About
6
Publications
491
Reads
How we measure 'reads'
A 'read' is counted each time someone views a publication summary (such as the title, abstract, and list of authors), clicks on a figure, or views or downloads the full-text. Learn more
13
Citations
Current institution
Publications
Publications (6)
Nano/microelectromechanical systems (N/MEMS) based complementary logic circuits offer a physically robust alternative to conventional CMOS control systems, which are able to function in environments unsuitable for transistor devices. In this work we demonstrate novel, configurable, complementary logic circuits comprised entirely of relays at both N...
Cryogenic deep reactive ion etching (Cryo DRIE) of silicon has become an enticing but challenging process utilized in front-end fabrication for the semiconductor industry. This method, compared to the Bosch process, yields vertical etch profiles with smoother sidewalls not subjected to scalloping, which are desired for many microelectromechanical s...
A thorough understanding of arc discharge mechanism as well as determination of arc discharge voltage at the nanometer scale remains challenging due to the complexities associated with electrode preparation and precisely maintaining nanoscale separations in experiments. This work addresses this challenge through a novel approach by accurately measu...
Nano electro-mechanical systems (NEMS) based combinational logic circuits have garnered attention as possible replacements for electronic logic systems in safety critical environments where conditions make the use of electronics non-ideal. The principal advantages of NEMS are the inherent near zero leakage current and ability to operate in harsh co...
We measure the stiction force using in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts. The average current-dependent values of the stiction force, ranging from 60 nN to 265 nN, were extracted using the I DS vs V GS hysteresis curves, the cantilever displacement information from finite element method (Co...
