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This paper reports the effect of piezoelectric layer thickness on the resonance frequency of the Bulk Acoustic Wave (BAW) resonator. The area of square shaped Piezoelectric Resonator is 100μm×100μm and thickness is 2μm. ZnO layer of 2μm is sandwiched between top and bottom electrodes of 0.2μm thickness. The materials used are ZnO as piezoelectric m...
FBAR (Thin Film Bulk Acoustic Wave Resonator) devices are commonly used as application of RF (Radio Frequency) filters for the cell phones and other communication devices. This paper reports about the measurement of the efficiency of FBAR devices. The efficiency is commonly measured in terms of the EMCC (Electromechanical coupling coefficient) and...