Francesca Oreilly

University of Derby · Department of Social Science

We compare the extreme ultraviolet emission characteristics of tin and galinstan (atomic %: Ga: 78.35, In: 14.93, Sn: 6.72) between 10 nm and 18 nm in a laser-triggered discharge between liquid metal-coated electrodes. Over this wavelength range, the energy conversion efficiency for galinstan is approximately half that of tin, but the spectrum is l...

Extreme ultraviolet spectra from a tin laser produced plasma have been recorded over a range of angles between 20° and 90° from the target normal. Absolute intensity measurements are presented of both the 2% band centered on 13.5 nm and the total radiation emitted by the plasma between 10 and 18 nm . The in-band intensity is seen to be relatively c...

Extreme ultraviolet lithography requires a light source at 13.5 nm to match the proposed multilayer optics reflectivity. The impact of wavelength and power density on the ion distribution and electron temperature in a laser-produced plasma is calculated for Nd:YAG and C O ₂ lasers. A steady-state figure of merit, calculated to optimize e...