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Citations since 2017
4 Research Items
Currently pursuing an academic career as a PhD candidate at the IDS group at the University of Twente. This research focuses on new methods and new materials to grow thin films by Atomic Layer Deposition (ALD).
A novel atomic layer deposition (ALD) process was developed for low-resistivity molybdenum (Mo) from molybdenum dichloride dioxide (MoCl2O2) and atomic hydrogen (at-H). A wide ALD window of self-limiting growth was observed between 150 and 450 °C. No film deposition occurred with molecular hydrogen (H2), demonstrating the necessity to have at-H to...
We report on the fabrication and modification of a top-down nanofabrication platform for enormous parallel silicon nanowire-based devices. We explain the nanowire formation in detail, using an additive hybrid lithography step, optimising a reactive ion etching recipe for obtaining smooth and vertical nanowires under a hybrid mask, and embedding the...
This paper introduces a new self-aligned procedure for wafer-scale fabrication of curved metal-insulator-semiconductor (cMIS) tunneling junctions with nanometric lateral dimensions. The fabrication process is based on the use of an array of silicon nano-pillars embedded in a silicon nitride membrane. The junctions are formed at the apex of pyramida...