Jme Guilan

Jme Guilan

editor
journal of metabolism and exercise

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Publication (1)
Article
Integration of CoWP self aligned barriers (SAB) in hybrid stack with SiCN liner in a standard 65 nm technology node integration scheme faces several issues, such as bowing of the upper metal and SAB degradation. To overcome those challenges, a new integration scheme called Hybrid Punch Through (HPT) approach is proposed. In this sequence, the patte...