Question
Asked 22 May 2020

Is there any commercial mems stress sensor chip ?

I had found some literature that develops MEMS stress sensor (CMOS, N-MOS, P-MOS). However, I can't find commercial solutions for this type of sensor. Is there any replacement? (Stress measurement, tiny dimension).
Many thanks

Most recent answer

Nick Hamburger
HN Consulting
What kind of stress ? Human ? Material ?
Stress is a genetic word if you do not specify you get answers which are not what you want.
Tell exactly what you want to do and then you get the right answer.
The 2 spots are on what kind of support skin, wood, high resistance steels, polymere ? Which is the "stress amplitude" you expect to reach?
How do you want to bind the sensor to your support ? How small is the area where the spots are ? How low or high can be the uncertainty ? Is temperature constant or variable in which interval ? How fast the "stress" will change ?
Only with the correct specification you get the correct answer.

Popular answers (1)

Abdelhalim abdelnaby Zekry
Ain Shams University
Dear Py,
There are many types of stress sensor. All pressure sensors can be used for this purpose. Sure there are mems pressure sensor. As material wise one can use resistive or capacitive sensors. Very thin sheet of semiconductors can be used as diaphragms to receive the pressure. There is also the piezoelectic materials which can be used as a pressure sensor. You may refer to the site in the link:
Best wishes
5 Recommendations

All Answers (7)

Ihab A. Satam
Northern Technical University
that is a good question
Now Mems is one of the promising technologies that can be aspecting towards the growth of.
For the above one you can use the rotational sensors that can be used for measurement.
1 Recommendation
Nick Hamburger
HN Consulting
Which parameters do you want to quantify as "measure" of stress ?
1 Recommendation
Abdelhalim abdelnaby Zekry
Ain Shams University
Dear Py,
There are many types of stress sensor. All pressure sensors can be used for this purpose. Sure there are mems pressure sensor. As material wise one can use resistive or capacitive sensors. Very thin sheet of semiconductors can be used as diaphragms to receive the pressure. There is also the piezoelectic materials which can be used as a pressure sensor. You may refer to the site in the link:
Best wishes
5 Recommendations
Ll Lee
City University of Hong Kong
@Abdelhalim Zekry Thanks. Indeed, I can find some mems pressure sensor packaged in tiny dimension. However, it seems that pressure sensor usually measure the air pressure. My target application is measuring the stress between two contact surface within tiny area.
Nick Hamburger
HN Consulting
What kind of stress ? Human ? Material ?
Stress is a genetic word if you do not specify you get answers which are not what you want.
Tell exactly what you want to do and then you get the right answer.
The 2 spots are on what kind of support skin, wood, high resistance steels, polymere ? Which is the "stress amplitude" you expect to reach?
How do you want to bind the sensor to your support ? How small is the area where the spots are ? How low or high can be the uncertainty ? Is temperature constant or variable in which interval ? How fast the "stress" will change ?
Only with the correct specification you get the correct answer.

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