Fabrice Jean-Luc Michel

VEGATEC · Scientific equipments

Le projet de recherche MATRICE intègre une démarche géostatistique dans l’analyse des données collectées et leur traitement pour conduire au mieux une campagne de reconnaissance selon un objectif souhaité. Pour répondre à cette problématique, une démarche a été définie à partir des résultats du projet REPERAGE et des outils logiciels ont été dévelo...

Presentation of the MATRICE research project: Méthodes Analytiques de Terrain alteRnatives de gestIon des sols ContaminEs

Bulk titanium MEMS present a great interest in constituting both the active part and the biocompatible package of the active implantable medical devices system. Mixed chlorine and fluorine plasma deep-etching results in an etch rate as high as 2.4 μm/min and a selectivity of 70:1 with the Ni hard mask.

Active implantable medical devices like pacemakers, neurostimulators, and sensors are increasingly smarter and simultaneously smaller. To address this antagonist roadmap and drastically enhance integration and functionalization, bulk titanium MEMS present a great interest in constituting directly both the active part and the biocompatible package o...

Fe-implanted Si-wafers have been oxidized at 900 °C and 1100 °C in order to investigate the behaviour of Fe atoms at the growing SiO2/Si interface and the impact on the integrity of microelectronic devices of an involuntary Fe contamination before or during the oxidation process. As-implanted and oxidized wafers have been characterized using second...

The surface structure of the basal plane and of the thermodynamically most stable facet of the α phase of Cr2O3 has been studied using periodic ab initio Hartree–Fock theory. The Cr-terminated (0001) surface, which is nonpolar but charged, is found to be stable. However, a large scale relaxation of the surface layer away from the ideal bulk-termina...

The surface structure of the basal plane and of the thermodynamically most stable facet of the α phase of Cr2O3 has been studied using periodic ab initio Hartree-Fock theory. The Cr-terminated (0001) surface, which is nonpolar but charged, is found to be stable. However, a large scale relaxation of the surface layer away from the ideal bulk-termina...