Haoshu Cai

Haoshu Cai
Micron Technology, Inc.

Doctor of Philosophy

About

21
Publications
10,182
Reads
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261
Citations
Citations since 2016
21 Research Items
257 Citations
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Additional affiliations
May 2021 - August 2021
Applied Materials
Position
  • Systems Diagnostics Intern
Description
  • Develop physic-based digital twin models for plasma etching/deposition products for performance monitoring, fault detection, and predictive maintenance. Develop diagnostic algorithm to detect sensor/actuator faults. Implement/debug/test modeling and diagnostic algorithms.
May 2020 - July 2020
Applied Materials
Position
  • Analyst
Description
  • Develop a multivariate trace segmentation system based on real wafer fabrication process data. Develop a multivariate data simulation system based on real wafer fabrication process data. Develop a multivariate feature extraction and fault analysis system based on the data simulator.
May 2019 - September 2019
Applied Materials
Position
  • Analyst
Description
  • Develop a data simulation system based on real wafer fabrication process data. Develop a feature extraction and fault analysis system based on the data simulator.
Education
August 2017 - November 2021
University of Cincinnati
Field of study
  • Mechanical Engineering
September 2014 - April 2017
Nanjing University of Aeronautics & Astronautics
Field of study
  • Manufacturing Engineering
September 2009 - June 2013
Nanjing Tech University
Field of study
  • Process Equipment & Control Engineering

Publications

Publications (21)
Article
Full-text available
The prediction of average Material Removal Rate (MRR) in Chemical Mechanical Planarization (CMP) process is regarded as a crucial research objective of Virtual Metrology (VM) for semiconductor manufacturing. In this paper, a novel VM model is proposed to predict MRR in CMP process based on the integration of Gaussian Process Regression (GPR) with a...
Article
This paper proposes a unified filtering framework for multi-horizon wind speed prediction. The novelty of this paper focuses on the integration of the short-term prediction model, the Numerical Weather Prediction (NWP) and a smoothing term into a unified framework based on Bayesian filters. In the proposed framework, the system state function of th...
Article
Full-text available
Maintenance scheduling and vessel routing are critical for the off-shore wind farm to reduce maintenance costs. In this research, a systematic framework that takes the advantage of predictive analysis for off-shore wind farm maintenance optimization is sketched and the optimization results are presented. The proposed framework consists of three dif...
Article
Industrial robots are widely used in modern factories. Robot faults lead to the inevitable suspension of production lines. The prediction of robot failure can improve production capacity. However, it is challenging due to the variations of robots in dynamic working regimes. This paper presents a methodology of fault prognosis of industrial robots,...
Conference Paper
In today’s microelectronics manufacturing facilities, fault detection (FD) is pervasive as the primary advanced process control (APC) capability in use. The current approach to FD, while effective, has a number of shortcomings that impact its cost and effectiveness. The highest among these is the cost in time and resources associated with the large...
Article
Full-text available
Accurate battery capacity prediction is important to ensure reliable battery operation and reduce the cost. However, the complex nature of battery degradation and the presence of capacity regeneration phenomenon render the prediction task very challenging. To address this problem, this paper proposes a novel and efficient algorithm to predict the b...
Article
The prediction of the average Material Removal Rate (MRR) for Chemical Mechanical Planarization (CMP) process has been recognized to be a critical factor of Virtual Metrology (VM) modeling as well as wafer-to-wafer process control. In this paper, a novel method is proposed to dynamically predict MRR in CMP process by using a Just-in-time (JIT) mode...
Article
The prediction of the average material removal rate (MRR) in chemical mechanical planarization (CMP) process has been recognized to be a critical factor of virtual metrology (VM) modeling for advanced process control (APC). This paper proposes a Gaussian process regression (GPR)-based model to dynamically predict MRR in CMP process. The proposed me...
Article
This paper proposes a similarity-based Particle Filter (PF) method for Remaining Useful Life (RUL) prediction with improved performance. In the proposed methodology, Maximum Mean Discrepancy (MMD) and Kernel Two Sample Test are firstly adopted to query similar Run-To-Failure (R2F) profiles from historical data library. The states and parameters of...
Article
Full-text available
This paper proposes a novel similarity-based algorithm for Remaining Useful Life (RUL) prediction and a methodology for machine prognostics. In the proposed RUL prediction algorithm, a Similarity Matching Procedure including the Kernel Two Sample Test (KTST) is developed to query similar run-to-failure (R2F) profiles from historical data library. N...
Presentation
Develop a data simulation system based on real wafer fabrication process data.
Conference Paper
Full-text available
When abundant historical Run-to-Failure (R2F) data is available, the similarity-based method is one of the favored options for Remaining Useful Life (RUL) prediction due to its simplicity and satisfactory accuracy. In this study, a novel similarity-based methodology for RUL prediction is proposed. The proposed method has two important processing st...
Article
Full-text available
This paper studies the application of Multi-Task Gaussian Process (MTGP) regression model to enhance the numerical predictions of wind speed. In the proposed method, a Support Vector Regressor (SVR) is first utilized to fuse the predictions from Numerical Weather Predictors (NWP). The purpose of this regressor is to map the numerical predictions at...
Conference Paper
Full-text available
Recently, the data driven approaches are winning popularity in Prognostics and Health Management (PHM) community due to its great scalability, reconfigurability and the reduced development cost. As the data-driven approaches flourished, the data competitions hosted by the PHM Society over the last ten years contribute a valuable repository of publi...
Article
Full-text available
Recently, the data driven approaches are winning popularity in Prognostics and Health Management (PHM) community due to its great scalability, reconfigurability and the reduced development cost. As the data-driven approaches flourished, the data competitions hosted by the PHM society over the last ten years contribute a valuable repository of publi...
Article
Wind Speed (WS) prediction plays a more and more important role in the wind farm operation and maintenance. In current literature, the short term (<6 h ahead) and medium/long (>6 h ahead) WS prediction are normally provided by different models. The statistical models are found effective in shortterm prediction while the Numerical Weather Prediction...
Preprint
Full-text available
Impulsive signature enhancement (ISE) is an important topic in the monitoring of rotating machinery and many different methods have been proposed. Even though, the topic of how to leverage these ISE techniques to improve the data quality in terms of prognostics and health management (PHM) still needs to be investigated. In this work, a systematic v...
Article
In the data-rich manufacturing environment, the production process of work-in-process is described and presented by trajectories with manufacturing significance. However, advanced approaches for work-in-process trajectory data analytics and prediction are comparatively inadequate. However, the location prediction of moving objects has drawn great a...
Article
The application of Internet of Things technologies has led to a data-rich manufacturing environment by connecting manufacturing objects as a collaborative community. However, advanced analytics approach is comparatively inadequate for work-in-process (WIP) trajectory data. On the other hand, although the topic of mining frequent trajectory patterns...

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Projects

Projects (5)
Archived project
Validation test on a RFID monitoring system for Work-in-Process (WIP). Trajectory data analysis for WIP.
Project
- Develop a data simulation system based on real wafer fabrication process data. - Develop a feature extraction and fault analysis system based on the data simulator
Archived project
- Develop virtual metrology model for the injection molding process in lens manufacturing; - Develop an intelligent strategy for lens angle & cavity pairing; - Develop an automatic fault analysis system for lens production process; - Compare the camera test data and Foxconn quality inspection data to optimize product specification.