J. Charrier

• Professor (Associate) at University of Rennes

Mid-infrared (mid-IR) waveguide sensors were fabricated using two platforms: chalcogenide glasses (ChGs) and porous silicon (PSi). ChGs layers were deposited through RF magnetron sputtering while PSi layers were prepared by electrochemical anodization. Ridge waveguides were patterned using standard i-line photolithography and reactive ion etching f...

This study presents the etching parameters optimization of GeSbSe-based chalcogenide glass (ChG) for near and mid-infrared integrated photonic applications. Single-mode Se4 (Ge19.4Sb16.7Se63.9) on Se2 (Ge28.1Sb6.3Se65.6) waveguides were designed and fabricated. The Se2 and Se4 layers were first deposited via the RF magnetron sputtering technique. T...

Research on integrated blue and near-ultraviolet photonics is has been increasingly investigated in recent years. To enable the development of photonic integrated circuits in this wavelength range, one of the challenges is to identify a transparent platform that can provide a variety of integrated components. Aluminum oxide (Al<sub xmlns:mml="http:...

The influence of rapid thermal annealing (RTA) onto chalcogenide Ge-Sb-Se thin films is reported, focusing on changes in optical properties. These materials possess broad mid-infrared transparency covering the most critical absorption bands for (bio)chemical sensing and high third-order optical nonlinearities for potential applications in nonlinear...

We present a butt-coupled InGaN fiber Bragg grating (FBG) semiconductor laser diode operating below 400 nm in the single-mode emission regime. This compact coherent laser source exhibits an intrinsic linewidth of 14 kHz in the near-UV range and a side-mode suppression ratio reaching up to 40 dB accompanied by almost 2 mW output power. Furthermore,...

In this work, a gas sensing system based on chalcogenide (ChG) glass platform in the mid-infrared (Mid-IR) region is modeled. The proposed gas sensing system composed of a linear tapers waveguide, ridge waveguide, a multimode interferometer (MMI) coupler and transducer arms. The components of the sensing system were simulated using FimmWave from Ph...

Rapid, simultaneous detection of organic chemical pollutants in water is an important issue in regards of preserving human health. In this study, the possibility of developing in situ reusable optical...

In the context of the major problems linked to global warming and pollution, a micro-sensor based on mid-infrared spectroscopy could be a useful tool for the continuous measurement of various bio-chemical species that are disrupting our environment. With the aim of developing a mid-infrared source potentially integrated into a micro-sensor, we have...

A mid-infrared (mid-IR) porous silicon (PSi) waveguide gas sensor was fabricated. PSi guiding and confinement layers were prepared by electrochemical anodization. Ridge waveguides were patterned using standard i-line photolithography and reactive ion etching. Due to the open pores, light and gas molecules interact in the inside volume, unlike bulk...

In this paper, we report on the infrared luminescence of amorphous praseodymium-doped Ge20In5Sb10Se65 waveguides, which can be used as infrared sources in photonic integrated circuits on silicon substrates. Amorphous chalcogenide thin films were deposited by radiofrequency magnetron cosputtering using an argon plasma whose deposition parameters wer...

We present a compact InGaN fiber Bragg grating (FBG) semiconductor laser diode operating below 400 nm in the single-mode emission regime. This compact coherent laser source exhibits an intrinsic linewidth of 14 kHz in the near-UV range. We report a side-mode suppression ratio reaching up to 40 dB accompanied by a mW-level output power. Furthermore,...

We present a compact InGaN fiber Bragg grating (FBG) semiconductor laser diode operating below 400 nm in the single-mode emission regime. This compact coherent laser source exhibits an intrinsic linewidth of 14 kHz in the near-UV range. We report a side-mode suppression ratio reaching up to 40 dB accompanied by a mW-level output power. Furthermore,...

In this paper, the design of integrated photonics components for blue/near-ultraviolet wavelength range is presented. Optical properties of the silicon oxynitride (SiON) in this spectral range are exploited to develop a complete library of photonic integrated components for operation in blue/near-UV spectral range. Keywords: Integrated Optics, Near...

Climate-active gases, notably carbon dioxide (CO2), methane (CH4), and nitrous oxide (N2O), display fundamental absorption bands in the mid-infrared (mid-IR). The detection and monitoring of those gases could be enabled by the development of mid-IR optical sources. Broadband mid-IR on-chip light emission from rare-earth-doped chalcogenide photonic...

Priority substances likely to pollute water can be characterized by mid-infrared spectroscopy based on their specific absorption spectral signature. In this work, the detection of volatile aromatic molecules in the aqueous phase by evanescent-wave spectroscopy has been optimized to improve the detection efficiency of future in situ optical sensors...

Porous germanium is a promising material for sensing applications in the mid-infrared wavelength range due to its biocompatibility, large internal surface area, open pores network and widely tunable refractive index, as well as its large spectral transparency window ranging from 2 to 15 μm. Multilayers, such as Bragg reflectors and microcavities, b...

The objective of this study is to demonstrate the successful functionalization of the surface of a chalcogenide infrared waveguide with the ultimate goal of developing an infrared micro-sensor device. First, a polyisobutylene coating was selected by testing its physico-chemical compatibility with a Ge-Sb-Se selenide surface. To simulate the chalcog...

Different integrated photonic sensors are investigated for the detection in the mid-infrared region of the two gases namely CO2 and CH4. The three studied structures are ridge waveguides, based both on chalcogenide films (ChG) or porous germanium (PGe) and slot waveguides based on ChG. Waveguide dimensions are optimized to obtain the highest power...

Germanium/Zinc Sulphide (Ge/ZnS) single and multilayers are deposited by ion assisted electron beam deposition on Silicon substrates for applications in the 2-15 µm wavelength region. Refractive indices of Ge and ZnS thin films are extracted from measured reflectance and transmittance spectra. Several types of mid-infrared filters (high-, anti-refl...

Chalcogenide-oxide Bragg reflectors and a 1-D vertical cavity for operation at 1.55 µm were designed and fabricated via radio-frequency sputtering. The Bragg reflectors were made out of repeating layers of Al2O3 and As2Se3, and the cavity was obtained via a Ga5Ge20Sb10S65:Er³⁺ defect layer. The layers’ properties were assessed via ellipsometry and...

By means of finite-difference time-domain (FDTD) simulations, the stationary and dynamic responses of coupled optical microring resonators made with a material exhibiting an instantaneous Kerr nonlinearity are numerically investigated. We compare the results with the coupled-mode theory (CMT) and find good agreement. We demonstrate by integrating M...

In this work, the fabrication of a porous silicon Bragg reflector and vertical cavity on P⁺ silicon substrate is investigated for applications in spectroscopic sensing in the mid-infrared (Mid-IR) wavelength range. The complex refractive index of porous silicon layers is measured. Optical vertical devices are then fabricated and characterized by Fo...

This work reports on the properties of luminescent waveguides based on quaternary Ga-Ge-Sb-Se amorphous thin films doped with praseodymium. The waveguides were fabricated via magnetron co-sputtering, followed by inductively coupled plasma reactive ion etching. The initial thin film thickness and optical properties were assessed and the spectroscopi...

A 1 x 2 multimode interferometer beam splitter based on mid-infrared emitting chalcogenides waveguides is designed. This device multiplexes mid-infrared light in two channels whose respective passbands overlap either CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> or CO absorption bands, res...

Third order optical nonlinear effects relying on the instantaneous Kerr effect are investigated in a straight chalcogenide ridge waveguide. The sample consists of a GeSbSe film deposited on a thermally oxidized silicon substrate. Ridge waveguides were processed using photolithography and dry etching techniques. From a 1.1 cm long integrated GeSbSe...

The conception of efficient Bragg reflectors (BRs) based on dielectric layers is needed to improve the light trapping in thin film epitaxial silicon solar cells. Porous silicon multilayer structures (PSMS) used as BR show its potential to enhance optical confinement of low energy photons. In the present work, a novel design of PSMS will be studied...

In this paper, we demonstrate a new method to obtain a low gap between the access waveguide and the racetrack cavity of a micro-resonator based on porous silica material and using standard photolithographic process. The photolithographic process is first carried out on porous silicon layers to obtain porous silicon ridge waveguides that constitutes...

The design of porous silicon (PSi) integrated micro-resonators (MRs) is studied for both surface sensing and homogeneous sensing at 1550 nm to optimize the sensors’ sensitivity and limit of detection (LOD) as a function of the porosity, dimensions and propagation losses of PSi ridge waveguides. A model for estimating the different contributions to...

Ce papier présente des exemples de travaux de recherche réalisés au laboratoire Fonctions Optiques pour les Technologies de l’information (Foton UMR-CNRS 6082) par des enseignants chercheurs de l’IUT de Lannion (Université de Rennes 1). Les thématiques développées concernent l’étude d’une part de méthodes de couplage et d’assemblage optique, notamm...

In this work, the fabrication of porous silicon Bragg reflector and vertical micro-cavity on P + silicon substrate is investigated for applications in spectroscopic sensing and environmental monitoring in the Mid Infra-Red field. These optical devices are characterized by FTIR spectrophotometer. This work demonstrates for the first time to our know...

An optical and hybrid integrated sensor based on the Vernier effect principle and implemented with porous silicon and polymer waveguides is studied to detect low concentrations of biomarkers such as Bovine Serum Albumin (BSA). The principle of the Vernier effect integrated sensor adopted consists of a reference micro-resonator (MR) cascaded to anot...

Praseodymium-doped selenide thin films are deposited by radio frequency magnetron sputtering on thermally oxidized silicon wafers and undoped selenide layers. Ridge waveguides are then processed using photolithography and dry etching techniques. Under optical pumping at 1.55 μm, broadband guided mid-infrared photoluminescence is recorded for the fi...

The plasmonic sensor for infrared sensing we propose is fully integrated and based on a ridge waveguide upon which metallic scattering nano-objects ensure the coupling between the guided modes and superstrate of the device. Full vector 3D modelling is used to optimize the device parameters taking into account the mode used as excitation.

We demonstrate the fabrication of a Vernier effect SU8/PMATRIFE polymer optical biosensor with high homogeneous sensitivity using a standard photolithography process. The sensor is based on one micro-resonator embedded on each arm of a Mach-Zehnder interferometer. Measurements are based on the refractive index variation of the optical waveguide sup...

A micro-resonator based on porous silicon ridge waveguides is implemented by a large scale standard photolithography process to obtain a low cost and sensitive sensor based on volume detection principle instead of the evanescent one usually used. The porous nature of the ridge waveguides allows the target molecules to be infiltrated in the core and...

The detection of molecules dissolved in liquid medium can be envisaged by means of an optical integrated sensor operating in middle infrared range. The intended sensor is composed of a cladding and a guiding selenide sputtered layers transparent in middle infrared. Hence, Ge-Sb-Se thin films were selected in view of tailored refractive index contra...

Porous silicon (PSi) is material which physical and optical properties have been widely studied for biological sensors. Indeed, the wide internal surface of PSi, as well as its biocompatibility have significant advantages for use in the fields of sensors. Moreover, integrated micro-resonators (MRs), by their geometry and operating principle, allow...

Development of Mid-infrared sensors for the detection of biochemical molecules is a challenge of great importance. Mid-infrared range (4000 – 400 cm-1) contains the absorption bands related to the vibrations of organic molecules (nitrates, hydrocarbons, pesticides, etc.). Chalcogenide glasses are an important class of amorphous materials appropriat...

We demonstrate the interest of expanded beam microlenses (around 55 µm of mode field diameter) to relax positioning tolerances and to decrease reflectance in single mode fiber to fiber interconnexions. We also point out the interest of micro-lenses of very small mode field diameter (around 2 µm) to improve coupling efficiency in specialty fibers an...

A compact amplifier based on chalcogenide Pr³⁺-doped micro-disk coupled to two ridge waveguides is designed and refined by means of a home-made computer code. The gain G ≈ 7.9 dB is simulated for a Pr³⁺ concentration of 10 000 ppm, input signal power of −30 dBm at the wavelength 4.7 µm and input pump power of 50 mW at the wavelength 1.55 µm. In the...

Selenide ridge waveguide based on evanescent field detection was designed, fabricated and optically characterized in mid-infrared (7.7 μm). Results represent the first development step of an integrated optical sensor for pollutant detection in water.

We demonstrate the interest of expanded beam microlenses (around 55µm of mode field diameter) to relax positioning tolerances and to decrease reflectance in single mode fiber to fiber interconnexions. We also point out the interest of micro-lenses of very small mode field diameter (around 2 µm) to improve coupling efficiency in specialty fibers and...

A selenide integrated platform working in the mid-infrared was designed, fabricated and optically characterized at 7.7 µm. Ge-Sb-Se multilayered structures were deposited by RF magnetron sputtering. Using i-line photolithography and fluorine-based reactive ion etching, ridge waveguides were processed as Y-junction, spiral and S-shape waveguides. Si...

This paper reports the fabrication of luminescent optical rib/ridge waveguides made of erbium doped Ga-Ge-Sb-S films deposited by RF magnetron sputtering. Several fluorescence emissions of Er3+ ions from the visible to the middle infrared spectral domain were clearly observed within the films. The study of the 4I13/2 level lifetime enabled developm...

A micro-sensor based on selenide glasses for evanescent wave detection in mid-infrared spectral range was designed and fabricated. Ge-Sb-Se thin films were successfully deposited by radio-frequency magnetron sputtering. In order to characterize them spectroscopic ellipsometry, atomic force microscopy and contact angle measurements were employed to...

The mid-infrared (mid-IR) spectral region is of great interest to many areas of science and technology as it contains two important transparency windows (3–5 μm and 8–13 μm) of the Earth’s atmosphere and strong characteristic vibrational transitions displayed by a large number of molecules. Praseodymium ions (Pr3+) feature characteristic transition...

The implementation of a Mid-InfraRed (MIR) silicon photonics transducer with broad transparency (up to 8 µm) is a challenge that could find applications in spectroscopic sensing and environmental monitoring. Due to silica absorption above 3.6 µm, the conventional silicon-on-insulator platform, used in the near infrared (NIR) wavelength range, is no...

Racetrack micro-resonator (MR), made from partially or totally oxidized porous silicon (PS) ridge waveguides fabricated with standard photolithography process, is reported. The design and the technological process are described including a study of waveguide dimensions that provide single mode propagation. Scanning electronic microscopy observation...

Three polymethyl methacrylate based copolymers bearing arylvinylpyrimidine chromophores have been synthesized in four steps. Spectral properties of the copolymers have been studied in solution, powder and thin films and compared with the corresponding free chromophores. The copolymers exhibit strong emission solvatochromism and act as polarity sens...

A theoretical study of evanescent optical sensor for multipurpose detection in the Mid-Infrared of gases and pollutants in water is presented in this paper. The opto-geometrical parameters of the transducers – ridge waveguides – have been optimized in order to obtain the highest evanescent power factor for monomodal propagation in the Mid-Infrared....

Afin de réaliser des capteurs optiques à base de micro-résonateurs très sensibles et facilement intégrables, nous présentons une étude de détection homogène par évanescence sur des micro-résonateurs polymères fabriqués à partir de SU8 pour le cœur et de PMATRIFE pour la gaine inférieure. Aucun superstrat de polymère n’a été déposé sur le micro-réso...

Le Moyen Infra-Rouge (MIR) est la région spectrale comprise entre 3 et 20 µm. Cette gamme de longueurs d’onde est connue pour contenir des transitions vibrationnelles fondamentales caractéristiques d’espèces moléculaires en phase liquide ou gazeuse. De nombreuses substances telles que le toluène, le méthanol, l’éthanol, l’acétone, le glucose, le di...

Au cours de la dernière décennie, la technologie des circuits optiques intégrés s'est fortement développée à partir de différents matériaux. Elle commence à atteindre une maturité technologique et commerciale et son évolution peut être comparable à celle précédemment obtenue sur l'évolution de la microélectronique comme nous pouvons le voir sur les...

The fabrication of micro-resonators, made from porous silica ridge waveguides by using an electrochemical etching method of silicon substrate followed by thermal oxidation and then by a standard photolithography process, is reported. The design and fabrication process are described including a study of waveguide dimensions that provide single mode...

Thin films and ridge waveguides based on large-diameter semiconducting single-wall carbon nanotubes (s-SWCNTs) dispersed in a polyfluorene derivative are fabricated and optically characterized. Ridge waveguides are designed with appropriate dimensions for single-mode propagation at 1550 nm. Using multimode ridge waveguides, guided s-SWCNT photolumi...

Le silicium poreux est un matériau dont les propriétés physiques et optiques ont été largement étudiées pour différentes applications telles que l'optoélectronique [1] ou encore les capteurs chimiques et biologiques [2]. En effet, la large surface interne du silicium poreux ainsi que sa biocompatibilité présentent des atouts importants pour son uti...

The 3-15 μm range is a key region for a large number of applications in diverse areas such as biology and medicine, molecular spectroscopy, ground based and space borne environmental monitoring but also an important issue of instrumentation for astronomy and astrophysics to achieve complex but very reliable instruments. Going to the mid IR region i...

Semiconducting carbon nanotubes (CNT) exhibit large nonlinear-and strong quasi-one dimensional excitonic optical properties. Their integration in integrated waveguides could lead to very efficient light-emitting devices or optical signal processing functions. We described the fabrication and optical characterization of hybrid planar waveguides inco...

Optical waveguiding properties of a thick wurtzite aluminum nitride highly [002]-textured hetero-epitaxial film on (001) basal plane of sapphire substrate are studied. The physical properties of the film are determined by X-ray diffraction, atomic force microscopy, microRaman, and photocurrent spectroscopy. The refractive index and the thermo-optic...

Porous silicon nanowires (PSiNWs) layers fabrication was reported. Reflectance spectra were measured as a function of the nanowire length and were inferior to 0.1% and a strong photoluminescence (PL) signal was measured from samples. Models based on cone shape of nanowires located in circular and rectangular bases were used to calculate the reflect...

Planar waveguides made of Nd 3þ -doped silicon rich silicon oxide (SRSO) and silicon rich silicon nitride (SRSN) have been fabricated by reactive magnetron sputtering and characterized with special emphasis on the comparison of the guided photoluminescence (PL) properties of these two matrices. Guided fluorescence excited by top surface pumping at...