Manfredo Harri Tabacniks

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• PhD
• Professor (Full) at University of São Paulo

This comprehensive study delves into the intricate interplay between protons and organic polymers, offering insights into proton therapy in cancer treatment. Focusing on the influence of the spatial electron density distribution on stopping power estimates, we employed real-time time-dependent density functional theory coupled with the Penn method....

Using multiple ion beam analysis measurements or techniques combined with self-consistent data processing generally allows for extracting more (or more accurate) information than processing data from single measurements separately. Solving ambiguities, improving the final depth resolution, defining constraints and extending applicability are the ma...

Rutherford Backscattering Spectrometry (RBS) is an important technique providing elemental information of the near surface region of samples with high accuracy and robustness. However, this technique lacks throughput by the limited rate of data processing and is hardly routinely applied in research with a massive number of samples (i.e. hundreds or...

With a growing demand for accurate ion beam analysis on a large number of samples, it becomes an issue of how to ensure the quality standards and consistency over hundreds or thousands of samples. In this sense, a virtual assistant that checks the data quality, emitting certificates of quality, is highly desired. Even the processing of a massive nu...

Using multiple ion beam analysis measurements, or techniques, combined with self-consistent data processing, generally allows extracting more (or more accurate) information from the measurements than processing separately data from single measurements. Solving ambiguities, improving the final depth resolution, defining constraints and extending app...

Ion Beam Analysis (IBA) comprises a set of analytical techniques suited for material analysis, many of which are rather closely related. Self-consistent analysis of several IBA techniques takes advantage of this close relationship to combine different Ion Beam measurements in a unique model to obtain an improved characterization of the sample. This...

Ion Beam Analysis (IBA) comprises a set of analytical techniques suited for material analysis, many of which are rather closely related. Self-consistent analysis of several IBA techniques takes advantage of this close relationship to combine different Ion Beam measurements in a unique model to obtain an improved characterization of the sample. This...

Rutherford Backscattering Spectrometry (RBS) is an important technique providing elemental information of the near surface region of samples with high accuracy and robustness. However, this technique lacks throughput by the limited rate of data processing and is hardly routinely applied in research with a massive number of samples (i.e. hundreds or...

A non-destructive standard-free analytical method of obtaining stable isotope ratios in materials using nuclear reactions excited by an 11.75 MeV proton beam is demonstrated for a special ⁶³Cu/⁶⁵Cu target characterized traceably by Rutherford backscattering spectrometry (using 2.2 MeV protons). The method is general and is capable of being a useful...

With a growing demand for accurate ion beam analysis on a large number of samples, it becomes an issue of how to ensure the quality standards and consistency over hundreds or thousands of samples. In this sense, a virtual assistant that checks the data quality, emitting certificates of quality, is highly desired. Even the processing of a massive nu...

This work describes the new facility for applied nuclear physics at the University of Sao Paulo, mainly for irradiation of electronic devices. It is a setup composed of a quadrupole doublet for beam focusing/defocusing plus multiple scattering through gold foils to produce low intensity, large-area, and high-uniformity heavy-ion beams from ¹H to ¹⁰...

Thin titanium oxide films present several interesting properties in the field of electron-hole pair photo-generation. The visible light absorption process has been attributed to TiOx oxygen deficiency, which is induced and stabilized by the hydrogen concentration in the film. In this work, dark Ti(OxH)y films were obtained by DC magnetron reactive...

Single-phased La0.6Sr0.4Co1-yFeyO3-d (y = 0.2, 0.5, 0.8) nanorods exhibiting the rhombohedral perovskite-type phase were synthesized by a pore-wetting technique. We studied their chemical composition, crystal and electronic structures, morphology and hyperfine properties as a function of the Co/Fe content of the samples. Our results demonstrate tha...

Single-phased La0.6Sr0.4Co1-yFeyO3-δ (y = 0.2, 0.5, 0.8) nanorods exhibiting the rhombohedral perovskite-type phase were synthesized by a pore-wetting technique. We studied their chemical composition, crystal and electronic structures, morphology and hyperfine properties as a function of the Co/Fe content of the samples. Our results demonstrate tha...

In this work we present a combined experimental and theoretical study of K-shell ionization by electrons with energies close to the threshold. The ionization cross sections of the K shells of Te, Ta, and Bi atoms have been measured up to 100 keV with uncertainties ranging from 4% to 8%. In turn, calculations have been done using the subconfiguratio...

We report a proof of concept constructing an experimental setup to explore the imaging capability of a single X-ray detector, simulating a pixelated X-ray detector, to measure EDXRF (Energy Dispersive X-ray Fluorescence) and EDXRD (Energy Dispersive X-ray Diffraction) image spectra simultaneously. Combining a conventional rotating anode Cu X-ray so...

This work presents the development of a portable system that allows 2D elemental mapping of large areas (maximum of 35.0 × 35.0 cm2) by XRF. A measuring head, composed of an x-ray source and a detector, is mounted on a 3-axis stage with movement reproducibility better that 0.03 mm. The final elemental map resolution of 1.4 mm was experimentally det...

This work presents some applications of the first Brazilian 2D experimental setup for elemental mapping for large areas with X-ray fluorescence (XRF). This equipment was developed to be a portable system aiming principally the study and analysis of cultural heritage materials (ceramics, paintings, etc.). This setup is of a great interest of the mus...

Reference canvas dataset of the article "A low-cost portable system for elemental mapping by XRF aiming in situ analyses" - P.H.O.V. Campos et al. Applied Radiation and Isotopes, 152, pp. 78–85, (2019). The dataset shows the original spectra to perform elemental mapping in a reference canvas, acquired using the portable system described in the pap...

LAMFI is a laboratory dedicated to the development and application of ion beam techniques for the analysis of bulk materials and thin films. Its main facilities comprise an 1.7MV Pelletron tandem accelerator and two analytical setups, one mainly for Rutherford Backscattering Spectrometry (RBS), and channeling, and another, for Particle Induced X-ra...

Photoluminescence of Nanoporous Anodic Alumina (NAA) films is characterized by an intense and broad band in the blue region when excited in UV, and its origin and mechanisms are still debatable. In this work, the NAA films were prepared by galvanostatic anodization of electropolished Al foils (99.99%) by applying 5 mA/cm2 for 90 min at 20 °C, in th...

The system presented allows simultaneous XRD and XRF measurements of the same spot thus, besides providing elemental identification through X-ray Fluorescence (XRF), it can still identify the atomic plane spacing of the samples. It consists in a Si-PIN (139eV@5.98keV, Amptek) detector collimated to 1 mm diameter, mounted on a computer controlled 20...

We have experimentally determined electronic stopping cross sections of vanadium for 50–2750 keV protons and for 250–6000 keV He ions by relative measurements in backscattering geometry. To check the consistency of the employed procedure we investigate how to define adequate reference stopping cross section data and chose different reference materi...

The elemental mapping of large areas using ion beam techniques is a desired capability for several scientific communities, involved on topics ranging from geoscience to cultural heritage. Usually, the constraints for large-area mapping are not met in setups employing micro- and nano-probes implemented all over the world. A novel setup for mapping l...

This paper focuses on diamond-like carbon (DLC) films for space applications. Specifically, it reports the structure, morphology, adhesion, and the high-vacuum tribological performance of several DLC films with different hydrogen content. DLC films have been studied as a promising solid lubricant since liquid lubricants are ineffective and undesira...

Plasma Electrolytic Oxidation (PEO) is promising for the processing of biomaterials because it enables the production of surfaces with adjustable composition and structure. In this work, aimed at the improvement of the bioactivity of titanium, PEO has been used to grow calcium phosphide coatings on titanium substrates. The effects of the addition o...

Films were deposited from aluminum acetylacetonate (Al(acac)3) using a methodology involving reactive sputtering and low energy ion bombardment. The plasma was generated by the application of radiofrequency power to the powder containing electrode and simultaneously, negative pulses were supplied to the electrode where the substrates were attached....

Nuclear energy represents 13% of the present worldwide electric power consumption, but in Brazil only about 2.4% of the energy matrix is due to the nucleo-electric power. As the Brazilian hydroelectric capabilities have been threatened by the water supply shortage by environmental conditions, nuclear technology need to overcome specific challenges...

Accurate knowledge about the energy loss of ions in matter is essential in many problems, ranging from fundamental to applied nuclear physics. Indeed, there is a recent and increasing demand for new data on stopping cross sections measured with high accuracy and with a rigorous budget of their uncertainty sources. In the present paper we describe a...

The scientific study of artistic and cultural heritage objects have been routinely performed in Europe and the United States for decades. In Brazil this research area is growing, mainly through the use of physical and chemical characterization methods. Since 2003 the Group of Applied Physics with Particle Accelerators of the Physics Institute of th...

The external beam line of the Laboratory for Material Analysis with Ion Beams (LAMFI) is a versatile setup for multi-technique analysis. X-ray detectors for Particle Induced X-rays Emission (PIXE) measurements, a Gamma-ray detector for Particle Induced Gamma- ray Emission (PIGE), and a particle detector for scattering analysis, such as Rutherford B...

Articles you may be interested in Characterization of the donor-acceptor-pair transition in Nitrogen-implanted zinc oxide J. Appl. Phys. 103, 083513 (2008); 10.1063/1.2906320 Oxidation of nitrogen-implanted silicon: Energy dependence of oxide growth and defect characterization of the silicon substrate J. Appl. Phys. 93, 1832 (2003); 10.1063/1.15352...

This work describes new developments in the external beam setup of the Laboratory of Material Analysis with Ion Beams of the University of São Paulo (LAMFI-USP). This setup was designed to be a versatile analytical station to analyze a broad range of samples. In recent developments, we seek the external beam Rutherford Backscattering Spectroscopy...

The quantification of small amounts of boron in materials is of extreme importance in different areas of materials science. Boron is an important contaminant and also a silicon dopant in the semiconductor industry. Boron is also extensively used in nuclear power plants, either for neutron shielding or for safety control and boron is an essential nu...

Alumina films were deposited from a new plasma method using aluminum acetylacetonate (AAA) powder as precursor. The AAA was sputtered in argon and oxygen plasma mixtures. It was investigated the effect of the oxygen proportion (O2%) on the properties of the coatings. Deposition rate was derived from the layer height measured by profilometry. The el...

Microphysical, optical, and compositional properties of the volcanic ash from the April–May (2010) Eyjafjallajökull volcanic eruption are presented. Samples of the volcanic ash were taken on the ground in the vicinity of the volcano. The material was sieved, re-suspended, and collected on filters, separating particle sizes into coarse and fine mode...

Better characterization of the optical properties of aerosol particles are an essential step to improve atmospheric models and satellite remote sensing, reduce uncertainties in predicting particulate transport, and estimate aerosol forcing and climate change. Even natural aerosols such as mineral dust or particles from volcanic eruptions require be...

Melanoma is a serious and deadly form of skin cancer. However, patients' chances of survival and recovery are considerably increased when it is diagnosed and treated in its early stages. In this study, trace element concentrations in serum samples from patients with melanoma were measured using PIXE (Proton Induced X-ray Emission) and HR-ICPMS (Hig...

Understanding polymer surface properties is extremely important for the most wide range of their applications, from basic coating to the most complex composites and biomaterials. Low energy ion beam irradiation of polymer can improve such surface properties. By modifying its surface biocompatibility, polymers are excellent candidates for biomateria...

An a-C:H thin film deposited by plasma immersion ion implantation and deposition on alloy steel (16MnCr5) was analyzed using a self-consistent ion beam analysis technique. In the self-consistent analysis, the results of each individual technique are combined in a unique model, increasing confidence and reducing simulation er-rors. Self-consistent a...

Three facilities in Brazil are being prepared and upgraded to test and to qualify electronic devices regarding their tolerance to TID and SEE: a 60 kV X-ray source, a 1.7 MV Pelletron accelerator for low energy proton beams and an 8 MV Pelletron accelerator that produces heavy ion beams. MOSFET transistors were exposed to 10-keV X-rays and to 2.4 M...

An a-C:H thin film deposited by plasma immersion ion implantation and deposition on alloy steel (16MnCr5) was analyzed using a self-consistent ion beam analysis technique. In the self-consistent analysis, the results of each individual technique are combined in a unique model, increasing confidence and reducing simulation errors. Self-consistent an...

Among several methods used to obtain ultra-high vacuum (UHV) for particles accelerators chambers, it stands out the internal coating with metallic films capable of absorbing gases, called NEG (non-evaporable getter). Usually these materials are constituted by elements of great chemical reactivity and solubility (such as Ti, Zr, and V), at room temp...

Electronic circuits are strongly influenced by ionizing radiation. The necessity to develop integrated circuits (IC's) featuring radiation hardness is largely growing to meet the stringent environment in space electronics. This work aims to development a test platform to qualify electronic devices under the influence of high radiation dose, for aer...

This work describes a computer algorithm for automatic extraction of the energy calibration parameters from a Rutherford Back-Scattering Spectroscopy (RBS) spectrum. Parameters like the electronic gain, electronic offset and detection resolution (FWHM) of a RBS setup are usually determined using a standard sample. In our case, the standard sample...

In this work we have studied the radiation effects on MOSFET electronic devices. The integrated circuits were exposed to 10 keV X-ray radiation and 2.6 MeV energy proton beam. We have irradiated MOSFET devices with two different geometries: rectangular-gate transistor and circular-gate transistor. We have observed the cumulative dose provokes shift...

Melanoma is a serious skin cancer that, if found and treated in its early stages can be cured before it gets invasive and develops metastasis. The incidence of this disease has steadily increased in white populations throughout the world in the last decades. Although the basis for this rise is incompletely understood, it is known that solar exposur...

The level and change in concentration of trace elements in the fluids of a body may be the result and an evidence of alterations in life functions. In the search for trace element alterations in the human body it is necessary to know referenced values for as many elements as possible. In this work, Proton Induced X-ray Emission (PIXE) was used to s...

The study of ionizing radiation effects on semiconductor devices is of great relevance for the global technological development and is a necessity in some strategic areas in Brazil. This work presents preliminary results of radiation effects in MOSFETs that were exposed to 3.2 Grad radiation dose produced by a 2.6-MeV proton beam. The focus of this...

Multilayered metal films including such couples as Ta-Permalloy (Ni80Fe20) play a key role in magnetic recording sensors, where it is important to preserve the integrity of the thin permalloy layer under thermal conditions during processing and subsequent service. Earlier work1 has indicated a fast grain boundary diffusion of Ta in Ni films at temp...

Materials Chemistry and Physics j o u r n a l h o m e p a g e : w w w . e l s e v i e r . c o m / l o c a t e / m a t c h e m p h y s a b s t r a c t Iron was successfully incorporated in FDU-1 type cubic ordered mesoporous silica by a simple direct synthesis route. The (Fe/FDU-1) samples were characterized by Rutherford back-scattering spectrome-t...

Characterization of aerosol scattering and absorption properties is essential to accurate radiative transfer calculations in the atmosphere. Applications of this work include remote sensing of aerosols, corrections for aerosol distortions in satellite imagery of the surface, global climate models, and atmospheric beam propagation. Here we demonstra...

A caracterização de objetos de arte e, ou, arqueológicos, por meio de métodos de análise elementar não destrutiva com feixes iônicos busca a identificação de elementos químicos presentes nas amostras por técnicas nucleares. Os métodos físicos e químicos estão na interface entre a ciência pura e as aplicações diretas para caracterização de bens cult...

Irradiation with heavy ions can produce several modifications in the chain structure of polymers. These modifications can be related to scissioning and cross-linking of chemical bonds, which depend on the ion fluence and the density of energy deposited in the material. Stacked thin film Makrofol-KG® samples were irradiated with 350 MeV Au26+ ions a...

The uptake of hexavalent chromium in free living floating aquatic macrophytes Eicchornia crassipes cultivated in non-toxic chromium-doped hydroponic solutions is presented. A Cr-uptake bioaccumulation experiment was carried out using healthy macrophytes grown in a temperature controlled greenhouse. Six samples of nutrient media and plants were coll...

The feasibility of using TANDEM electrostatic particle accelerators as a linear TOF analyzer for molecular ions (TOF‐AMS) is reported in this work. A specific ion source, based on a soft ionization technique commonly used in modern mass spectrometry, employing a pulsed UV‐laser to desorb molecular ions from the solid state, was built for that pur...

The region of Toledo River, Paraná, Brazil is characterized by intense anthropogenic activities. Hence, metal concentrations and physical–chemical parameters of Toledo River water were determined in order to complete an environmental evaluation catalog. Samples were collected monthly during one year period at seven different sites from the source d...

The Silences of the Archives, the Reknown of the Story. The Martin Guerre affair has been told many times since Jean de Coras and Guillaume Lesueur published their stories in 1561. It is in many ways a perfect intrigue with uncanny resemblance, persuasive deception and a surprizing end when the two Martin stood face to face, memory to memory, befor...

The characterization of nitridated steel samples, in special the depth profile of nitrogen, aims to help improving the quality of the surface and to increase the durability of the steel pieces. In this work we used ERDA and NRA to determinate the profile of nitrogen in different sets of stainless steel samples. An incident beam of 35Cl of 56MeV was...

Recent developments in different areas have asked for pore production on the micro and nano scale in several materials. One method for pore fabrication is the irradiation with ion beams and subsequent chemical etching. Micropores have been produced in CR39 and MakrofolTM samples by irradiation with 16O beam with, approximately, 22, 31, 39, 47 MeV....

In this work, small amounts of vanadium atoms were incorporated in copper oxide films in order to decrease the charge capacity loss during the electrochemical lithium reaction, mainly in the first cycle. Reactive sputtering was the film deposition technique used to deposit pure copper oxide films, CuO, and copper–vanadium mixed oxides CuO(VOy). The...

Analysis of trace elemental concentration in the water of the Sao Francisco River located in the western part of the Brazilian state, Parana, has been carried out using particle induced X-ray emission ( PIXE) technique. The main objective of this work was to characterize and to monitor trace elements in the water of the Sao Francisco River, as well...

Summary A collaboration project between the School of Dentistry and the Institute of Physics of the University of São Paulo has been established to measure elemental concentrations in teeth by proton induced X-ray emission (PIXE) and heavy ion elastic recoil detection analysis (HI-ERDA) techniques. Data on trace elements in human, bovine and swine...

In this paper, Cu/V oxide thin films were prepared by reactive d.c./r.f. co-sputtering. Nanostructured films were obtained and their composition and crystallinity were investigated. The electrochemical behavior of the thin film electrodes was studied, in order to evaluate their performance as cathodes in miniaturized systems. The behavior of the mi...

A computer program CLARA that calculates a correction factor for thick target PIXE analysis is described. Using CLARA, the analysis of a powdered sample diluted in a light matrix can be corrected for X-ray self-absorption and beam energy loss to use the regular thin film PIXE yields. Dilutions of powders in boric acid were simulated for two extreme...

In this work, copper oxide thin films have been evaluated for use as electrodes in thin film batteries. The films were deposited by dc sputtering at low power, in order to produce nanoparticulated films. Samples were deposited onto unheated or heated (420°C) substrates. Both kind of samples are nanoparticulated, with distinct grain sizes, and amorp...

FDU-1 is a highly ordered, large-pore silica with a cage-like mesoporous cubic structure. FDU-1 was synthesized from tetraethyl orthosilicate (TEOS) in the presence of poly(ethylene oxide)–poly(butylene oxide)–poly(ethylene oxide) triblock copolymer (PEO–PBO–PEO) template in strongly acid media, using a microwave oven as heating source. Rare earth...

To open new possibilities in nuclear applied physics research, mainly for the analysis of art objects in air, an external beam facility was installed at LAMFI (Laboratório de Análise de Materiais por Feixes Iônicos) of University of São Paulo. PIXE measurements were made using an XR-100CR (Si-PIN) X-ray detector pointed to the sample mounted after...

Human, bovine and swine teeth were analyzed by Proton Induced X-ray Emission (PIXE). The aim of this work was to determine the concentration of trace elements in enamel and dentine of different animal species. PIXE analysis was carried out at the Laboratório de Análise de Materiais por Feixes Iônicos da USP (LAMFI) using a 2.4 MeV proton beam to pr...

Stainless steel is widely employed in different areas of modern industrial production, taking advantage of its corrosion resistance. In this work we use the elastic recoil detection analysis (ERDA) to determinate the profile of nitrogen in stainless steel samples. An incident beam of 35Cl of 50 MeV was used for the analysis of sample components. Th...

This paper describes the application of two techniques, ANAA and PIXE, used in the analyses of some available commercial food containing regular and genetically modified ingredients, as well as soybens cultivated with regular and genetically modified seeds (GMS). The aim of this work is determine their elemental composition to perform a comparative...

Heavy metal pollution status of Toledo River (Paraná State, Brazil) was monitored for trace elements concentration in water during one year. Water samples were collected monthly at seven sites along the river stream. Synchrotron Total Reflection X-ray Fluorescence technique was used to determine the trace elements content in water samples. The meas...

The present work was performed using the common onion (Allium cepa L.) as a bioindicator of toxicity of heavy metals in river water. The test waters were collected at two sampling sites: at the beginning and the end of the Toledo River. The bulbs of A. cepa L. were grown in test water with nine concentration levels of copper, zinc and lead from 0.1...

A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films was organised. Thirteen participant groups used various ion beam analysis (IBA) techniques to determine quantitatively the thickness, areal density and concentration of aluminium, nitrogen and oxygen in films with thicknesses ranging nominally from 1 to...

Three different substrates for the analysis of liquid samples by Total Reflection X-Ray Fluorescence with Syn- chrotron Radiation (SR-TXRF) were investigated and compared: Lucite (Perspex), Kimfoil and Mylar. Dry targets were prepared by pipetting 5 "l aliquotes of the liquid samples (synthetic standards and fresh water samples) on the different su...

Kapton samples were implanted with aluminum in order to create a metal oxide layer for protection against atomic oxygen degradation in space environment. Three different approaches were used. First, an aluminum plasma was created by vacuum arc discharge in a magnetic field, and samples were implanted by plasma immersion. Although sample charging pr...

Molybdenum oxide films with and without metal inclusions were electrochemically deposited on glassy carbon electrodes and characterized by soft X-ray spectroscopy, X-ray diffraction, scanning electron microscopy, and Rutherford backscattering spectroscopy. The local coordination of Mo is preferentially octahedral, but changes in the composition pro...

Um treinamento especial para estudantes novatos em atividades de pesquisa foi proposto com o objetivo de iniciar voluntários à pesquisa. Os seis meses de curso foram compostos de diversos seminários relacionados a utilização de técni cas nucleares, bem como detectores, eletrônica NIM, tecnologia de vácuo, tecnologia de filmes finos e uma introdução...

The electrochemical properties of gold electrode surfaces modified by molybdenum oxide films intercalated with platinum microparticles have been described. The incorporation of Pt microparticles at the oxide film was characterized by PIXE (particle induced X-ray emission) spectroscopy. The modified electrode showed electrochemical activity at aroun...

Atomic oxygen (AO) degradation of polymer-based materials is a serious concern in long life satellites or space stations orbiting low Earth orbit environment. Protection against AO can be achieved by a thin metal oxide layer on the polymerÕs surface. Metal implantation followed by oxidation is a promising way of creating this layer with superior ad...

A novel procedure using plasma sputtering in an electron-cyclotron-resonance device has been applied to clean archeological MOCHE artefacts, unearthed at the Royal Tombs of Sipán. After successful cleaning, the pieces were analysed by a variety of complementary techniques, namely proton-induced x-ray emission, Rutherford backscattering spectroscopy...

Plasma immersion ion implantation and deposition (PIIID) technique combines film deposition and ion bombardment in the same procedure. According to that, high voltage negative pulses are supplied to substrates exposed to organic compound containing plasmas. During the pulse on-time, positive ions from the glow discharge are attracted and implanted...

An external PIGE–PIXE setup was installed on a beam line of the 8 MV tandem Pelletron accelerator of the Open Nuclear Physics Laboratory (LAFN). Proton beam energy was chosen in the 8–12 MeV range, sufficient to get an acceptable gamma ray yield but not so high as to prevent us from measuring X-rays. This also allowed the use of a thick aluminum ex...

Benzene plasma polymer films were bombarded with Ar ions by plasma immersion ion implantation. The treatments were performed using argon pressure of 3 Pa and 70 W of applied power. The substrate holder was polarized with high voltage negative pulses (25 kV, 3 Hz). Exposure time to the immersion plasma, t, was varied from 0 to 9000 s. Optical gap an...

The deposition of amorphous hydrogenated silicon oxynitride thin films, varying the nitrogen and oxygen content in the solid phase, is reported. The films were deposited by plasma enhanced chemical vapor deposition at different nitrous oxide/silane flow ratios, keeping constant the silane flow and the deposition temperature at 320°C. The compositio...

In this work, thin films of LixNiOy were deposited by rf reactive magnetron sputtering, from a LiNiO2 target. The composition of the films was analyzed by Rutherford backscattering spectroscopy. The electronic structure was analyzed by photoelectron spectroscopy, using either X-ray (Al Kα) or synchrotron light (120 eV). X-ray diffraction showed a c...

This paper reports improvements on the chemical and structural order of amorphous hydrogenated silicon carbide thin ®lms, deposited by plasma enhanced chemical vapor deposition (PEVCD) at thèstarving plasma regime', from a gaseous mixture of silane, methane and hydrogen. Two deposition parameters: (i) the radio frequency (rf) power and (ii) the hyd...