System representation of the proposed polyimide-based MEMS structure together with the peripheral electronics.

System representation of the proposed polyimide-based MEMS structure together with the peripheral electronics.

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This work presents the design, implementation, and characterization of a piezoresistive force sensor integrated into a flexible printed circuit board (FlexPCB). We propose a flexPCB-based MEMS sensing system with graphite as the sensing element and polyimide as the principal substrate material, intended for disposable and low-cost applications. The...