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In 2018, LNE’s metrological atomic force microscope (mAFM) performed its very first calibrations on standards developed at LNE (P600H60) in collaboration with C2N (Centre for Nanoscience and Nanotechnology). It provides a French traceability route to the SI meter for dimensional measurement at nanometer scale for calibration of standards commonly u...
The LNE has developed its own metrological atomic force microscope (mAFM) which is now the French reference instrument for the measurement of AFM and SEM standards. This instrument uses four double path differential interferometers to measure the XYZ position of the tip relative to the sample. The measurement uncertainties of the mAFM were evaluate...