging procedure called activation. Still, these materials have the following disadvantages: a short cycle life and a drop of average discharge voltage. This paper describes the synthesis of Li1.2Ni0.13Co0.13Mn0.54O2 (LMR) and its 5 at.%. K d...
Article
Temperature conditions are significant for the crystal structure formation of prospective cathode materials, determining their further performance and cycle life. The paper presents the results of a detailed analysis of the multilayer thin films before and after heat treatment. The investigated multilayer structures consist of a two-layer system of...
Article
Full-text available
Thin-film solid-state lithium-ion batteries (SSLIBs) are promising power supplies for small-scale electronics, particularly for Internet of Things (IoT) devices, sensors, microchips, and others. Transition metal oxides have potential for application in SSLIBs due to their high theoretical capacity. In this work, films of mixed nickel and aluminum o...
Article
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Temperature dependent Raman spectromicroscopy from rutile TiO2 nanorods has been studied here to understand the effect of thermal perturbations on different Raman active phonon modes. The TiO2 nanorods, characterized using...
Article
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Exploring highly-efficient, economical and environment friendly electrocatalysts towards hydrogen and oxygen evolution reaction (HER and OER) is necessary but challenging for water splitting. Herein, FeS2 nanoparticles were anchored on the...
Article
One of the most promising technologies for increasing the safety and durability of solid- state batteries (SSB) is nano-coating between electrodes and electrolytes. The paper presents the results of a detailed microscopic and electrochemical analysis of multilayer thin films. The investigated multilayer structures consist of a two-layer system of a...
Article
Used cigarette filters, a waste material and a major source of land pollution, has been used as a raw material to study the nature of condensed tobacco smoke (tar) using microscopy, optical, IR, photoluminescence and Raman spectroscopy as well as X-ray diffraction and electron & fluorescence microscopy. The tar present in the cigarette filter bud h...
Article
Effect of oxidizer, present in the etching solution, on the surface morphology and microstructure obtained after porosification of p-type silicon wafer using metal assisted chemical etching has been studied here. The morphologies of Si wafers porosified using two different solutions namely HF/ H2O2 and HF/KMnO4 have been compared to establish how e...
Article
Full-text available
The tantalum oxide thin films are promising materials for various applications: as coatings in optical devices, as dielectric layers for micro and nanoelectronics, and for thin-films solid-state lithium-ion batteries (SSLIBs). This article is dedicated to the Ta-O thin-film system synthesis by the atomic layer deposition (ALD) which allows to depos...
Article
Full-text available
Nanostructured metal oxides (MOs) demonstrate good electrochemical properties and are regarded as promising anode materials for high-performance lithium-ion batteries (LIBs). The capacity of nickel-cobalt oxides-based materials is among the highest for binary transition metals oxide (TMOs). In the present paper, we report the investigation of Ni-Co...
Article
Full-text available
In this work, we study the influence of the surface properties of ultrafine grained (UFG) and coarse grained (CG) titanium on the morphology, viability, proliferation and differentiation of osteoblast-like MG-63 cells. Wet chemical etching in H2SO4/H2O2 and NH4OH/H2O2 solutions was used for producing surfaces with varying morphology, topography, co...
Conference Paper
Full-text available
Energy density is one of the essential characteristics of thin-film power sources which provides the duration of the autonomous performance of sensors, energy harvesters, IoT devices, etc. The Atomic layer deposition (ALD) allows the growth of conformal coatings with a controlled composition on high aspect ratio substrates and can be used to manufa...
Conference Paper
Full-text available
Thin-film solid-state lithium-ion batteries can provide autonomous operation of miniature devices (biosensors, smartwatches, medical devices, etc.). In this work, we investigated the processes of obtaining thin films of manganese oxide by atomic layer deposition (ALD), and their electrochemical activity as an anode of a lithium- ion battery (LIBs)....
Conference Paper
Full-text available
In this work substrates able to efficiently perform so-called photo-electrochemical process are proposed. The hybrid substrates consist of a plasmon-active gold structure and a certain number of TiO2 layers deposited by the atomic layer deposition (ALD) method. Above the influence of LED lamp irradiation (λ=850 nm) in the water splitting process, t...
Conference Paper
Full-text available
Thin-film transition metal oxides can be applied as transparent conductive coatings, photocatalysts, thermoelectric generators, and battery electrodes. In power sources application binary transition metal oxides are attractive due to high theoretical capacities. Among them nickel-cobalt oxides possess the highest (NiCoO2, 717mAh/g or 471.4 μAh cm-2...
Conference Paper
Full-text available
Solid-state batteries (SSBs) are regarded as the next step in energy storage technology. One of the main problems in developing such batteries is developing and synthesizing solid-state electrolytes (SSE). The main factor that stops the introduction of SSBs into everyday life is the low ionic conductivity of Li ions in modern SSEs. Therefore, the p...
Article
Full-text available
Lithium nickelate (LiNiO 2) and materials based on it are attractive positive electrode materials for lithium-ion batteries, owing to their large capacity. In this paper, the results of atomic layer deposition (ALD) of lithium-nickel-silicon oxide thin films using lithium hexamethyldisilazide (LiHMDS) and bis(cyclopentadienyl) nickel (II) (NiCp 2)...
Article
Full-text available
The observed downsizing tendency of microelectronic devices leads to a higher demand in new types of miniaturized energy sources. Thin‐film Li‐ion batteries (LiBs) are promising candidates to fulfil this function. New materials and technologies should be investigated for customized production of miniaturized, high‐efficient solid‐state batteries. I...
Article
Li-rich oxides are one of the most promising cathode materials for the new generation of lithium-ion bat- teries (LIBs). This work describes the preparations of Li-rich cathode materials with composition Li1.20Ni0.13Co0.13Mn0.54O2 and the potassium – doped material Li1.15K0.05Ni0.13Co0.13Mn0.54O2. The oxides are synthesized from acetates of metals...
Article
The development of additive manufacturing technology has allowed to begin the implementation of the concept of personalized implants in medicine. Medical implants should have not only mechanical prop- erties close to bone tissue, but also have good biocompatibility, antibacterial and osseointegrating prop- erties. These characteristics are determin...
Article
Tin oxide is the most promising material for thin film anodes of Li-ion batteries due to its cycling performance and high theoretical capacity. It is assumed that lithium-tin oxide can demonstrate even higher performance. Lithium-silicon-tin oxide nanofilms were prepared by atomic layer deposition (ALD), using the lithium bis (trimethylsilyl) amide...
Article
The present study is devoted to the development of perspective cathode (LiNiO2) and anode (lithiated SnO2) of solid-state lithium-ion batteries with the use of atomic layer deposition. The program of synthesis included a different number (ratio, 1/1–1/3) of lithium and metal oxide (Ni, Sn) deposition cycles in one supercycle. Lithium hexamethyldisi...
Conference Paper
Full-text available
The development of micro-and nanoscale power sources for micro size electronic devices such as wireless sensors, biomedical implants, and smart cards is an important task. In this work, the processes of synthesis uniform lithium oxide, cobalt oxide, and lithium cobalt oxide thin films using atomic layer deposition (ALD) method were studied. Lithium...
Conference Paper
Full-text available
Present work is dedicated to the development of lithium-nickel oxide film-positive electrode for solid-state lithium-ion batteries. The formation of electrochemical phase was performed by а two-step process. At first lithium-nickel oxide film was deposited by Atomic Layer Deposition on stainless steel 316SS and silicon wafer at 300 °C. One "supercy...
Article
Lithium-oxygen thin films were deposited by atomic layer deposition (ALD) on the surface of silicon and stainless-steel using lithium bis(trimethylsilyl)amide (LiHMDS) and different counter-reagents (water, ozone, oxygen plasma). The deposited films were non-stable at storage in the air atmosphere. Results of scanning electron microscopy showed tha...
Poster
Full-text available
Currently, individual implantation is one of the leading and actively developed direction in modern medicine (endoprosthetics, intervertebral cages, carnioimplants, etc.). However, most of the full-metal rigid implants fulfil in the body only a structural function. Such full-metal implants have significant disadvantages, such as lack of living bone...
Article
Structural changes in a promising cathode material LiNi0.8Co0.1Mn0.1O2 for lithium-ion batteries were in situ studied by X-ray diffraction analysis in the course of electrochemical reactions. The Rietveld method and TOPAS 5 software package were used to examine changes in the unit cell parameters of LiNi0.8Co0.1Mn0.1O2 and the reasons for these cha...
Article
Full-text available
Atomic layer deposition (ALD) provides a promising route for depositing uniform thin-film electrodes for Li-ion batteries. In this work, bis(methylcyclopentadienyl) nickel(II) (Ni(MeCp) 2) and bis(cyclopentadienyl) nickel(II) (NiCp 2) were used as precursors for NiO ALD. Oxygen plasma was used as a counter-reactant. The films were studied by spectr...
Conference Paper
Full-text available
In recent years atomic layer deposition has proved to be a successful method of fabrication and modification of electrodes for lithium-ion batteries and thin film power sources. Tin oxide demonstrated considerable excellence over currently used materials for thin film batteries anodes, however, lithiated tin oxides are expected to show even better...
Conference Paper
Full-text available
Nowadays the development of nanoscale power sources with a long battery life is required for novel nanoelectronic devices, such as wireless sensors, biomedical implants, smart cards and others. Lithiated metal oxides (Li-Me-O) are widely used in Lithium-ion batteries (LIBs). Depending on the type of metal Li-Me-O can be applied as cathode, anode or...
Conference Paper
Full-text available
Due to the demand for wearable and implantable microelectronic devices (MED), there is a growing interest in the development of thin-film lithium-ion microbatteries (LiBs) with high-energy density. The high cost of production is an issue restraining thin-film LIBs wide application. Inkjet printing is a method of applying materials to the substrate...
Article
In this work, we consider influence of synthesis procedures, applying coatings, and formation of core-shell structures on the electrochemical performance of Ni-rich and Li-rich oxides. Li-rich Li1.2Mn0.54Ni0.13Co0.13O2 cathode materials synthesized by different synthesis procedures exhibit different electrochemical behavior, especially those obtain...
Article
Full-text available
Energy accumulators are one of the key directions of research and applied development in the spheres of power generation, saving and efficiency. Lithium-ion batteries (LIB) are widely used in portable power sources for modern electronics. However, currently the most perspective sphere of their use is transport industry. In this article we discuss t...
Article
The parameters of synthesis by the spray method of cathode materials Li1.2Ni0.13Co0.13Mn0.54O2 and Li1.25Ni0.12Co0.12Mn0.51O2, differing in lithium content were studied. The phase and granulometric composition, the morphology of the powder particles obtained, as well as an influence of temperature, total metal concentration, and pH of the solution...
Article
Full-text available
Carbon-coated silica nanoparticles anchored on multi-walled carbon nanotubes (SiO2@C/MWNT composite) were synthesized via a simple and facile sol-gel method followed by heat treatment. Scanning and transmission electron microscopy (SEM and TEM) studies confirmed densely anchoring the carbon-coated SiO2 nanoparticles onto a flexible MWNT conductive...
Article
Full-text available
In this work, a facile strategy to synthesize oxygen and nitrogen co-doped porous carbon (ONPC) is reported by one-step pyrolysis of waste coffee grounds. As-prepared ONPC possesses highly rich micro/mesopores as well as abundant oxygen and nitrogen co-doping, which is applied to sulfur hosts as lithium/sulfur batteries’ appropriate cathodes. In ba...
Article
Full-text available
A novel hierarchically porous silicon film on Cu foil was fabricated by employing the combination of magnetron sputtering deposition and metal-assisted chemical etching technology. The as-prepared porous Si film were directly used as working electrodes without adding of binder or electron conductive agent, which exhibited high specific capacities a...
Article
In this study, thin films of tin dioxide have been synthesized on substrates of silicon and stainless steel by atomic layer deposition (ALD) with tetraethyl tin and by inductively coupled remote oxygen plasma as precursors. Studies of the surface morphology by scanning electron microscopy show a strong dependence on synthesis temperature. According...
Article
Full-text available
Grain size reduction in cemented carbides leads to higher mechanical properties. Therefore, preventing the grain growth during sintering is a crucial task. This study proposes the application of Al2O3 coatings obtained by atomic layer deposition (ALD) on WC-8Co powder, where Al2O3 is added as a grain growth inhibitor. After deposition, the films we...
Article
The authors deposited thin films of tin oxide on substrates of silicon and stainless steel by using atomic layer deposition (ALD) with tetraethyltin precursors. In this process, the authors used various coreactants such as water, oxygen, remote oxygen plasma, hydrogen peroxide, and ozone. The growth rates of films were studied as functions of the d...
Article
Full-text available
Li-ion batteries (LIBs) are widely used as portable power sources. The development of new electrode materials for LIBs is an important challenge for material science. The application of modern methods and approaches can facilitate the implementation of this task. One of the new methods which can be used for improvement of Li-ion batteries is an ato...
Conference Paper
Due to variety of applications of tin oxide thin films such as solid state gas sensors, solar cells, transparent conductive oxide coatings, catalysts, and anodes for Li-ion batteries, it is desirable to develop convenient and high effective technique of atomic layer deposition for this material. In this paper we consider in details the prospects of...
Article
Lithium-riched cathode material for lithium-ion batteries, Li1.17Ni0.12Co0.13Mn0.58O2, was synthesized via crystallization from a solution of metal acetates, followed by a thermal treatment of the material obtained as a powder. The phase, elemental, and granulometric compositions of the material were examined, as well as the morphology of the powde...
Poster
Full-text available
Atomic layer deposition (ALD, Molecular layering method) allows to deposit different kinds of films on the surface of porous substrates. In spite of long history1 the first works concerning modification of cathode materials appeared several years ago2. The main advantage of ALD is possibility to modify electrodes not on only initial material as it...
Article
Interconnected nitrogen-doped carbon nanofibers (INC) prepared through the carbonization of polypyrrole (PPy) precursor is designed as scaffold to load sulfur. The BET measurement showed that INC possessed abundant mesopores with a relatively high specific surface area and a large total pore volume. The sulfur/INC (S/INC) composite was synthesized...
Article
Thin films of tin(IV) oxide were deposited in a Picosun R-150 installation from tetraethyltin using remote inductively coupled plasma at temperatures lower than 200°C with the aim of developing a material for thin-film current sources. The thickness and morphology of the films were studied by spectral ellipsometry and scanning electron microscopy....
Article
The cyclic stability of thin films (~40 nm) of an anode material based on tin dioxide at charging voltages of 2.5, 1.5, and 0.8 V was studied. The electrodes were prepared on a Picosun R-150 installation using tetraethyltin and remote inductively coupled oxygen plasma.
Article
A study of the Li2FeSiO4/C cathode material doped with Mn demonstrated that introduction of polymethyl methacrylate results in a substantial decrease in the particle size and increase in the specific surface area of the cathode material. Polymethyl methacrylate strongly improves the cyclic stability of the cathode material. The discharge capacity a...