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Citations since 2017
6 Research Items
July 2018 - October 2022
Field of study
- Applied physics and semiconductor spectroscopy
This thesis describes low temperature growth of wide band gap metal oxide thin films deposited by thermal (T-) and plasma-enhanced (PE-) atomic layer deposition (ALD) techniques in which high quality materials are grown with atomic level precision. Metal oxides are extensively investigated due to their exceptional physical and chemical properties,...
An Al2O3/ZnO heterojunction was grown on a Si single crystal substrate by subsequent thermal and plasma-assisted atomic layer deposition (ALD) in situ. The band offsets of the heterointerface were then studied by consecutive removal of the layers by argon sputtering, followed by in situ X-ray photoelectron spectroscopy. The valence band maximum and...
Indium oxide (InxOy) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) using trimethylindium and oxygen plasma in a low-temperature range of 80–200 °C. The optical properties, chemical composition, crystallographic structure, and electrical characteristics of these layers were investigated by spectroscopic ellipsometry (S...
Gallium oxide (Ga2O3) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) applying a capacitively coupled plasma source where trimethylgallium (TMGa) as the gallium precursor and oxygen (O2) plasma were used in a substrate temperature (Ts) in the range of 80–200 °C. TMGa exhibits high vapor pressure and therefore facilitate...
In situ real-time ellipsometry (irtE) with a very high time resolution of 24 ms was applied to monitor the inductively coupled plasma enhanced atomic layer deposition (ALD) process of Al2O3 thin films to precisely resolve each step of the ALD process and its complete cycle. The influence of plasma power, plasma pulse duration, and deposition temper...
Magnetic levitation still remains one of the most interesting properties of the high-temperature cuprate superconductors, when these materials are manipulated with nanoparticles. There is not only a technological point of view, but also a theoretical interest in understanding their mechanism more precisely. In this study, we report magnetic levitat...
The influence of nano-sized Al2O3 particles doping on the lattice parameters of YBCO superconductor samples was investigated. Specimens of YBa2Cu3O7-δ with slight amounts of Al2O3 nanoparticles (0.00-0.06 wt%) are synthesized by conventional solid state reaction method. The structural characterization of all samples has been carried out by X-ray di...