Makoto Mizuno

Makoto Mizuno
Canon Nanotechnologies

Doctor of Engineering

About

11
Publications
310
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243
Citations

Publications

Publications (11)
Conference Paper
Nanoimprint Lithography (NIL) has been shown to be an effective technique for replication of nano-scale features. Jet and Flash Imprint Lithography* (J-FIL*) involves the field-by-field deposition and exposure of a low viscosity resist deposited by jetting technology onto the substrate. The patterned mask is lowered into the fluid which then quickl...
Article
Microgenerators that could extract energy from the environment would be very attractive for powering some types of microsystems. One approach uses a mechanical resonant element to transfer seismic vibrations into useful motion. A novel configuration for an electromagnetic microgenerator and an electrostatic microgenerator has been modelled and conf...
Article
This paper describes a monolithically constructed, flexure-hinged translation mechanism suitable for mechanical scanning stages of very high precision. Two piezoelectric stacks are employed to drive the mechanism ; one piezoelectric stack pushes whilst the other pulls the moving platform. This push-pull drive system is effective for raising the nat...
Article
A monolithic translation mechanism driven by two pairs of piezoelectric stacks is described which was devised primarily for the mechanical scanner of STM (scanning tunneling microscope). The layout of the mechanism is symmetrical with respect to the center lines of the base plate. Each pair of piezoelectric stacks is cemented at the outer ends betw...
Article
This paper describes two types of piezo-driven translation mechanisms, which are composed of a flexure-hinged linkage and cut from a monolith. The natural frequency and accuracy of motion of the mechanisms are examined in detail to assess the applicability of both of the mechanisms to the scanner of STM (scanning tunneling microscope). Design formu...
Article
This paper describes a magnifying mechanism utilizing a flexure-pivoted linkage, which was devised for use on accurate mechanisms driven by a piezoelectric stack. The principle of operation is similar to that of the slider-crank mechanism, and a high magnification is obtained by a suitable choice of parameters defining the initial geometry of linka...
Article
A planar linkage is described which was devised primarily for micropositioning stages. It functions both as a magnifying or reducing mechanism and a guidance system for a rectilinear motion. Two input bars, which are coupled to a driving element such as a piezoelectric stack, two output bars, one of which is mounted on a base plate and the other pe...

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