Alexey Antonovich Goncharov

National Academy of Sciences of Ukraine | ISP · Department of gas electronics

Evaporation of micro-droplets in an arc plasma flow under the action of a self-consistency electron beam and the condition of direct heating of micro-droplets by fast electrons are considered. It is shown that the plasma is heated under the influence of the beam, even taking into account the fact that the electrons and ions of the plasma lose energ...

2D-hybrid model was created for the proposed new type accelerator with a virtual cathode which allows to avoid sputtering of the cathode surface and to preserve the dynamics of accelerated ions. In the framework of the model, it was shown that ions first form a positive space charge in the system center, and eventually, under an ac-tion of created...

The Hall-type accelerator with closed Hall current and open (that is unbounded by metal or dielectric) walls was proposed and considered both theoretically and experimentally. The novelty of this accelerator is the use of a virtual parallel surface of the anode and the cathode due to the principle of equipotentialization of magnetic field lines, wh...

The additional pumping of energy into arc plasma flow by the self-consistently formed radially directed beam of high-energy electrons for evaporation of micro-droplets is considered. The radial beam appears near the inner cylindrical surface by secondary ion - electron emission at this surface bombardment by peripheral arc plasma flow ions. The bea...

The paper presents the experimental study of pulsed plasma source with hollow cathode intended for bipolar electron-optical system with open-boundary plasma. The proposed configuration of the plasma source includes two ring-shaped discharge cells based on plasma thruster technology. The plasma source can operate both in a low-current high-voltage m...

The conceptual design of pulsed plasma source for plasma-optic application and materials modification are investigated. The source is based on plasma thruster’s technology, that were developed by Goncharov’s group in Institute of Physics (Kiev, Ukraine). The plasma device with its two modified closed-drift anode layer thrusters can operate in low-c...

This is a brief review of the current status of study and progress in devices for a new generation of plasma-dynamic tools based on combining a vacuum-arc plasma source with an axially symmetric cylindrical electrostatic plasma-optical lens into a single device. The combined system operates using the basic plasma-optical principles of magnetic elec...

Recent developments of novel plasma-optical systems are described. For the first time, a combined system including a MEVVA plasma source with a cylindrical electrostatic plasma-optical lens is considered. This combined system is of fundamental interest and could be attractive for a number of practical applications. The system can be used for effect...

Brief review of an ongoing research and development of the novel generation plasmaoptical tools based on the axial-symmetric cylindrical electrostatic plasma lens configuration and the fundamental plasmaoptical principles of magnetic electron isolation and equipotentialization magnetic field lines is presented. As an related to this system, the too...

The combined system composed of the vacuum arc evaporator and plasmaoptical system with plasma lens (PL) geometry are presented and studied. The plasmadynamical characteristics of high density low energy plasma flow propagating through the PL are investigated. The application of the plasma lens to the transport of low energy high-current ion beam c...

The original approach to use Hall-type plasma accelerators with closed electron drift and open walls for production converging towards axis accelerating ion beam describes here. The two-dimensional theoretical hybrid model was created. The performed computer modeling showed that in high-current mode the potential drop forms at the axis. This effect...

We describe our observations of the transport through an electrostatic plasma lens of a wide-aperture, high-current, low energy, metal-ion plasma flow produced by a cathodic arc discharge. The lens input aperture was 80 mm, the length of the lens was 140 mm, and there were three electrostatic ring electrodes located in a magnetic field formed by pe...

This is a brief review of last results of ongoing research of the new generation plasma optic devices on base of wide aperture cylindrical electrostatic plasma lens, that open up novel possibility for effective practical applications in modern high-tech. The most attractive new applications are removing microparticles from vacuum arc plasma stream...

The article devotes a brief description of the recent development and current status of an ongoing research of plasma optical systems based on the fundamental plasma optical idea magnetic electron isolation, equipotentialization magnetic field lines, and the axi-symmetric cylindrical electrostatic plasma lens (PL) configuration. The experimental, t...

We present the original approach to use plasma accelerators with closed electron drift (Hall-type ion sources), which, unlike traditional accelerators with metal and dielectric walls, have open walls and can be applied for creation cost effective low maintenance plasma devices based on plasma lens configuration for production of converging towards...

The results of investigation of emission productivity of negative particles source with cesiated combined discharge are presented. A cylindrical beam of negative hydrogen ions with density about 2 A/cm2 in low noise mode on source emission aperture is obtained. The total beam current values are up to 200 mA for negative hydrogen ions and up to 1.5...

The additional pumping of energy into arc plasma flow by the self-consistently formed radially directed beam of high-energy electrons for evaporation of micro-droplets is considered. The radial beam appears near the inner cylindrical surface by secondary ion - electron emission at this surface bombardment by peripheral arc plasma flow ions. The bea...

It is shown that the ion plasma flow originated from cathodic spots of vacuum arc discharge, at its propagation through cylindrical electrode with proper voltage bias, initiates hollow cathode discharge, which is self-sustained and continues its glow after the ion plasma flow blow out. At that, the hollow cathode discharge plasma features (electron...

We present the original approach to use plasma accelerators with closed electron drift and open walls for creating effective lens with positive space charge. In paper describes one-dimensional model and simplest analytical solutions following from it. The results of the numerical calculation and some experimental investigations data are presented a...

An important disadvantage of the cathodic arc deposition is the presence in the plasma flow microdroplet fraction and their inclusion into the coating. The microdroplets adversely affect the performance of the coating and limiting the applications for cathodic arc deposition. First a new original approach for the effective removal of the microdropl...

We present new results of computer modeling two new generation plasma optical devices based on the electrostatic plasma lens configuration that open up perspective possibility for high-tech effective applications. There describe development numerical model computer simulation results of a wide-aperture non-relativistic intense electron beam propaga...

We present the original approach to use plasma accelerators with closed electron drift and open walls for creating effective lens with positive space charge.The paper describesone-dimensional model and simplest analytical solutions following from it. The results of the numerical calculations and some experimental investigations data are presented a...

Pulsed electron beams with high (1÷100 J/cm2) energy density are used in various processes involved in structural and functional modification of surface properties of materials and products. One of the main problems of successful electron beam application is to develop reliable and efficient methods of transport and manipulation of electron beams w...

27 августа 2012 г. В окончательной редакции 6 июня 2013 г.) Найдены и описаны условия оптимального и контролируемого осаждения нанослоев диоксида титана в плазме цилиндрического газового разряда магнетронного типа специальной конструкции. Характериза-ция полученных пленок методом рамановской спектроскопии позволила определить режимы осаждения аморф...

The conditions of the optimum and controlled deposition of titanium dioxide nanolayers in the cylindrical gas discharge plasma of a magnetron having a unique design are found and described. The examination of the grown films by Raman spectroscopy is used to determine the conditions of deposition of the amorphous and polycrystalline phases of titani...

An original plasma-optical device for focusing and manipulating negatively charged particle beams by a dynamic cloud of non-magnetized free positive ions and magnetically isolated electrons produced by a toroidal plasma source such as an anode layer thruster has recently been proposed and explored. In such systems, the electrons are separated from...

Titanium dioxide is the environmentally friendly photocatalyst with many interesting and attractive properties for industrial applications. We describe the reactive deposition of TiO2 nanofilms by inverted gas cylindrical DC magnetron. The obtained samples are characterized by means of ellipsometry, Raman spectroscopy, AFM, and optical spectroscopy...

A method and apparatus for depositing a metal onto a substrate using a cathodic arc plasma source as a source of metal ions. A plasma deposition apparatus has a vacuum chamber; and a conduit within the vacuum chamber having an input end and an output end. A substrate is within the vacuum chamber, positioned to receive a plasma at the output end of...

The enhanced interest to synthesis of thin and extra-thin films using for surface materials modification continue to be quite actual up to now. A special attention is drawn to coatings having important for practical applications characteristics with costs-effective production. These may be the films of binary compounds of certain metals, particular...

In this paper, we present the research results on focusing and transport of an intense (up to 100 A) nonrelativistic (up to 20 kV) pulsed electron beam using an axially symmetric device with a high-current plasma lens configuration. The electron source is based on electron extraction from the plasma of a hollow-anode vacuum arc discharge. The arc i...

The fundamental principles, experimental results, and potential applications of the electrostatic plasma lens for focusing and manipulating high-current, energetic, heavy ion beams are reviewed. First described almost 50 years ago, this optical beam device provides space charge neutralization of the ion beam within the lens volume, and thus provide...

We describe the new experimental and simulation results of wide-aperture (6 cm) non-relativistic (up to 18 keV) intense (up to 400 mA) electron beam focusing by the positive-space-charge plasma lens. Recently we proposed and explored a new original plasma-optical tool for negative charged particle beams focusing and manipulating with a dynamic clou...

We describe the current status of ongoing research and development of the wide aperture electrostatic plasma lens with positive space charge cloud for focusing and manipulating large area high current electron beams. It is presented new theoretical and experimental results of wide-aperture (diameter 6 cm), non-relativistic (up to 20 keV) high-curre...

The paper describes the peculiarities of deposition nano-sized titanium dioxide coatings in the cylindrical inverted gas magnetron. It is shown the influence of the main parameters magnetron sputtering, like as working gas pressure and temperature of substrate, on film grain size, porosity and optical properties of deposited TiO2 nanofilms. The inv...

This paper presents research results on focusing and transport of an intense (up to 100 A) nonrelativistic (up to 20 kV) pulsed electron beam using a positive space charge plasma lens. The electron source is based on electron extraction from the plasma of a hollow-anode vacuum arc discharge. The arc is initiated by a dielectric surface flashover. T...

While cathodic arc coatings are praised for their high deposition rates and ion densities a major disadvantage is the creation of micro-droplets and their inclusion into the coating. These micro-droplets adversely affect the coating performance and limit the potential applications for cathodic arc coating. Current technologies overcome the disadvan...

Axi-symmetric compression and focusing of a low temperature laser produced copper plasma with an electrostatic plasma optical system was investigated for the first time. The degree of plasma concentration was quantified using Langmuir ion measurements of the ion flow and optical measurements of the thickness distributions of copper depositions on g...

We describe the current status of ongoing research and development of the electrostatic plasma lens for focusing and manipulating intense negatively charged particle beams, electrons, and negative ions. The physical principle of this kind of plasma lens is based on magnetic isolation electrons providing creation of a dynamical positive space charge...

We describe a new approach for the creation of effective axially symmetric plasma tools for focusing and manipulating high-current negatively charged particle beams, negative ions, and electrons. This approach is based on the fundamental plasma-optical concept of magnetic and electrostatic insulation of electrons and nonmagnetized positive ions pro...

We describe the development of the plasma lens with dynamic positive space charge for manipulating and focusing intense beams of negative charge particles. Floating potential spatial distributions in lens with modified magnetic field are investigated. It is shown that magnitude of magnetic field at the lens cloud area doesn't impact essentially on...

The plasma-dynamic and spectral characteristics of a cylindrical magnetron-type gas discharge are studied experimentally. The radiation spectrum of the plasma is recorded in real time in the range 350–820 nm. Appropriate conditions for synthesis of TiO2 binary compound are found. They are provided by maintaining the intensities of the spectral line...

We describe new results of development of novel generation cylindrical plasma devices based on the electrostatic plasma lens configuration and concept of electrons magnetic insulation. The crossed electric and magnetic fields plasma lens configuration provides us with the attractive and suitable method for establishing a stable plasma discharge at...

This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.

100…150 нм/мин) в слаботочном режиме и на порядок больше в сильноточном. Плотность тока в факеле составляет до 3% от плотности тока разряда и плавающий потенци-ал − до 0,8 анодного потенциала. 1. ВВЕДЕНИЕ Плазмооптические системы разных типов, бази-рующиеся на фундаментальном принципе магнит-ной изоляции электронов и эквипотенциализации силовых лин...

In the paper we present a new approach for creation effective axially symmetric plasma optical tools for focusing and manipulating high-current beams of electrons and negative ions. This approach is based on fundamental plasma optical concept of magnetic insulation of electrons and non-magnetized positive ions providing creation of controlled uncom...

We present the results of experimental researches of plasmody-namic and optical characteristics of a magnetron-type cylindrical gas discharge. The study was carried out provided a permanent monitoring of the spectrum emitted by plasma in the range 350-820 nm. For the synthesis of binary compound TiO2, we have determined conditions which can be ensu...

It is offered the new plasmaoptics device that are representing an elementary plasmaoptics cylindrical cell with the gas discharge of magnetron type in a mode of direct magnetron. Such device can work both in a high-voltage low-current mode and in high-current low-voltage with generation of a plasma torch. The measured rate of etching is about 100....

We review some new results in the development of novel cylindrical plasma devices based on the electrostatic plasma lens configuration and the concepts of electron magnetic insulation and magnetic field line equipotentialization. The plasma lens configuration of crossed electric and magnetic fields provides an attractive method for establishing a s...

The results of comprehensive experimental investigation into the plasma-dynamic and optical characteristics of a magnetron cylindrical gas discharge are reported. Experiments are carried out under computer monitoring of the spectrum radiated by the discharge plasma in the visual range. Optimal conditions for TiN binary compound synthesis are found....

We present the results of complex theoretical and experimental investigations of cylindrical gas discharges in the configuration of crossed electric and magnetic fields inherent to axially symmetric plasma lenses. An original cylindrical sputtering device constructed based on the principles of plasmaoptics is proposed and tested. A new systematic v...

We describe a new approach for creation an effective, low-cost, low-maintenance axially symmetric plasma optical tools for focusing and manipulating high-current beams of negatively charged particles, electrons and negative ions. This approach is based on fundamental plasma optical concept of magnetic insulation of electrons and non-magnetized posi...

Here is a brief review some new results of development novel generation cylindrical plasma devices based on an idea of magnetic insulation electrons and an electrostatic plasma lens configuration. The axial-symmetric plasma lens is a well-explored device for manipulating high current, heavy ion beams, that has been used to preference to focus wide-...

In this paper a brief review of some new results of development novel generation cylindrical plasma devices based on the idea of magnetic insulation electrons and an electrostatic plasma lens configuration. The operation and features of some cylindrical plasma devices, based on plasma lens configuration, the results of theoretical consideration pla...

1 Институт физики НАН Украины, Киев, Украина; 2 Институт ядерных исследований, Киев, Украина E-mail: gonchar@iop.kiev.ua Представлены результаты комплексного теоретического и экспериментального исследования цилиндри-ческих газовых разрядов в конфигурации скрещенных электрических и магнитных полей, присущих акси-ально-симметричной плазменной линзе....

We describe the state-of-the-art method of monitoring optical parameters the cylindrical gas discharge plasma of magnetron type. An analysis and characterization of the spectrum during a process of titanium nitride deposition is carried out. The optimum conditions of titanium nitride synthesis on substrates are determined. A characterization of dep...

The results of the complex theoretical and experimental investigations of the cylindrical gas discharge are presented. The configuration of the ExH fields of this discharge is similar to axial plasma lens. Original cylindrical sputtering system based on plasmaoptical principals is proposed and tested. Based on experimental data it was stated a new...

We review some novel developments of the electrostatic plasma lens and some new plasma devices based on the plasma-optical idea of magnetic insulation of electrons and equipotentialization along magnetic field lines. The plasma lens configuration of crossed electric and magnetic fields provides an attractive and simple method in establishing a stab...

The characteristics of a cylindrical magnetron, such as the dependences of the discharge voltage, chamber pressure, and plasma radiation intensity on the reactive gas flow rate and discharge current, are studied. In this magnetron, titanium nitride (TiN) and titanium dioxide (TiO2) films are obtained by reactive magnetron sputtering. The transmissi...

The structure and nonlinear dynamics of vortices in plasma lens for high-current ion-beam focusing have been investigated theoretically.

We consider the possibility of enhancing the ionization charge states of beam ions by electron vortices excited in cylindrically symmetric plasma optical systems of finite length with crossed radial electric and longitudinal magnetic fields.

Summary form only given. The self-consistent two dimensional model of discharge in cross ExH-fields with closed electrons drift had been creating and results from the model arc presented. The system of equations is solved numerically using a finite difference technique. The distribution of electron density, temperature, current density and potentia...

The operation of any magnetron-type sputtering system is based on using of anomalous glow discharge in a crossed B E ⊥ fields. In such systems a principle of magnetic isolation of electrons is realized and idea of magnetic lines equipotentialization for control of ions flow on cathode-target can be applied quite well. In the present work, with cons...

We describe here the first experimental results of the observation of electron vortex structures in electrostatic plasma lens caused both by unremovable radial gradients of magnetic field and the high radial gradient of electron density. Anharmonic large-amplitude potential waves propagating in azimuth direction are observed. The results of the mea...

We review some recent developments of the electrostatic plasma lens and some novel plasma devices based on the 'plasma lens concept' of magnetic insulation of electrons and equipotentialization along magnetic field lines. The plasma lens configuration of crossed electric and magnetic fields provides an attractive and simple method for establishing...

We describe the results of investigations of the suitability of the electrostatic plasma lens as a focusing element in the low-energy injection beam lines of particle accelerators. We have explored the focusing of high-current, wide-aperture, heavy-ion beams by a plasma lens. The results indicate that for optimal focusing conditions the lens does n...