Katja Sarah Meinel- M. Sc.
- Chemnitz University of Technology
Katja Sarah Meinel
- M. Sc.
- Chemnitz University of Technology
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9
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Introduction
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Publications
Publications (9)
![Figure 5. Schematic of the experimental setup [9].](profile/Agne-Zukauskaite-2/publication/360033212/figure/fig2/AS:1146492005949440@1650356403012/Schematic-of-the-experimental-setup-9_Q320.jpg)
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm2 (Design 1) and 4 × 6 mm2 (Design 2) footprint with 600 nm AlN or 2000 nm Al0.68Sc0.32N as piezoelectric transducer material are investigated. The chip with...
![Parameter set for micromirror design and modeling [18-23].](profile/Roman-Forke/publication/347028088/figure/tbl2/AS:969786519465984@1608226532314/Parameter-set-for-micromirror-design-and-modeling-18-23_Q320.jpg)
A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic applications, such as fluorescence microscopy, the devices have a mirror plate diameter of 0.7 mm with a 4 mm2 chip footprint. After an initial design optimization procedure, two micromirror de...
A micromirror with piezoelectric thin film aluminum nitride (AIN) as transducer material for actuation and detection is presented. Four sensor elements are integrated for closed-loop monitoring of the resonant driven microscanner with an entire footprint of 6 mm
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