David Hériban

David Hériban
Institut FEMTO-ST | FEMTO ST · Department of Automatic Control and Micro-Mechatronic Systems (AS2M)

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14
Publications
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232
Citations

Publications

Publications (14)
Article
The construction of a new generation of MEMS which includes micro-assembly steps in the current microfabrication process is a big challenge. It is necessary to develop new production means named micromanufacturing systems in order to perform these new assembly steps. The classical approach called “top-down” which consists in a functional analysis a...
Article
Micromanipulation is a key task to perform serial assembly of MEMS. The two-fingered microgrippers are usable but require specific studies to be able to work in the microworld. In this paper, we propose a new microgripping system where actuators and the end-effectors of the gripper are fabricated separately. End-effectors can thus be adapted to the...
Article
Full-text available
Robotic micro-assembly is one way to manufacture new generation of out of plane and/or hybrid microsystems. This approach requires the study of micromanipulation strategies adapted to the microworld and especially to the surface and adhesion forces. We are focusing our works on the study of robotic assembly methods applied to objects whose size is...
Article
Full-text available
Getting Micro-Electro-Mechanical Systems (MEMS) out of a wafer after fabrication processes is of great interest in testing, packaging or simply using these devices. Actual solutions require special machines like wafer dicing machines, increasing time and cost of de-tethering MEMS. This article deals with a new solution for manufacturing mechanical...
Article
Full-text available
There are great challenges in biological research to study mechanical or chemical interactions between biological objects and artificial parts, to analyse the biocompatibility of artificial materials and/or to increase knowledge about biological cells. Some interaction studies between cells and artificial objects require to positioning very small o...
Conference Paper
Full-text available
This paper deals with robotic micro-assembly of silicon micro-objects whose sizes are tens of micrometers. This production means is one of a more promising approach to realize 3D and/or hybrid microsystems. Current works in robotic micro-assembly are focused on the assembly of micro-objects on a large substrate. We are focusing in the study of micr...
Article
Full-text available
As no reliable methods is available to manipulate component whose typical size is up to 100μm, current industrial assembled products contained only components down to this physical limit. In that scale, micro-assembly requires specific handling strategies to overcome adhesion and high precision robots. This paper deals with an original robotic syst...
Conference Paper
Full-text available
Serial micro-assembly requires high precision robots able to produce translations and rotations to position and orient objects during assembly. In micro-scale, the translation ranges required are typically up to the millimeter and can be obtained with smart devices (piezomotor, etc.). In the other hand, the rotation ranges stay identical to the mac...
Article
Full-text available
La fabrication automatisée de microproduits requiert lors du prototypage une assistance technique à l'opérateur compte tenu de l'inaccessibilité directe que ce soit pour agir ou pour observer et mesurer. L'instrumentation des plateformes devient incontournable et l'interopérabilité des modules requiert une architecture adaptée du système d'informat...
Article
Full-text available
les microsystèmes de production ont la dualité d’opérer dans l’univers particulier du micromonde et de constituer un système de production à part entière. Ainsi, ils ont la nécessité de pouvoir s’intégrer dans un milieu fondamentalement différent de l’échelle humaine. De plus, il leur faut assurer un certain niveau de productivité, de flexibilité e...
Conference Paper
Full-text available
The development of new hybrid microsystems needs new technologies which are able to perform assembly of small micro-objects. Now, the current micromanipulation technologies are still unreliable for micro-objects which typical size is down to hundred micrometers. Consequently, the study and the development of innovative artificial micro-object manip...
Article
Full-text available
The development of new hybrid microsystems needs new technologies which are able to perform assembly of small micro-objects. Now, the current micromanipulation technologies are still unreliable for micro-objects which typical size is down to hundred micrometers. Consequently, the study and the development of innovative artificial micro-object manip...
Article
Full-text available
This paper presents an overview of the French research program PRONOMIA which deals with new methods for robotic micromanipu-lation and especially on submerged micromanipula-tion. During microscale object manipulation, con-tact (pull-off) forces and non-contact (capillary, van der Waals, and electrostatic) forces determine the behavior of the micro...

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