Daniel Staaks

Daniel Staaks
Seagate Technology

Ph.D.
Advanced Media Development

About

6
Publications
1,029
Reads
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51
Citations
Citations since 2017
4 Research Items
51 Citations
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2017201820192020202120222023051015
2017201820192020202120222023051015

Publications

Publications (6)
Article
Chromium and its oxides are valuable as functional materials and plasma-etching hard masks in micro- and nanofabrication. While the continuous decrease in feature sizes opens new opportunities for applications of patterned chromium, the demands placed on the patterning process require a new level of mechanistic understanding. In this work, we inves...
Article
In scanning electron microscopy (SEM), imaging nanoscale features by means of the cross-sectioning method becomes increasingly challenging with shrinking feature sizes. However, obtaining high quality images, at high magnification, is crucial for critical dimension and patterned feature evaluation. Therefore, in this work, we present a new sample p...
Article
The next generation of hard disk drive technology for data storage densities beyond 5 Tb/in<sup>2</sup> will require single-bit patterning of features with sub-10 nm dimensions by nanoimprint lithography. To address this challenge master templates are fabricated using pattern multiplication with atomic layer deposition. Sub-10 nm lithography requir...
Article
Full-text available
Single-electron devices operating at room temperature require sub-5 nm quantum dots having tunnel junctions of comparable dimensions. Further development in nanoelectronics depends on the capability to generate mesoscopic structures and interfacing these with complementary metal–oxide–semiconductor devices in a single system. The authors employ a c...
Article
Patterned chromium and its compounds are crucial materials for nanoscale patterning and chromium based devices. Here we investigate how temperature can be used to control chromium etching using chlorine/oxygen gas mixtures. Oxygen/chlorine ratios between 0% and 100% and temperatures between -100 °C and +40 °C are studied. Spectroscopic ellipsometry...

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