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Effect of incorporation of Ag on the structural, optical, electrical, and fluorescence properties of sol-gel derived Al-rich zinc oxide (ZnO:Al:Ag) nanostructured films was studied. The Eg of the film slightly decreased to a minimal value with Ag doping, and was found to be about 3.65 eV for RAg/Zn = 1% from its initial value of 3.72 eV (RAg/Zn = 0...
Ru thin films were deposited by atomic layer deposition (ALD) through alternating exposures of a metallorganic precursor, C16 H 22 Ru [(η6 -1-isopropyl-4-methylbenzene) (η4 -cyclohexa-1,3-diene)ruthenium(0)] and O2 at 220°C. The growth rate was 0.1 and 0.086 nm/cycle on TiN and thermally grown SiO2, respectively. On both substrates, negligible incu...